公开(公告)号：US07989776B2

公开(公告)日：2011-08-02

申请号：US12096579

申请日：2005-12-06

申请人： Heiko Müller ,  Harald Rose

发明人： Heiko Müller ,  Harald Rose

IPC分类号： H01J1/50

CPC分类号： H01J37/153 ,  H01J37/26 ,  H01J2237/1534

摘要： A corrective for eliminating the third-order aperture aberration and the first-order, first-degree axial chromatic aberration includes two correction pieces, which are arranged one behind the other in the direction of the optical axis, in which each correction piece has a plurality of quadrupole fields (QP) and at least one octupole field (OP.) Each correction piece is constructed such that it is symmetrical with respect to its central plane (S, S′) with each correction piece having an uneven number of at least five quadrupole fields (QP) and at least one octupole field (OP). Each correction piece is further constructed so that it is symmetrical with respect to its central plane. The central quadrupole field is arranged so that it is centered with respect to the central plane of the correction piece and is electromagnetic. The quadrupole fields of the two correction pieces are antisymmetrical and a transfer lens system is arranged such that it is symmetrical with respect to the central plane of the corrective between the correction pieces. The transfer lens system has two round lenses and the setting of the transfer lens system takes place so that the two round lenses image the central plane of the two correction pieces anamorphically onto one another, in which the enlargement in one main section is the reciprocal of the enlargement in the other main section and with an octupole field superimposed on the central quadrupole field.

摘要翻译： 用于消除三次孔径像差和一级一级轴向色差的校正方法包括两个校正片，其在光轴方向上一个接一个布置，其中每个校正片具有多个 四极场（QP）和至少一个八极场（OP）。每个校正片被构造成使得它相对于其中心平面（S，S'）是对称的，每个校正片具有不均匀数量的至少五个 四极场（QP）和至少一个八极场（OP）。 每个校正件进一步构造成使得它相对于其中心平面是对称的。 中心四极场被布置为使得其相对于校正件的中心平面居中并且是电磁的。 两个校正块的四极场是反对称的，并且转印透镜系统被布置成使得其相对于校正片之间的校正的中心平面对称。 转印透镜系统具有两个圆形透镜，并且传送透镜系统的设置发生，使得两个圆形透镜彼此变形地将两个校正片的中心平面成像，其中一个主要部分的放大是 另一个主要部分的放大和一个叠加在中心四极场上的八极场。

公开(公告)号：US07807965B2

公开(公告)日：2010-10-05

申请号：US12230632

申请日：2008-09-03

申请人： Joachim Zach ,  Harald Rose

发明人： Joachim Zach ,  Harald Rose

IPC分类号： H01J37/153 ,  H01J37/26 ,  G21K1/08

CPC分类号： H01J37/153 ,  H01J37/26 ,  H01J2237/1534

摘要： A corrector (1) for the axial and off-axial beam path of a particle-optical system, comprises a first (10) and a second (20) correction piece, which are disposed one behind the other in the beam path (2) on an optical axis (3). Each correction piece (10, 20) comprises four successive multipole elements (11, 12, 13, 14; 24, 23, 22, 21) disposed symmetrically with respect to a center plane (5) and with the following fields: wherein the first (11; 24) and the fourth (14; 21) multipole elements of the multipole elements (11, 12, 13, 14; 24, 23, 22, 21) are used to generate quadrupole fields (11′, 14′; 24′, 21′) and the second (12; 23) and third (13; 22) are used to generate octupole fields (12′″, 13′″; 23′″,22′″) and quadrupole fields (12′, 13′; 23′,22′), wherein the latter are superposed magnetic (12′, 13′; 23′, 22′) and electric fields (12″, 13″; 23″, 22″), wherein the quadrupole fields (11′, 12′, 13′, 14′; 24′, 23′, 22′, 21′) of all four multipole elements (11, 12, 13, 14; 24, 23, 22,21) are rotated from one to the next through 90°. An astigmatism of third order is corrected by a central multipole element disposed in the center plane and generating an octupole field.

