公开(公告)号：US06605889B2

公开(公告)日：2003-08-12

申请号：US09999398

申请日：2001-10-24

Applicant: Shinichi Anami ,  Robert Chandler ,  Oleg Popov

Inventor： Shinichi Anami ,  Robert Chandler ,  Oleg Popov

IPC: H01J150

CPC classification number: H01J65/048 ,  H01J61/523

Abstract: An electrodeless low pressure discharge lamp comprises an envelope made from a straight tube and a reentry cavity sealed to one of tube's ends. The cavity has several hollow ferrite cores separated from each other with a few mm distance. Each ferrite core has an induction coil of few turns wound around the core. Each cavity has a cooling copper tube or rod located inside the ferrite core that removes heat from the cores and dumps the heat into a heat sink welded to the cooling tube/rod thereby keep the temperature of the ferrite cores below their Curie point. Each induction coil is electrically connected to the matching network while all matching networks are connected in parallel to the high frequency power source (driver). Inductively coupled plasmas generated in the envelope by several core/coil assemblies produce axially uniform UV and visible radiation.

Abstract translation: 无电极低压放电灯包括由直管形成的封套和密封到管端之一的再入腔。 空腔具有几个中空的铁氧体磁心，彼此间隔几毫米。 每个铁氧体磁芯具有围绕磁芯缠绕的几圈的感应线圈。 每个空腔都有一个位于铁氧体磁芯内部的冷却铜管或杆，从芯中除去热量，并将热量转移到焊接到冷却管/棒上的散热片中，从而将铁氧体磁芯的温度保持在居里点以下。 每个感应线圈电连接到匹配网络，而所有匹配网络并联连接到高频电源（驱动器）。 通过多个芯/线圈组件在封套中产生的电感耦合等离子体产生轴向均匀的UV和可见光辐射。

公开(公告)号：US06249078B1

公开(公告)日：2001-06-19

申请号：US09123279

申请日：1998-07-28

Applicant: Mutsumi Mimasu

Inventor： Mutsumi Mimasu

IPC: H01J150

CPC classification number: H01J65/044 ,  H01J61/125 ,  H01J61/72

Abstract: In a microwave-excited discharge lamp of the present invention, a rare gas 2, a mercury halide 3 as a buffer material, and a metal halide 4 as a luminous material are sealed within an discharge tube 1. This achieves a microwave-excited discharge lamp having excellent stability and a variety of light colors.

Abstract translation: 在本发明的微波激励放电灯中，作为缓冲材料的稀有气体2，作为缓冲材料的卤化汞3和作为发光体的金属卤化物4被密封在放电管1内。这实现了微波激励放电 灯具具有优异的稳定性和各种浅色。

公开(公告)号：US06639343B2

公开(公告)日：2003-10-28

申请号：US09904036

申请日：2001-07-12

Applicant: Kiyoshi Takahashi ,  Yuriko Kaneko ,  Hideaki Kiryu ,  Masato Yoshida

Inventor： Kiyoshi Takahashi ,  Yuriko Kaneko ,  Hideaki Kiryu ,  Masato Yoshida

IPC: H01J150

CPC classification number: H01J61/106 ,  H01J61/125 ,  H01J61/827

Abstract: A mercury-free metal halide lamp includes an arc tube including a pair of electrodes inside the tube. In the arc tube, a rare gas and a metal halide are contained, and no mercury is contained. The mercury-free metal halide lamp is horizontally operated such that the pair of electrodes is substantially horizontal. The mercury-free metal halide lamp further includes magnetic field applying means for applying a magnetic field including a component substantially perpendicular to a straight line connecting heads of the pair of electrodes in a substantially vertical direction. The density of halogen atoms evaporated during steady-state operation with respect to unit inner volume of the arc tube is 20 &mgr;mol/cc or more.

公开(公告)号：US06525463B1

公开(公告)日：2003-02-25

申请号：US09323520

申请日：1999-06-01

Applicant: Pan Kyu Choi ,  Je Gwang Yoo ,  Chang Ho Song

Inventor： Pan Kyu Choi ,  Je Gwang Yoo ,  Chang Ho Song

IPC: H01J150

CPC classification number: H01J29/68 ,  H01J31/127

Abstract: A flat panel display device comprises a cathode on a first substrate for emitting electrons, a magnetic plate including first region focusing electrons emitted from the cathode to display an image and second region for applying the uniform magnetic field into the holes in the first region, and a fluorescent layer on the second substrate, on which the electrons outputted from the holes are impacted. In the second region, there are holes having the same shape and pitch as the first region.

Abstract translation: 平板显示装置包括用于发射电子的第一基板上的阴极，包括聚焦从阴极发射的电子以显示图像的第一区域的磁性板和用于将均匀磁场施加到第一区域中的孔的第二区域，以及 在第二基板上的从孔中输出的电子受到冲击的荧光层。 在第二区域中，具有与第一区域相同的形状和间距的孔。

公开(公告)号：US06404134B2

公开(公告)日：2002-06-11

申请号：US09789612

申请日：2001-02-22

Applicant: Nobuo Ishii

Inventor： Nobuo Ishii

IPC: H01J150

CPC classification number: H01J37/32082

Abstract: A plasma processing system includes a processing vessel for housing therein an object to be processed. In the upper portion of the processing vessel, a substantially disk-shaped electrode plate having a facing surface facing the object is provided. A radio-frequency wave supply unit supplies radio-frequency waves having a flattened waveform which forms substantially a sinusoidal wave whose crest and trough portions are substantially horizontally flattened. The radio-frequency waves supplied from the supply unit are propagated in diametrically opposite directions on the facing surface of the electrode to form standing waves. Similar to the supplied radio-frequency waves, the standing waves also have a waveform which forms substantially a sinusoidal wave whose crest and trough portions are substantially horizontally flattened.

