公开(公告)号：US20040174955A1

公开(公告)日：2004-09-09

申请号：US10626748

申请日：2003-07-22

Inventor： Chang Hee Nam ,  Dong Gun Lee

IPC: H01J035/00 ,  H01J035/22 ,  H01J035/32

CPC classification number: H05G2/003 ,  G01N23/20075 ,  G02F2001/354 ,  H01S4/00

Abstract: Disclosed herein is a point-diffraction interferometer which can inspect a surface quality of an optical system for extreme ultraviolet lithography using a high-order harmonic X-ray source with excellent coherence, and an apparatus and method for generating a high-order harmonic X-ray. The present invention uses a high-order harmonic X-ray beam as a coherence light source, thus remarkably reducing the size of an apparatus for generating a light source to approximately {fraction (1/100)} of a device using a light source generated in a conventional synchrotron. Further, the present invention simplifies the construction of an interferometer by employing a thin foil in which a pinhole is formed through a drilling technique using high power femtosecond laser, thus increasing the industrial utility of the interferometer.

Abstract translation: 本文公开了一种点衍射干涉仪，其可以使用具有优异相干性的高次谐波X射线源来检查用于极紫外光刻的光学系统的表面质量，以及用于产生高次谐波X射线的装置和方法， 射线。 本发明使用高次谐波X射线束作为相干光源，从而将用于产生光源的装置的尺寸显着地减小到近似{分数（使用在...中产生的光源的装置的1/100） 此外，本发明通过使用通过使用高功率飞秒激光的钻孔技术形成针孔的薄箔来简化干涉仪的结构，从而增加了干涉仪的工业实用性。

公开(公告)号：US20020048345A1

公开(公告)日：2002-04-25

申请号：US09973313

申请日：2001-10-09

Inventor： Peter Klaus Bachmann ,  Volker Van Elsbergen ,  Bernd David ,  Rainer Willi Eckart ,  Geoffrey Harding

IPC: H01J035/00 ,  H01J035/22 ,  H01J035/32

CPC classification number: H01J33/04 ,  H01J5/18 ,  H01J35/18 ,  H01J2235/082

Abstract: The invention relates to a window transparent to electron rays comprising a foil (1, 10, 300a) transparent to electron rays and separated from a carrier substrate as well as a retaining element (2, 300b) for supporting a peripheral region of the foil transparent to electron rays in the operational state, which retaining element (2, 300b) is made of a material which has a linear thermal expansion coefficient which matches the linear thermal expansion coefficient of the foil material. The invention further relates to a method of manufacturing a window transparent to electron rays and an X-ray device with such a window.

Abstract translation: 本发明涉及对电子射线透明的窗口，该窗口包括对电子射线透明并与载体衬底分离的箔片（1,10,300a）以及用于支撑箔片周边区域透明的保持元件（2,300b） 与保持元件（2,300b）由具有与箔材料的线性热膨胀系数相匹配的线性热膨胀系数的材料制成的工作状态下的电子射线。 本发明还涉及制造对电子射线透明的窗口的方法和具有这种窗口的X射线装置。

公开(公告)号：US20020154740A1

公开(公告)日：2002-10-24

申请号：US10102509

申请日：2002-03-19

Applicant: Advanced Electron Beams, Inc.

Inventor： Tzvi Avnery

IPC: H01J035/08 ,  H01J035/32

CPC classification number: A61L2/082 ,  A61L2/08 ,  A61L2202/24 ,  G21K5/04 ,  H01J35/08 ,  H01J35/18 ,  H01J2235/186

Abstract: An X-ray beam emitter including a vacuum chamber having a target window. An electron generator is positioned within the vacuum chamber for generating electrons that are directed at the target window for forming X-rays. The X-rays pass through the target window in an X-ray beam.

Abstract translation: 一种X射线束发射器，包括具有目标窗口的真空室。 电子发生器位于真空室内，用于产生指向目标窗口以形成X射线的电子。 X射线穿过目标窗口。

公开(公告)号：US20020154739A1

公开(公告)日：2002-10-24

申请号：US09760815

申请日：2001-01-17

Inventor： Victor I. Chornenky ,  Eunsung Park ,  Graham S. Kerslick ,  Ali Jaafar ,  Mark Gailloux

IPC: H01J035/00 ,  H01J035/22 ,  H01J035/32

CPC classification number: A61N5/1001 ,  H01J35/32 ,  H01J2235/164

Abstract: An emitter for a miniature X-ray apparatus comprises an insulating shell, an anode, and a cathode. The insulating shell includes a conical brazing surface, brazed to a conical brazing surface on the anode. The braze consists of a pure titanium layer and a pure tin layer. During brazing, the pure metals react and bond to the insulating shell and create a titanium-tin alloy between the pure layers. Pure tin is sputtered from tin sputter target onto the exposed brazing surfaces of the cathode cap and the anode. The insulating shell is placed in a vacuum chamber of deposition applicator, which deposits an active metal onto the shell brazing surface. In a brazing oven, the anode is placed within insulating shell such that the anode conical brazing surface and the shell conical brazing surface are contacting and aligned with each other. During brazing, the cathode is brought into contact with the insulating shell. The sealed emitters are placed in a sputtering machine's vacuum chamber. A metal is sputtered from a sputtering target to form a metal layer on the exterior of insulating shell.

