TRACER GAS ENDPOINT-MONITORED SINTER SYSTEMS

    公开(公告)号:WO2020139325A1

    公开(公告)日:2020-07-02

    申请号:PCT/US2018/067535

    申请日:2018-12-26

    Abstract: An example sinter system includes a sinter gas inlet at a sinter furnace for a sinter gas, a tracer gas inlet at the sinter furnace for a tracer gas different from the sinter gas, and an outlet at the sinter furnace to output the sinter gas and the tracer gas. The example sinter system further includes: a support structure to support a sample green object in the sinter furnace, an opening at the support structure connected to the tracer gas inlet, the opening to output the tracer gas into the sinter furnace, and a detector to: determine an amount of the tracer gas flowing through the outlet during a sinter process as a sample green object positioned on the support structure changes shape during the sinter process with respect to the opening and modifies a flow rate of the tracer gas to the outlet; and determine when to stop the sinter process based on a determined amount of the tracer gas.

    HIGH TEMPERATURE FURNACE
    2.
    发明申请

    公开(公告)号:WO2019096885A1

    公开(公告)日:2019-05-23

    申请号:PCT/EP2018/081329

    申请日:2018-11-15

    Applicant: SWERIM AB

    Abstract: The invention relates to a high temperature furnace (100) comprising a heating chamber (1), at least one first burner (10) for heating said heating chamber, and a condensation device (30) arranged in fluid connection with said heating chamber via an exhaust outlet (31). The at least one first burner (10) is arranged for providing a water vapor atmosphere in the heating chamber (1), and the condensation device (30) is arranged for condensing an exhaust gas generated by the at least one first burner (10), such that there is no need for a chimney and no emission of air contaminants.

    一种冷却和烧结一体的锂离子电池材料生产设备

    公开(公告)号:WO2018152808A1

    公开(公告)日:2018-08-30

    申请号:PCT/CN2017/074865

    申请日:2017-02-25

    Inventor: 王爽

    CPC classification number: F27B5/04 H01M4/04 H01M4/139

    Abstract: 本发明公开了一种冷却和烧结一体的锂离子电池材料生产设备,包括底座;所述底座的顶部设置有冷却室;所述冷却室内设置有液压伸缩装置、左侧挡料板和右侧挡料板;冷却室的底部设置有排料管;冷却室的左侧设置有出气管,右侧设置有进气装置;本发明结构简单,设计合理,使用方便;与传统的烧结相比微波的穿透深度大,温度梯度非常小,能够快速地升温和降温,从而使整个烧结过程被大幅度缩短,不存在阴影效应;冷却室的设置,能够将烧结过后的电池材料进行冷却,通过进气装置将冷却的氮气输入到冷却室对物料进行冷却处理,然后从出气管将气体排出,从而形成对流,对烧结过后的电池材料进行冷却处理。

    SINTERVORRICHTUNG
    4.
    发明申请
    SINTERVORRICHTUNG 审中-公开
    烧结设备

    公开(公告)号:WO2014169303A1

    公开(公告)日:2014-10-23

    申请号:PCT/AT2014/000040

    申请日:2014-02-28

    Inventor: REICHERT, Axel

    Abstract: Sintervorrichtung (4) zum Sintern zumindest eines, insbesondere dentalen, Werkstücks (2) mit einem Sinterhohlraum (18) zur Aufnahme des zu sinternden Werkstücks (2) während des Sintervorgangs, wobei der Sinterhohlraum (18) von einer Basisfläche (6) der Sintervorrichtung (4) begrenzt ist, auf der das Werkstück während des Sintervorgangs ablegbar ist, wobei die Sintervorrichtung (4) zumindest eine Gaszuführung (5) zur Einleitung von Schutzgas in den Sinterhohlraum (18) aufweist, wobei die Gaszuführung (5) auf der dem Sinterhohlraum (18) entgegen gesetzten Seite der Basisfläche (6) angeordnet ist und die Basisfläche (6) zur Einleitung des von der Gaszuführung (5) kommenden Schutzgases in den Sinterhohlraum (18) zumindest einen für das Schutzgas durchlässigen Durchströmbereich (14) aufweist.

