公开(公告)号：US06184523B2

公开(公告)日：2001-02-06

申请号：US09114999

申请日：1998-07-14

Applicant: Peter A. Dowben ,  Carlo Waldfried ,  Tara J. McAvoy ,  David N. McIlroy

Inventor： Peter A. Dowben ,  Carlo Waldfried ,  Tara J. McAvoy ,  David N. McIlroy

IPC: H01J4948

CPC classification number: H01J49/482

Abstract: Disclosed is a compact, small diameter, high resolution charged particle-energy detecting, retractable cylindrical mirror analyzer system. Multiple sequential stages enable charged particle-energy detection with an improved resolution as compared to that possible where only a single stage is utilized. The relatively small size allows for positioning, via a manipulator of the cylindrical mirror analyzer system, which is attached to a linear motion feedthrough mounted on a conflat flange of a vacuum system.

Abstract translation: 公开了一种紧凑，小直径，高分辨率带电粒子能量检测，可伸缩圆柱镜分析仪系统。 与仅使用单个级的可能性相比，多个顺序阶段使得带电粒子能量检测具有改进的分辨率。 相对小的尺寸允许通过柱面镜分析仪系统的操纵器来定位，其连接到安装在真空系统的混合法兰上的直线运动馈通。

公开(公告)号：US06495826B2

公开(公告)日：2002-12-17

申请号：US09832298

申请日：2001-04-10

Applicant: Katsushige Tsuno

Inventor： Katsushige Tsuno

IPC: H01J4948

CPC classification number: H01J37/05

Abstract: A monochrometer mounted with the electron gun of an electron microscope or the like. This monochrometer does not need movement of a slit. An electron source consisting of any one of a thermal emission-type electron source (such as an LaB6 electron source or a tungsten hairpin), a Schottky emission-type electron source, and a tunneling field emission-type electron source is used. The slit is made of a single metal plate and mounted in position fixedly. Electrons are emitted from the electron source and dispersed within a plane including the slit according to energies. The slit is so positioned that it passes only those of the dispersed electrons which have energies close to the peak energy and blocks electrons having energies higher or lower than the peak energy.

Abstract translation: 安装有电子显微镜等的电子枪的单色仪。 这种单色仪不需要狭缝的移动。 使用由热发射型电子源（例如LaB 6电子源或钨发夹）中的任一种，肖特基型发射型电子源和隧道场致发射型电子源构成的电子源。 狭缝由单个金属板制成并固定在一起。 电子从电子源发射并分散在根据能量的包括狭缝的平面内。 狭缝的定位使得其仅通过具有接近峰值能量的能量的分散电子的那些，并且阻挡具有高于或低于峰值能量的能量的电子。

公开(公告)号：US06410924B1

公开(公告)日：2002-06-25

申请号：US09440985

申请日：1999-11-16

Applicant: Li Wang

Inventor： Li Wang

IPC: H01J4948

CPC classification number: H01J49/466 ,  H01J37/05 ,  H01J37/153 ,  H01J2237/303

Abstract: The resolution of a charged particle beam, such as a focused ion beam (FIB), is optimized by providing an energy filter in the ion beam stream. The energy filter permits ions having a desired energy range to pass while dispersing and filtering out any ions outside the desired energy range. By reducing the energy spread of the ion beam, the chromatic aberration of the ion beam is reduced. Consequently, the current density of the ion beam is increased. The energy filter may be, e.g., a Wien type filter that is optimized as an energy filter as opposed to a mass filter. For example, to achieve useful dispersion the energy filter may use a quadrupole structure between two magnetic pole pieces thereby producing a combined quadrupole electric field and dipole electric field within a magnetic field.

Abstract translation: 通过在离子束流中提供能量过滤器来优化带电粒子束（例如聚焦离子束（FIB））的分辨率。 能量过滤器允许具有期望能量范围的离子通过，同时分散和滤出任何离开所需能量范围之外的离子。 通过减小离子束的能量扩散，离子束的色差减小。 因此，离子束的电流密度增加。 能量过滤器可以是例如与质量过滤器相反优化为能量过滤器的维恩型过滤器。 例如，为了实现有用的分散，能量过滤器可以在两个磁极片之间使用四极结构，从而在磁场内产生组合的四极电场和偶极电场。