Abstract translation: 用于微型X射线装置的发射器包括绝缘壳，阳极和阴极。 绝缘壳包括锥形钎焊表面，钎焊到阳极上的锥形钎焊表面。 钎焊由纯钛层和纯锡层组成。 在钎焊过程中，纯金属与绝缘壳反应并结合，并在纯净层之间产生钛 - 锡合金。 将纯锡从锡溅射靶溅射到阴极帽和阳极的暴露的钎焊表面上。 将绝缘壳体放置在沉积涂敷器的真空室中，该真空室将活性金属沉积到壳体钎焊表面上。 在钎焊炉中，将阳极放置在绝缘壳内，使得阳极锥形钎焊表面和壳体锥形钎焊表面彼此接触并对准。 在钎焊过程中，阴极与绝缘壳接触。 将密封的发射器放置在溅射机的真空室中。 从溅射靶溅射金属，在绝缘壳的外部形成金属层。

公开(公告)号：US20040240618A1

公开(公告)日：2004-12-02

申请号：US10817988

申请日：2004-04-05

Inventor： Edward L. McGuire

IPC: H01J035/00 ,  H01J035/22 ,  H01J035/32 ,  H01J035/30

CPC classification number: H01J35/30 ,  H01J35/08 ,  H01J2235/081 ,  H01J2235/088

Abstract: By arranging for a collection of different materials to be used as x-ray targets in a single x-ray generator tube, an X-ray generator that can transmit a collection of unique x-ray spectra is produced according to one embodiment of the present invention. Spectrum selection can be accomplished by electronic means (with great speed) by deflecting an electron beam by means of electric fields, magnetic fields, and any combination of the two.

Abstract translation: 通过在单个X射线发生器管中布置用作x射线靶的不同材料的集合，根据本发明的一个实施例产生可传输独特x射线光谱的集合的X射线发生器 发明。 频谱选择可以通过电子手段（高速度）通过电场，磁场和两者的任意组合偏转电子束来实现。

公开(公告)号：US20040114721A1

公开(公告)日：2004-06-17

申请号：US10614787

申请日：2003-07-09

Applicant: Applied Nanotechnologies, Inc.

Inventor： Qi Qiu ,  Jianping Lu ,  Otto Z. Zhou

IPC: H01J035/00 ,  H01J035/22 ,  H01J035/32

CPC classification number: B82Y10/00 ,  H01J35/065 ,  H01J2201/30469 ,  H01J2235/062 ,  H01J2235/068 ,  Y10S977/95

Abstract: An x-ray generating device includes at least one field-emission cathode having a substrate and incorporating nanostructure-containing material including carbon nanotubes. The device further includes at least one anode target. Associated methods are also described.

Abstract translation: x射线产生装置包括至少一个场致发射阴极，其具有衬底并且包括纳米结构材料，包括碳纳米管。 该装置还包括至少一个阳极靶。 还描述了相关方法。

公开(公告)号：US20030012340A1

公开(公告)日：2003-01-16

申请号：US09905267

申请日：2001-07-13

Applicant: Medtronic AVE, Inc.

Inventor： Victor Chornenky

IPC: H01J035/32

CPC classification number: A61N5/1001 ,  H05G1/46

Abstract: An x-ray emitting system and method for administering a predetermined x-ray dose rate are provided. The system includes an x-ray emitter, a controller operably connected to the x-ray emitter, a current sensor operably connected to the controller, and a voltage sensor operably connected to the controller. The controller determines an actual dose rate based on a received current sensor signal and a received voltage sensor signal and adjusts a supplied voltage to allow the actual dose rate to match a predetermined dose rate. The method of operating a device for emitting x-rays includes: applying a voltage from a voltage source to the device, measuring current and voltage within the device, determining an actual dose rate based on the measured current and voltage, comparing a desired dose rate to the actual dose rate, adjusting the applied voltage, and matching the actual dose rate to the desired dose rate.