    Abstract translation: 对于至少一个或牙科工件(2)与烧结腔(18)的烧结用于接收所述材料烧结装置(4)以从基面(6)的烧结装置进行烧结的工件(2)在烧结过程中,其中,(烧结腔体(18) 4)是有限的,在其上的工件可以在烧结过程中被存储,烧结装置(4)具有至少一个气体供应器(5),用于将惰性气体引入所述烧结腔体(18),其中所述气体进料(5)在烧结腔( 18)被设置在所述基部表面(6)和所述底表面(6)的相对侧,以启动(从气体供给5)来的惰性气体流入所述烧结腔体(18)具有至少一个(用于保护气体可渗透流经区域14)。

    SYSTEM AND PROCESS FOR THE PRODUCTION OF POLYCRYSTALLINE SILICON FOR PHOTOVOLTAIC USE
    5.
    发明申请
    SYSTEM AND PROCESS FOR THE PRODUCTION OF POLYCRYSTALLINE SILICON FOR PHOTOVOLTAIC USE 审中-公开
    用于光伏使用的多晶硅生产系统和工艺

    公开(公告)号:WO2009150152A2

    公开(公告)日:2009-12-17

    申请号:PCT/EP2009/057093

    申请日:2009-06-09

    CPC classification number: F27B5/02 C30B11/007 C30B28/06 C30B29/06 F27B5/04

    Abstract: The invention relates to an apparatus and process for the prodution of polycrystalline silicon for photovoltaic applications. The apparatus is characterised in that it comprises of multiple chambers, preferably three(1, 2, 3), arranged longitudinally one after the other and equipped with: gas immission and extraction means; means for guiding (7) and moving the crucible (6) containing the silicon-based material; insulation and temperature control means; heating means; air-tightness means (8) for each chamber. One of said chambers constitutes the furnace of the apparatus and comprises an area (4) in which the smelting of the material contained in the crucible (6) is carried out, said furnace being equipped with heating means and bearing a heat-stable pedestal (5), suitable for moving the crucible vertically and thus for introducing it into, or extracting it from the smelting area (4), respectively.

    Abstract translation: 本发明涉及用于生产用于光伏应用的多晶硅的装置和方法。 该装置的特征在于它包括多个腔室,优选地三个(1,2,3),纵向一个接一个地布置并配备有气体输送和提取装置; 用于引导(7)并移动含有硅基材料的坩埚(6)的装置; 绝缘和温度控制手段; 加热装置 每个室的气密装置(8)。 所述室中的一个构成设备的炉,并且包括其中进行坩埚(6)中包含的材料的熔炼的区域(4),所述炉装备有加热装置并且承载热稳定基座 5),适于垂直移动坩埚,从而分别将其引入或从冶炼区域(4)中提取。

    DEVICE AND METHOD FOR TREATING COMBUSTIBLES OBTAINED FROM A THERMAL PROCESSING APPARATUS AND APPARATUS EMPLOYED THEREBY
    6.
    发明申请
    DEVICE AND METHOD FOR TREATING COMBUSTIBLES OBTAINED FROM A THERMAL PROCESSING APPARATUS AND APPARATUS EMPLOYED THEREBY 审中-公开
    用于处理从热处理装置获取的燃烧的装置和方法及其使用的装置

    公开(公告)号:WO01092801A1

    公开(公告)日:2001-12-06

    申请号:PCT/US2001/015506

    申请日:2001-05-14

    Abstract: A device (24) adapted for attachment to a thermal processing furnace (2), the device includes a housing (26) having first (8) and second (10) openings with a chamber (28) located therebetween, the second opening is operatively connected to a thermal processing furnace and in communication with the thermal processing furnace for receiving a thermal process generating gas stream containing combustibles from the thermal processing furnace, a gas supply (36) assembly located within the chamber for supplying a heated oxygen-containing gas (38) at a temperature and velocity sufficient to mix the combustible and the oxygen-containing gas to oxidize the combustibles into harmless by-products.