摘要翻译： 一种用于粒子光学系统的轴向和非轴向光束路径的校正器（1）包括在光束路径（2）中一个在另一个之后设置的第一（10）和第二（20）校正片， 在光轴（3）上。 每个校正件（10,20）包括相对于中心平面（5）对称设置的四个连续的多极元件（11,12,13,14，24,23,22,21），并具有以下场：其中第一 （11; 24）和多极元件（11,12,13,14; 24,23,22,21）的第四（14; 21）多极元件用于产生四极场（11'，14'; 24 '，21'）和第二（12; 23）和第三（13; 22）用于产生八极场（12“，13”“23”“22”“）和四极场（12' 13'; 23'，22'），其中后者是重叠的磁（12'，13'; 23'，22'）和电场（12“，13”; 23“，22”），其中四极场 所有四个多极元件（11,12,13,14; 24,23,22,21）的所述四个多极元件（11,12,13,14; 24,23,22,21）的所述四个多极元件（11'，12'，13'，14'; 24'，23'，22'，21' 一个到下一个到90°。 通过设置在中心平面中的中心多极元件校正三阶散光并产生八极场。

公开(公告)号：US20080283749A1

公开(公告)日：2008-11-20

申请号：US12096579

申请日：2005-12-06

申请人： Heiko Muller ,  Harald Rose

发明人： Heiko Muller ,  Harald Rose

IPC分类号： G01N23/00 ,  G02B9/00

CPC分类号： H01J37/153 ,  H01J37/26 ,  H01J2237/1534

摘要： A corrective for eliminating the third-order aperture aberration and the first-order, first-degree axial chromatic aberration includes two correction pieces, which are arranged one behind the other in the direction of the optical axis, in which each correction piece has a plurality of quadrupole fields (QP) and at least one octupole field (OP.) Each correction piece is constructed such that it is symmetrical with respect to its central plane (S, S′) with each correction piece having an uneven number of at least five quadrupole fields (QP) and at least one octupole field (OP). Each correction piece is further constructed so that it is symmetrical with respect to its central plane. The central quadrupole field is arranged so that it is centered with respect to the central plane of the correction piece and is electromagnetic. The quadrupole fields of the two correction pieces are antisymmetrical and a transfer lens system is arranged such that it is symmetrical with respect to the central plane of the corrective between the correction pieces. The transfer lens system has two round lenses and the setting of the transfer lens system takes place so that the two round lenses image the central plane of the two correction pieces anamorphically onto one another, in which the enlargement in one main section is the reciprocal of the enlargement in the other main section and with an octupole field superimposed on the central quadrupole field.

摘要翻译： 用于消除三次孔径像差和一级一级轴向色差的校正方法包括两个校正片，其在光轴方向上一个接一个布置，其中每个校正片具有多个 四极场（QP）和至少一个八极场（OP）。每个校正片被构造成使得它相对于其中心平面（S，S'）是对称的，每个校正片具有不均匀数量的至少五个 四极场（QP）和至少一个八极场（OP）。 每个校正件进一步构造成使得它相对于其中心平面是对称的。 中心四极场被布置为使得其相对于校正件的中心平面居中并且是电磁的。 两个校正块的四极场是反对称的，并且转印透镜系统被布置成使得其相对于校正片之间的校正的中心平面对称。 转印透镜系统具有两个圆形透镜，并且传送透镜系统的设置发生，使得两个圆形透镜彼此变形地将两个校正片的中心平面成像，其中一个主要部分的放大是 另一个主要部分的放大和一个叠加在中心四极场上的八极场。

公开(公告)号：US06784437B2

公开(公告)日：2004-08-31

申请号：US10309262

申请日：2002-12-04

申请人： Harald Rose

发明人： Harald Rose

IPC分类号： H01J3714

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/153 ,  H01J37/3174 ,  H01J2237/1534 ,  H01J2237/3175 ,  H01J2237/31754

摘要： The invention is directed to a corrector for correcting energy-dependent first-order aberrations of the first degree as well as third-order spherical aberrations of electron-optical lens systems. The corrector includes at least one quadropole septuplet (S1) having seven quadrupoles (Q1 to Q7). The quadrupoles are mounted symmetrically to a center plane (ZS) so as to permit excitation along a linear axis. The corrector furthermore includes at least five octopoles (O1 to O7) which can be excited within the quadrupole septuplet. In an advantageous embodiment, two quadrupole septuplets are mounted in series one behind the other. The quadrupole fields of the two quadrupole septuplets are excited antisymmetrically to a center plane lying between the two quadrupole septuplets. With such a system, all geometric third-order aberrations and additional energy-dependent first-order aberrations of the third degree and geometric fifth-order aberrations of a lens system can be corrected in addition to the axial and off-axial first-order chromatic aberrations of the first degree.

