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公开(公告)号：US07105988B2
公开(公告)日：2006-09-12
申请号：US10834683
申请日：2004-04-28
申请人： Emanuele Bianchini
发明人： Emanuele Bianchini
CPC分类号： H01L41/0926 , H01L41/0533
摘要： A piezoelectric device is formed of a supporting substrate with first and second conductive traces on a first surface. A piezoelectric material layer is laminated to the supporting substrate with a first surface of the piezoelectric material layer electrically connected to the second conductive trace and a second surface of the piezoelectric material layer electrically conducted to the first conductive trace. A protective coating is applied over the piezoelectric material layer so that at least a portion of the first and second conductive traces are exposed.
摘要翻译： 压电装置由在第一表面上具有第一和第二导电迹线的支撑基底形成。 将压电材料层层压到支撑基板上，其中压电材料层的第一表面与第二导电迹线电连接，并且压电材料层的第二表面电导向第一导电迹线。 在压电材料层上施加保护涂层，使得第一和第二导电迹线的至少一部分被暴露。
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公开(公告)号：US07482730B2
公开(公告)日：2009-01-27
申请号：US10986640
申请日：2004-11-12
CPC分类号： G02B26/0858 , G02B26/0833 , G02B26/0841 , G02B26/0866 , G02B26/105
摘要： A high performance MEMS scanner is disclosed. In some embodiments, scanner mirror has a wide and short aspect ratio that is similar to rotating polygon facets. Long torsion arms allow large rotation angles including 20° zero-to-peak mechanical and greater. Suspensions couple the scan mirror to torsion arms, reducing dynamic mirror deformation by spreading the torque load. “leverage members” at the distal ends of the torsion arms help reduce stress concentrations. Elimination of a mounting frame increases device yield. Heater leads allow for precise trimming of the scanner resonant frequency. A compressive mount holds mounting pads against mounting structures.
摘要翻译： 公开了一种高性能MEMS扫描仪。 在一些实施例中，扫描仪反射镜具有类似于旋转多边形面的宽而短的纵横比。 长扭力臂允许大的旋转角度，包括20°零到机械和更大的角度。 悬架将扫描镜耦合到扭转臂，通过扩展转矩负载来减少动态镜面变形。 扭力臂末端的“杠杆部件”有助于减轻应力集中。 消除安装框架会增加设备的产量。 加热器引线允许精确调整扫描器谐振频率。 压缩安装座将安装垫保持在安装结构上。
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公开(公告)号：US08261418B2
公开(公告)日：2012-09-11
申请号：US12607246
申请日：2009-10-28
申请人： Michio Kadota , Tetsuya Kimura
发明人： Michio Kadota , Tetsuya Kimura
CPC分类号： H03H3/08 , H03H3/10 , H03H9/02818 , H03H9/1092 , Y10T29/42 , Y10T29/49156 , Y10T29/49165
摘要： A method for manufacturing a surface acoustic wave filter device includes a step of forming grooves in one principal surface of a piezoelectric substrate, a step of embedding a metallic film in the grooves to form IDT electrodes, a step of performing a process of removing a portion of the piezoelectric substrate from the one principal surface of the piezoelectric substrate, thereby forming a recessed portion including the bottom surface in which the IDT electrodes are embedded, and a step of bonding a cover member to the piezoelectric substrate.
摘要翻译： 一种声表面波滤波器装置的制造方法，其特征在于，在压电基板的一个主面上形成槽的工序，在所述槽内嵌入金属膜，形成IDT电极的工序， 的压电基板的一个主表面，从而形成包括嵌入有IDT电极的底面的凹部，以及将盖部件接合到压电基板的工序。
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