Abstract translation: 等离子体处理系统包括用于在其中容纳待加工物体的处理容器。 在处理容器的上部设置有具有朝向物体的面对面的大致圆盘状的电极板。 射频波供给单元提供具有扁平波形的射频波形，其基本上形成波峰和波谷部分基本水平地平坦化的正弦波。 从供电单元提供的射频波在电极的相对表面沿径向相反的方向传播，形成驻波。 与所提供的射频波相似，驻波也具有基本上形成波峰和谷部大致水平平坦的正弦波的波形。

公开(公告)号：US06323586B1

公开(公告)日：2001-11-27

申请号：US09264477

申请日：1999-03-08

Applicant: Viacheslav V. Zhurin ,  James R. Kahn ,  Harold R. Kaufman

Inventor： Viacheslav V. Zhurin ,  James R. Kahn ,  Harold R. Kaufman

IPC: H01J150

CPC classification number: F03H1/00 ,  H01J1/025 ,  H01J1/50 ,  H01J3/025

Abstract: In accordance with one specific embodiment of the present invention, the closed drift hollow cathode comprises an axisymmetric discharge region into which an ionizable gas is introduced, an annular electron emitting cathode insert disposed laterally about that discharge region, a surrounding enclosure, an aperture in that enclosure disposed near the axis of symmetry and at one end of that region, and a magnetic field within that region which is both axisymmetric and generally disposed transverse to a path from the cathode insert to the aperture. An electrical discharge is established between the cathode insert and the enclosure. The electrons emitted from the cathode insert drift in closed paths around the axis, collide with molecules of ionizable gas, and sustain the discharge plasma by generating additional electron-ion pairs. Ions from the plasma bombard the cathode insert, thereby maintaining an emissive temperature. Electrons from the plasma diffuse to and escape through the aperture to provide the electron emission. The closed drift nature of the discharge circumferentially distributes the heating of the cathode insert and the utilization of the electron emitting capabilities thereof. The discharge current controls the maximum value of the electron emission.

Abstract translation: 根据本发明的一个具体实施例，封闭漂移中空阴极包括一个轴向对称放电区域，可引入可电离气体的环境中的电子发射阴极插入件，围绕该放电区域横向放置的环形电子发射阴极插件，周围的外壳， 外壳设置在该对称轴线附近并且位于该区域的一端，以及该区域内的磁场，其两个轴对称且横向于从阴极插件到孔的通道设置。 在阴极插入件和外壳之间建立放电。 从阴极插件发射的电子在围绕轴线的闭合路径中漂移，与可电离气体的分子碰撞，并通过产生另外的电子 - 离子对来维持放电等离子体。 来自等离子体的离子轰击阴极插入物，从而保持发射温度。 来自等离子体的电子通过孔扩散到并逸出以提供电子发射。 放电的闭合漂移特性周向地分布阴极插件的加热和其电子发射能力的利用。 放电电流控制电子发射的最大值。

公开(公告)号：US06297583B1

公开(公告)日：2001-10-02

申请号：US09168476

申请日：1998-10-08

Applicant: Robert L. Kohne ,  Jack D. Bodem, Jr.

Inventor： Robert L. Kohne ,  Jack D. Bodem, Jr.

IPC: H01J150

CPC classification number: H01J65/048 ,  H01J5/02 ,  H01J61/04 ,  H01J61/56

Abstract: An inductively driven gas discharge lamp assembly (40) includes an electrodeless lamp (42), an inductive drive coil (44) disposed about the lamp, and a shield (10) disposed over an end portion (50) of the lamp. The shield (10) has a number of turns (12) of electrically conductive material, such as wire, with each of the turns being disposed generally coaxially about the central, longitudinal axis (20) of the drive coil (44). The turns (12) together form a continuous spiral helix and are shorted together via a number of electrical conductors (14) that are angularly disposed about the axis (20). These electrical conductors (14) extend generally perpendicularly to the turns (12) and are connected to the ground node (26) of a d.c. to a.c. inverter circuit 46 that is used to drive coil 44. This arrangement provides good r.f. electric field and magnetic field shielding and permits the use of relatively few turns (12) at a relatively large spacing of the turns so as to minimize the interference of the shield (10) on the amount of light emitted from the lamp (42). Also disclosed is another embodiment (30) in which the turns (32) each comprise a single loop rather than a continuous spiral helix.

Abstract translation: 电感驱动气体放电灯组件（40）包括无电极灯（42），围绕灯设置的感应驱动线圈（44）和设置在灯的端部（50）上的屏蔽件（10）。 屏蔽（10）具有多个导线材料（例如导线）的匝数（12），其中每个匝大致同轴地围绕驱动线圈（44）的中心纵向轴线（20）设置。 匝（12）一起形成连续的螺旋螺旋，并通过围绕轴线（20）成角度设置的多个电导体（14）短路在一起。 这些电导体（14）大致垂直于匝（12）延伸并且连接到直流的接地节点（26）。 到a.c. 用于驱动线圈44的逆变器电路46.这种布置提供了良好的r.f. 电场和磁场屏蔽，并且允许在匝数相对较大的间隔处使用相对较少的匝（12），以便最小化屏蔽（10）对从灯（42）发射的光的量的干扰。 还公开了另一个实施例（30），其中匝（32）各自包括单个环而不是连续的螺旋螺旋。