摘要翻译： 本发明涉及用于校正电子 - 光学透镜系统的第一度以及三阶球面像差的能量相关一阶像差的校正器。 校正器包括至少一个具有七个四极管（Q1至Q7）的四极簧片（S1）。 四极杆对称地安装在中心平面（ZS）上，以便沿线性轴线激发。 校正器还包括至少五个八极管（O1至O7），其可以在四极六通孔内被激发。 在一个有利的实施例中，两个四极簧片串联地一个接一个地安装。 两个四极七分体的四极场与位于两个四极六分体之间的中心平面反对称地被激发。 利用这样的系统，除了轴向和轴向外的一阶色度之外，可以校正透镜系统的第三度和第五级像差的所有几何三阶像差和附加的依赖于能量的一阶像差 第一度的畸变。

公开(公告)号：US06774372B1

公开(公告)日：2004-08-10

申请号：US10018904

申请日：2002-01-15

申请人： Harald Rose ,  Peter Schmid ,  Roland Janzen

发明人： Harald Rose ,  Peter Schmid ,  Roland Janzen

IPC分类号： H01J3726

CPC分类号： B82Y10/00 ,  B82Y40/00 ,  H01J37/3007 ,  H01J37/3174

摘要： An electron-optical lens arrangement with an axis that can be substantially displaced, and useful for electron lithography, includes a cylinder lens and a quadrupole field. The plane of symmetry of the quadrupole field extends in the mid-plane of the gap pertaining to the cylinder lens. The focussing level of the quadrupole is oriented in the direction of the gap. The amount of the focussing refractive power belonging to the cylinder lens is twice as high as the amount of the quadrupole. A deflection system for the charged particles is connected upstream in the level of the gap pertaining to the cylinder lens and several electrodes or pole shoes, which generate a quadrupole field are provided in the direction of the gap pertaining to the cylinder lens. The electrodes or pole shoes can be individually and, preferably, successively excited and the quadrupole field can be displaced according to the deflection of the particle beam, so that the particle beam impinges upon the area of the quadrupole field. A holding device is provided for an object, such as a wafer, and is arranged vertically in relation to the optical axis and can be displaced in relation to the direction of the gap pertaining to the cylinder lens.

摘要翻译： 可以基本上位移并且可用于电子光刻的电子 - 光学透镜装置包括柱面透镜和四极场。 四极场的对称平面在与柱面透镜相关的间隙的中间平面内延伸。 四极杆的聚焦位置取向于间隙的方向。 属于圆柱透镜的聚焦屈光力的量是四极的量的两倍。 带电粒子的偏转系统在与气缸透镜相关的间隙的水平面上游连接，并且产生四极场的几个电极或极靴在与气缸透镜相关的间隙的方向上设置。 电极或极靴可以单独地，优选地被连续地激发，并且四极场可以根据粒子束的偏转而移位，使得粒子束撞击四极场的区域。 为诸如晶片的物体提供保持装置，并且相对于光轴垂直地布置，并且可以相对于与柱面透镜相关的间隙的方向移位。

公开(公告)号：US4714833A

公开(公告)日：1987-12-22

申请号：US895310

申请日：1986-08-11

申请人： Harald Rose ,  Joachim Zach ,  Burkhard Lischke

发明人： Harald Rose ,  Joachim Zach ,  Burkhard Lischke

IPC分类号： G01N23/203 ,  G01T1/28 ,  H01J37/153 ,  H01J37/244

CPC分类号： H01J37/153 ,  H01J37/244 ,  H01J2237/2443 ,  H01J2237/2445 ,  H01J2237/2448 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/24507 ,  H01J2237/24585

摘要： An electron beam apparatus has a primary beam directed onto a point of a specimen to generate emerging secondary electrons that proceed to a detector after traversing an electrical extraction field. The extraction field is provided between electrodes arranged in a plane perpendicular to the optical axis of the electron beam device and a magnetic field is provided perpendicular to the electrical extraction field to compensate for the forces of the extraction field exerted on the primary beam yet to promote extraction of the secondary electrons.