    Abstract translation: 一种适于附接到热处理炉(2)的装置(24),该装置包括具有第一(8)和第二(10)开口的壳体,其中位于其间的室(28),第二开口是可操作地 连接到热处理炉并与热处理炉连通,用于接收从热处理炉产生含有可燃物质的气流的热处理,位于室内的用于供应加热的含氧气体的气体供应(36)组件 38)在足以混合可燃物和含氧气体以将可燃物氧化成无害副产物的温度和速度下。

    HEAT TREATMENT DEVICE
    7.
    发明申请
    HEAT TREATMENT DEVICE 审中-公开
    热处理装置

    公开(公告)号:WO01035453A1

    公开(公告)日:2001-05-17

    申请号:PCT/JP2000/007886

    申请日:2000-11-09

    CPC classification number: H01L21/67253 C23C16/4412

    Abstract: A film forming device, comprising a treating furnace, gas feeding means feeding treating gas into the processing furnace, heating means heating the inside of the treating furnace to a specified treating temperature, and a normal pressure exhaust system for exhausting the gas inside the treating furnace at a specified exhaust pressure near the atmospheric pressure, the normal pressure exhaust system further comprising a flow-adjustable and pressure-adjustable valve, wherein the exhaust pressure of the normal pressure exhaust system is detected by a pressure sensor, and a control part controls the valve based on the pressure detected by the pressure sensor, whereby a stable control is allowed without requiring the introduction of the atmosphere or inert gas, and the structure of the exhaust system is simplified so as to reduce the cost of the entire device.

    Abstract translation: 一种成膜装置,包括处理炉,将处理气体送入处理炉的送气装置,将处理炉内部加热到规定处理温度的加热装置,以及用于排出处理炉内的气体的常压排气系统 在大气压附近的特定排气压力下,所述常压排气系统还包括可流动调节的和可调节的阀,其中所述常压排气系统的排气压力由压力传感器检测,并且控制部件控制 基于由压力传感器检测到的压力的阀,由此允许稳定的控制,而不需要引入大气或惰性气体,并且简化排气系统的结构,从而降低整个装置的成本。

    SEMICONDUCTOR PROCESSING FURNACE
    8.
    发明申请
    SEMICONDUCTOR PROCESSING FURNACE 审中-公开
    半导体加工炉

    公开(公告)号:WO98039609A1

    公开(公告)日:1998-09-11

    申请号:PCT/US1998/003309

    申请日:1998-02-20

    CPC classification number: H01L21/67757 C30B31/12 H01L21/67109

    Abstract: A vertically oriented thermal processor (10) for processing batches of semiconductor wafers held within a processing chamber (16). The processing chamber (16) is contained within a processing vessel (18). A furnace liner (82) surrounds the processing vessel (18) in spaced relationship. A first flow of cooling fluid is supplied upwardly between the processing vessel (18) and furnace liner (82). The incoming first flow also serves to cool the base plate assembly (168) which is constructed to shield the processing chamber from off-gassing. A second flow path of cooling fluid is supplied downwardly between the furnace liner (82) and an inner wall of the furnace heater (88) in countercurrent relationship to the first flow. An outflow baffle (630) and outflow cooler (600) are also advantageously included to isolate the processing chamber and cool the exhausting gases. A preferred power supply system is also described.

    Abstract translation: 一种垂直取向的热处理器(10),用于处理保持在处理室(16)内的批次的半导体晶片。 处理室(16)被包含在处理容器(18)内。 炉衬(82)以间隔的关系围绕处理容器(18)。 在处理容器(18)和炉衬(82)之间向上供应冷却流体的第一流。 进入的第一流还用于冷却基板组件(168),其被构造成屏蔽处理室以免脱气。 冷却流体的第二流路在炉衬(82)和炉加热器(88)的内壁之间以与第一流逆流的关系向下供给。 还有利地包括流出挡板(630)和流出冷却器(600)以隔离处理室并冷却排气。 还描述了优选的电源系统。

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