Abstract translation: 提供了用于施用预定x射线剂量率的x射线发射系统和方法。 该系统包括x射线发射器，可操作地连接到x射线发射器的控制器，可操作地连接到控制器的电流传感器和可操作地连接到控制器的电压传感器。 控制器基于接收到的电流传感器信号和接收到的电压传感器信号来确定实际剂量率，并且调整所提供的电压以允许实际剂量率与预定剂量率匹配。 操作用于发射x射线的装置的方法包括：将来自电压源的电压施加到装置，测量装置内的电流和电压，基于测量的电流和电压确定实际剂量率，将期望的剂量率 到实际剂量率，调整施加的电压，并将实际剂量率与期望的剂量率相匹配。

公开(公告)号：US20040208288A1

公开(公告)日：2004-10-21

申请号：US10760827

申请日：2004-01-20

Inventor： Eberhard Lenz

IPC: H01J035/00 ,  H01J035/22 ,  H01J035/32

CPC classification number: H01J35/08 ,  B23H7/108 ,  B23K26/364 ,  B23K26/60 ,  B24C1/045 ,  H01J9/02

Abstract: An X-ray anode is produced by scoring at least a region of a surface of the anode, on which electrons are incident, with a number of defined microslits, thereby making the surface, or at least the region thereof, highly thermally stressable.

Abstract translation: X射线阳极是通过刻划电子入射的阳极的表面的至少一部分区域产生多个限定的微裂纹，从而使表面或至少其区域具有高度的热应力。

公开(公告)号：US20040091081A1

公开(公告)日：2004-05-13

申请号：US10702219

申请日：2003-11-05

Inventor： Udo Emil Frank

IPC: H01J035/32

CPC classification number: H01J35/08 ,  H01J35/14 ,  H01J2235/087

Abstract: A microfocus X-ray tube is provided, and comprises a head that during operation of the X-ray tube faces an object that is to be inspected. The head has an outer surface with a cross-section that tapers toward a free end of the head. A target is disposed on or in the head. A mechanism is provided for forming an electron beam adapted to bombard the target, and forms the electron beam such that the X-ray tube has a focus with a diameter of null200 nullm. The target has an outer surface with a cross-section that tapers toward an end of the target that during the operation of the X-ray tube faces an object that is to be inspected. A collimator can be provided for the target and also has an outer surface with a cross-section that tapers toward an end of the collimator that during operation of the X-ray tube faces an object that is to be inspected.

Abstract translation: 提供微焦X射线管，并且包括在X射线管的操作期间面对要检查的物体的头部。 头部具有外表面，其横截面朝向头部的自由端逐渐变细。 目标被放置在头上或头部。 提供了用于形成适于轰击靶的电子束的机构，并形成电子束，使得X射线管具有直径<=200μm的焦点。 目标具有外表面，其横截面朝向目标的端部逐渐变细，在X射线管的操作期间面向要检查的物体。 可以为目标提供准直器，并且还具有外表面，其横截面朝向准直器的端部逐渐变细，在X射线管的操作期间面对待检查的物体。

公开(公告)号：US20020094064A1

公开(公告)日：2002-07-18

申请号：US10051183

申请日：2002-01-22

Inventor： Otto Z. Zhou ,  Jianping Lu ,  Qi Qiu

IPC: H01J035/00 ,  H01J035/22 ,  H01J035/32

CPC classification number: H01J35/14 ,  A61B6/032 ,  A61B6/4028 ,  B82Y10/00 ,  H01J35/065 ,  H01J35/22 ,  H01J2201/30469 ,  H01J2235/064 ,  H01J2235/068 ,  H05G1/34

Abstract: A structure to generate x-rays has a plurality of stationary and individually electrically addressable field emissive electron sources with a substrate composed of a field emissive material, such as carbon nanotubes. Electrically switching the field emissive electron sources at a predetermined frequency field emits electrons in a programmable sequence toward an incidence point on a target. The generated x-rays correspond in frequency and in position to that of the field emissive electron source. The large-area target and array or matrix of emitters can image objects from different positions and/or angles without moving the object or the structure and can produce a three dimensional image. The x-ray system is suitable for a variety of applications including industrial inspection/quality control, analytical instrumentation, security systems such as airport security inspection systems, and medical imaging, such as computed tomography.

Abstract translation: 产生X射线的结构具有多个静电和单独可电寻址的场发射电子源，其具有由诸如碳纳米管的场发射材料组成的衬底。 以预定频率电场电场切换场致发射电子源以可编程序列朝向目标上的入射点发射电子。 产生的x射线的频率和位置与场发射电子源的频率和位置相对应。 发射器的大面积目标和阵列或矩阵可以对来自不同位置和/或角度的物体进行成像，而不移动物体或结构，并可产生三维图像。 x射线系统适用于各种应用，包括工业检测/质量控制，分析仪器，机场安全检查系统等安全系统和计算机断层扫描等医学成像。