摘要翻译： 电子束装置具有指向样本点的主光束，以产生在穿过电提取场后进入检测器的新出现的二次电子。 提取场被设置在垂直于电子束装置的光轴的平面中布置的电极之间，并且垂直于电提取场设置磁场以补偿施加在主光束上的提取场的力，以促进 提取二次电子。

公开(公告)号：US08173963B2

公开(公告)日：2012-05-08

申请号：US12931046

申请日：2011-01-20

申请人： Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

发明人： Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

IPC分类号： G01N23/00

CPC分类号： H01J37/26 ,  H01J37/295 ,  H01J2237/041 ,  H01J2237/0453 ,  H01J2237/1534 ,  H01J2237/2455 ,  H01J2237/2614 ,  H01J2237/2802 ,  H01J2237/2809

摘要： A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.

摘要翻译： 描述了用于移动粒子束的至少一部分的相位的相移元件，以及具有这种类型的相移元件的粒子束装置。 在具有相移元件的相移元件和粒子束装置中，避免了影响粒子束的分量，使得实现适当的信息内容，并且相位对比度基本上与空间频率无关。 相移元件可以具有至少一个用于产生非均匀或各向异性电位的装置。 根据本文所述的系统的粒子束装置可以设置有相移元件。

公开(公告)号：US20110233402A1

公开(公告)日：2011-09-29

申请号：US12931046

申请日：2011-01-20

申请人： Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

发明人： Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

IPC分类号： H01J37/26

CPC分类号： H01J37/26 ,  H01J37/295 ,  H01J2237/041 ,  H01J2237/0453 ,  H01J2237/1534 ,  H01J2237/2455 ,  H01J2237/2614 ,  H01J2237/2802 ,  H01J2237/2809

摘要： A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.

摘要翻译： 描述了用于移动粒子束的至少一部分的相位的相移元件，以及具有这种类型的相移元件的粒子束装置。 在具有相移元件的相移元件和粒子束装置中，避免了影响粒子束的分量，使得实现适当的信息内容，并且相位对比度基本上与空间频率无关。 相移元件可以具有至少一个用于产生非均匀或各向异性电位的装置。 根据本文所述的系统的粒子束装置可以设置有相移元件。

公开(公告)号：US20100213369A1

公开(公告)日：2010-08-26

申请号：US12405279

申请日：2009-03-17

申请人： Joachim Zach ,  Harald Rose

发明人： Joachim Zach ,  Harald Rose

IPC分类号： G01N23/00 ,  G21K7/00

CPC分类号： H01J37/263 ,  H01J2237/2614

摘要： The invention relates to a method for producing image contrast by phase shifting in the electron optics, wherein, from an intermediate image (5), an anamorphic image (6, 6′) of the axial rays (xα, yβ) is produced by quadrupole fields (Q1′, Q2′, Q3′; Q11′, Q12′, Q13′) with simultaneous passage through zero of the field rays (xγ, yδ) in at least one diffraction intermediate image plane (8, 8′), where a relative phase shift between a region (14) around the electron beam of zeroth order of diffraction (13) and the electron beams of higher orders of diffraction (15) is caused by a magnetic or electric field (9, 9′), and thereafter the at least one anamorphosis of the beam path produced is corrected again by further quadrupole fields (Q4′, Q5′; Q13′, Q14′, Q15′). According to the invention, the image contrast can be further improved without causing aberrations that are no longer tolerable by using, for production and correction of the at least one anamorphic image (6, 6′), quadrupole fields (Q2′, Q4′; Q12′, Q14′) before and after this image (6, 6′) whose extent in the direction of the optical axis (10) is equal to at least twice their focal length, and wherein at least one of the axial rays (xα, yβ), by an appropriate choice of the magnification M of the intermediate image (5), enters the quadrupole field (Q2′, Q12′) before the at least one anamorphic image (6, 6′) at a slope 1/M such that a length (7) of the anamorphic image (6, 6′) is achieved at which any aberrations caused are still within a tolerable range. The invention also relates to devices for implementing this method.

