公开(公告)号：WO0129902A3

公开(公告)日：2002-11-07

申请号：PCT/DE0003720

申请日：2000-10-20

Applicant: SIEMENS AG ,  PROBST VOLKER

Inventor： PROBST VOLKER

IPC: F27B5/04 ,  C21D1/34 ,  C21D1/74 ,  C21D9/00 ,  F27B5/14 ,  F27B5/16 ,  H01L21/324 ,  H01L31/18 ,  H01L21/477

CPC classification number: H01L21/324 ,  C21D1/34 ,  C21D1/74 ,  C21D9/00 ,  H01L31/1864 ,  Y02E10/50 ,  Y02P70/521

Abstract: The invention relates to a device for simultaneously tempering and processing several process goods by means of electromagnetic radiation. The device is a batch-type furnace. The process goods and the energy sources are arranged adjacent to each other in such a way that a process good is situated between two energy sources and an energy source is situated between two process goods. The device is especially useful for tempering the process goods in the presence of a process gas. A variable heating and cooling profile having variable processing parameters (e.g. gas pressure, heating rate, cooling rate) can be obtained using the inventive device. It is especially possible to securely temper a process good in the form of a large-surface multilayer body comprising layers of different physical characteristics (thermal conductivity coefficient, temperature expansion coefficient, absorption and emission capacity, etc.). According to the inventive method and device, a toxic and/or corrosive process gas can be used for processing the process good. The device and the method are useful for producing thin film solar modules for instance.

Abstract translation: 本发明涉及一种用于同时回火和处理多个Prozessiergüter用电磁辐射的帮助的装置。 该装置是一个间歇式炉中，Prozessiergüter和功率源被布置成彼此成使得提供两个功率源和两个Prozessiergütern一个电源之间的Prozessiergut之间。 该装置特别适合于在处理气体的存在下回火Prozessiergüter。 与该装置的可变的加热和冷却曲线与可变Prozessierparametern（例如，气体压力，加热速度，冷却速度）是可能的。 特别地，在安全的大面积的多层体的形式回火Prozessierguts可以具有不同的物理性质（热传导系数，热膨胀系数，吸收和发射率等）的层。 随着设备和方法，它能够采用毒性和/或腐蚀性处理气体用于处理Prozessierguts。 合适的是该装置或方法，例如，用于生产薄膜太阳能电池组件。

公开(公告)号：WO0129901A3

公开(公告)日：2002-11-07

申请号：PCT/DE0003719

申请日：2000-10-20

Applicant: SIEMENS AG ,  PROBST VOLKER

Inventor： PROBST VOLKER

IPC: F27B17/00 ,  F27D7/06 ,  H01L21/00 ,  H01L31/04 ,  H01L31/18 ,  C21D9/00 ,  H01L21/324 ,  H01L21/477

CPC classification number: H01L21/67115

Abstract: The invention relates to a device and a method for tempering at least one process good (3) under a certain process gas atmosphere (111) of at least one process gas (4) by means of a tempering unit (6) which is provided with at least one energy source (5) for receiving an amount of energy by means of the process good (3), a tempering container (11) comprising a tempering room (16) for storing the process good (3) under the process gas atmosphere (111) during tempering and a tempering chamber (13). The tempering container (11) is arranged at a distance (18) to the tempering chamber (13) and in the tempering chamber (13) in such a way that there is a gap (14) between the tempering container (11) and the tempering chamber (13). The tempering unit is also provided with a means (19) for producing an additional gas atmosphere (141) of an additional gas in the gap (14), whereby said additional gas atmosphere is different from the process gas atmosphere (111). The additional gas atmosphere is provided with a pressure gradient (2). According to the inventive device and method, a toxic and/or corrosive process gas can be used for processing the process good. It is especially possible to produce a photovoltaic thin-film chalcopyrite absorber of a solar cell and/or of a solar module using the inventive device and method.

Abstract translation: 本发明涉及的装置和用于通过一个温度控制单元（6）的装置中的至少一种工艺气体（4）的具体处理气体气氛（111）根据控制至少一个Prozessierguts（3）的温度的方法。 所述温度控制单元包括˚F至少一个能量源（5），用于由所述Prozessiergut（3），回火箱（11）具有用于存储（3）的处理气体气氛（111）的过程中Prozessiergutes回火，回火空间（16）接收的能量的量AU 在其中在用于回火箱的温度控制腔室（13）的距离（18）（11）被布置成使得回火箱（11）和温度控制腔室（13）之间的中间空间（14）是当前温度室（13），以及装置（ 19），用于在所述中间空间（14）产生不同的（从一个进一步的气体的处理气体气氛111）还气气氛中（141）。 进一步气体气氛具有压力梯度（2）。 与该装置的帮助下，并且该方法也可以采用这样的毒性和/或腐蚀性处理气体用于处理Prozessierguts。 特别是，由此光伏薄膜Chalkopyritabsorber的太阳能电池和/或太阳能模块可被制造。

公开(公告)号：WO0109961A3

公开(公告)日：2002-09-19

申请号：PCT/DE0002523

申请日：2000-07-31

Applicant: SIEMENS AG ,  PROBST VOLKER

Inventor： PROBST VOLKER

IPC: H01L31/04 ,  H01L31/032 ,  H01L31/0336 ,  H01L31/18

CPC classification number: H01L31/032 ,  B32B38/0036 ,  B32B2310/0806 ,  H01L31/0749 ,  H01L31/18 ,  Y02E10/541

Abstract: The invention relates to a method of annealing a large-surface multi-layer body by adding an energy amount with an annealing rate of at least 1 DEG C/s. The aim of the invention is to prevent inhomogeneous temperatures from occurring during the annealing process. To this end, different partial amounts of the energy amount are supplied to the layers of the multi-layer body at different sites and times. The multi-layer body is annealed in a container that has a glass ceramics bottom and lid. The inventive method is used to produce thin-film solar modules.