摘要翻译： 本发明涉及通过电子光学器件中的相移产生图像对比度的方法，其中，从中间图像（5），通过以下方式产生轴向射线（xα，y＆bgr）的变形图像（6,6'）， 在至少一个衍射中间像平面（8,8'）中同时穿过场射线（xγ，yδ）的零点的四极场（Q1'，Q2'，Q3'; Q11'，Q12'，Q13' 其中绕着衍射（13）的电子束周围的区域（14）和较高衍射级（15）的电子束之间的相对相移由磁场或电场（9,9'）引起， 此后，通过另外的四极场（Q4'，Q5'; Q13'，Q14'，Q15'再次校正产生的光束路径的至少一个变形。 根据本发明，可以进一步改善图像对比度，而不会导致用于生成和校正至少一个变形图像（6,6'），四极场（Q2'，Q4'; ...）的不再容忍的像差。 Q12'，Q14'）在其在光轴（10）的方向上的程度等于它们的焦距的至少两倍的该图像（6,6'）之前和之后，并且其中至少一个轴向射线 通过适当选择中间图像（5）的放大倍率M，在斜率1/2的至少一个变形图像（6,6'）之前进入四极场（Q2'，Q12'）， 使得实现变形图像（6,6'）的长度（7），其中所引起的任何像差仍然在可容许的范围内。 本发明还涉及用于实现该方法的装置。

公开(公告)号：US20090146056A1

公开(公告)日：2009-06-11

申请号：US12230632

申请日：2008-09-03

申请人： Joachim Zach ,  Harald Rose

发明人： Joachim Zach ,  Harald Rose

IPC分类号： G01N23/00

CPC分类号： H01J37/153 ,  H01J37/26 ,  H01J2237/1534

摘要： A corrector (1) for the axial and off-axial beam path of a particle-optical system, comprises a first (10) and a second (20) correction piece, which are disposed one behind the other in the beam path (2) on an optical axis (3). Each correction piece (10, 20) comprises four successive multipole elements (11, 12, 13, 14; 24, 23, 22, 21) disposed symmetrically with respect to a center plane (5) and with the following fields: wherein the first (11; 24) and the fourth (14; 21) multipole elements of the multipole elements (11, 12, 13, 14; 24, 23, 22, 21) are used to generate quadrupole fields (11′, 14′; 24′, 21′) and the second (12; 23) and third (13; 22) are used to generate octupole fields (12′″, 13′″;23′″,22′″) and quadrupole fields (12′, 13′; 23′,22′), wherein the latter are superposed magnetic (12′, 13′; 23′, 22′) and electric fields (12″, 13″; 23″, 22″), wherein the quadrupole fields (11′, 12′, 13′, 14′; 24′, 23′, 22′, 21′) of all four multipole elements (11, 12, 13, 14; 24, 23, 22,21) are rotated from one to the next through 90°. An astigmatism of third order is corrected by a central multipole element disposed in the center plane and generating an octupole field.

摘要翻译： 一种用于粒子光学系统的轴向和非轴向光束路径的校正器（1）包括在光束路径（2）中一个在另一个之后设置的第一（10）和第二（20）校正片， 在光轴（3）上。 每个校正件（10,20）包括相对于中心平面（5）对称设置的四个连续的多极元件（11,12,13,14，24,23,22,21），并具有以下场：其中第一 （11; 24）和多极元件（11,12,13,14; 24,23,22,21）的第四（14; 21）多极元件用于产生四极场（11'，14'; 24 '，21'）和第二（12; 23）和第三（13; 22）用于产生八极场（12“'，13”'，23“'，22”'）和四极场 （12'，13'; 23'，22'），其中后者是重叠的磁体（12'，13'; 23'，22'）和电场（12“，13”; 23“，22' “），其中所有四个多极元件（11,12,13,14; 24,23）的四极场（11'，12'，13'，14'; 24'，23'，22'，21' ，22,21）从一个向下旋转90°。 通过设置在中心平面中的中心多极元件校正三阶散光并产生八极场。