Abstract translation: 公开了一种用于通过与至少1℃/ s的Temperierrate供给的能量的量回火大面积的多层体的方法。 用于回火的层叠体的层中的不均匀性的温度的抑制与能量的量的局部和时间分辨率不同的子集提供。 的多层体在具有底部和由玻璃陶瓷制成的盖的容器进行加热。 该方法应用于用于制造薄膜太阳能电池模块。

公开(公告)号：WO2007122203A3

公开(公告)日：2008-04-03

申请号：PCT/EP2007053912

申请日：2007-04-20

Applicant: SHELL ERNEUERBARE EN GMBH ,  PROBST VOLKER ,  STETTER WALTER

Inventor： PROBST VOLKER ,  STETTER WALTER

IPC: C23C14/24

CPC classification number: C23C14/243 ,  C23C14/26 ,  C23C14/28

Abstract: Thermal evaporation apparatus for depositing of a material on a substrate, comprising material storage means; heating means to generate a vapour of the material in the material storage means; vapour outlet means comprising a vapour receiving pipe having vapour outlet passages, and emission reducing means arranged such that an external surface of the vapour outlet means directed to said substrate exhibits low emission, and wherein the apparatus further comprises pipe heating means in the interior of said vapour outlet means, wherein at least the surfaces of the material storage means, heating means, and emission reducing means and pipe heating means arranged to come into contact with the material vapour are of a corrosion-resistant material. Further a thermal evaporation apparatus for depositing a material on a substrate comprising a vapour outlet means arranged to receive in its interior the vapour of the material heated in a material storage means and having vapour outlet passages, wherein said vapour outlet means basically consist of a corrosion-resistant material and are gastight to such an extent that sufficient dynamic pressure of said material vapour is achievable for homogenous deposition of said material on said substrate. Also the use of the apparatus, and a method of depositing a material onto a substrate by thermal evaporation.

Abstract translation: 用于在基板上沉积材料的热蒸发装置，包括材料储存装置; 在所述材料存储装置中产生所述材料的蒸气的加热装置; 蒸气出口装置包括具有蒸汽出口通道的蒸气接收管，以及排放减少装置，其布置成使得引导到所述基板的蒸气出口装置的外表面表现出低排放，并且其中该装置还包括在所述内部的管加热装置 蒸气出口装置，其中至少材料储存装置，加热装置和排放减少装置的表面和布置成与材料蒸汽接触的管道加热装置是耐腐蚀材料。 另外，一种用于在基材上沉积材料的热蒸发装置，包括蒸气出口装置，其布置成在其内部容纳在材料储存装置中加热并具有蒸汽出口通道的材料的蒸汽，其中所述蒸汽出口装置基本上由腐蚀 并且气密到达可以实现所述材料蒸汽的足够动态压力以使所述材料均匀沉积在所述基底上的程度。 还可以使用该装置，以及通过热蒸发将材料沉积到衬底上的方法。

公开(公告)号：WO2009050146A3

公开(公告)日：2009-08-20

申请号：PCT/EP2008063746

申请日：2008-10-13

Applicant: AVANCIS GMBH & CO KG ,  PROBST VOLKER ,  KUSTER HANS-WERNER ,  MAURER MARC ,  CALWER HERMANN

Inventor： PROBST VOLKER ,  KUSTER HANS-WERNER ,  MAURER MARC ,  CALWER HERMANN

IPC: H01L31/048 ,  H01L31/18

CPC classification number: H01L31/048 ,  Y02E10/50

Abstract: The invention relates to a method for sealing a light-capturing element, said element comprising a first pane-type substrate (1) and a second substrate (1'), said substrates enclosing, by means of a lamination spacer (8), an active stack of layers comprising conductive layers forming electrodes, and at least one functional layer based on an absorbent material enabling an energetic conversion of the light into electrical energy, the stack being placed on at least one portion of the surface of at least one of the substrates (1, 1') in such a way as to delimit, around the periphery and following lamination, a groove (9) suitable for receiving at least one means (10, 11) for sealing the module. The invention is characterised in that the sealing means (10, 11) is deposited before the autoclave phase.

Abstract translation: 本发明涉及一种用于密封光捕获元件的方法，所述元件包括第一玻璃板式基板（1）和第二基板（1'），所述基板通过层压间隔件（8）封闭， 包括形成电极的导电层的有源堆叠层，以及至少一个基于吸收材料的功能层，使得能够将能量能量转换成电能，所述堆叠被放置在至少一个所述表面的表面的至少一个部分上 衬底（1,1'）以限定周边和后续层压的方式限定适于接收用于密封模块的至少一个装置（10,11）的凹槽（9）。 本发明的特征在于在高压釜相之前沉积密封装置（10,11）。