公开(公告)号：WO0173937A3

公开(公告)日：2002-01-03

申请号：PCT/US0109611

申请日：2001-03-22

Applicant: ONIX MICROSYSTEMS INC

Inventor： BEHIN BEHRANG ,  LAM KAM Y ,  KIANG MENG-HSIUNG ,  DANEMAN MICHAEL J ,  PANNU SATINDERPALL S

IPC: G02B6/35 ,  G02B26/08 ,  H02N1/00 ,  G02B26/02

CPC classification number: G02B6/357 ,  G02B6/3518 ,  G02B6/3556 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

Abstract: A two-dimensional scanner consists of a rotatable gimbal structure with vertical electrostatic comb-drive actuators and sensors. The scanner's two axes of rotation may be controlled independently by activating two sets of vertical comb-drive actuators. The first set of vertical comb-drive actuator is positioned in between a outer frame of the gimbal structure and the base, and the second set of vertical comb-drive actuator is positioned in between the iner part of the gimbal structure and the outer frame of the gimbal structure. The inner part of the gimbal structure may include a reflective surface, and the device may be used as a mirror. Furthermore, the capacitance of the vertical comb-drives may be measured to monitor the angular position of the mirror, and the capacitive position-monitoring signal may be used to implement closed-loop feedback control of the mirror angle. The two-dimensional scanner may be fabricated in a semiconductor process. Two-dimensional scanners may be used to produce fiber-optic switches.

Abstract translation: 二维扫描器由可旋转的万向架结构与垂直静电梳状驱动致动器和传感器组成。 扫描仪的两个旋转轴可以通过激活两组垂直梳齿驱动执行器来独立控制。 第一组垂直梳齿驱动致动器定位在万向架结构的外框架和基座之间，第二组垂直梳驱动致动器定位在万向架结构的中间部分和外框之间 万向架结构。 万向节结构的内部可以包括反射表面，并且该装置可以用作反射镜。 此外，可以测量垂直梳状驱动器的电容以监视反射镜的角度位置，并且可以使用电容位置监视信号来实现镜角的闭环反馈控制。 二维扫描器可以在半导体工艺中制造。 二维扫描仪可用于生产光纤交换机。

公开(公告)号：WO0174707A2

公开(公告)日：2001-10-11

申请号：PCT/US0109261

申请日：2001-03-22

Applicant: ONIX MICROSYSTEMS INC

Inventor： BEHIN BEHRANG ,  PANNU SATINDERPALL S

IPC: B81B5/00 ,  B81B3/00 ,  B81C99/00 ,  G02B6/35 ,  G02B26/08 ,  H02N1/00

CPC classification number: G02B6/357 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/0136 ,  B81B2203/0181 ,  B81B2203/058 ,  B81C1/0015 ,  B81C1/00214 ,  B81C1/00396 ,  G02B6/3518 ,  G02B6/3524 ,  G02B6/3584 ,  G02B6/359 ,  G02B26/0833 ,  H02N1/008 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49155 ,  Y10T29/49156

Abstract: A method of fabricating multi-layer vertical comb-drive actuator that includes a first comb structure having a plurality of first comb fingers and a second comb structure having a plurality of second comb fingers, wherein the first and second comb fingers are substantially interdigitated. The present invention includes masking and etching of a structure that contains these multiple layers, wherein the first and second comb fingers are simultaneously fabricated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer.

Abstract translation: 一种制造多层垂直梳状驱动致动器的方法，该致动器包括具有多个第一梳齿的第一梳结构和具有多个第二梳指的第二梳结构，其中第一和第二梳指基本相互交错。 本发明包括掩蔽和蚀刻包含这些多层的结构，其中同时制造第一和第二梳齿。 第一和第二梳齿可以包括通过绝缘层或气隙彼此电隔离的两个或更多个堆叠的导电层。 或者，第一或第二梳齿可以仅包括一个导电层。

公开(公告)号：WO0167159A2

公开(公告)日：2001-09-13

申请号：PCT/US0107002

申请日：2001-03-02

Applicant: ONIX MICROSYSTEMS INC

Inventor： KIANG MENG-HSIUNG ,  LAM KAM Y ,  BEHIN BEHRANG ,  DANEMAN MICHAEL J

IPC: G02B26/08 ,  G02B6/35 ,  H04B10/02 ,  H04J14/00 ,  H04J14/02 ,  G02B26/00

CPC classification number: G02B6/3546 ,  G02B6/3512 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3582

Abstract: An optical switch module having a movable mirror (312) disposed between two fixed mirrors (310, 314). All three mirrors are aligned parallel to each other in a linear array to form a crossbar switch. The movable mirror (312) moves between a first position and a second position to selectively couple optical signals between two inputs and two outputs. The basic switch module may be scaled up to form an apparatus that incorporates N movable mirrors and N+1 fixed mirrors, where N is an integer greater than zero. Such an apparatus can accommodate 2N fiber inputs and 2N fiber outputs, e.g., in an optical add/drop multiplexer (OADM). The parallel configuration of the switch module takes advantage of existing lens array and fiber V-groove technology to facilitate integration of the fibers and collimators in the module, thereby reducing the difficulty and cost associated with alignment, assembly, and packaging.

Abstract translation: 一种具有设置在两个固定镜（310,314）之间的可移动镜（312）的光学开关模块。 所有三个反射镜以线性阵列彼此平行排列以形成交叉开关。 可移动镜312在第一位置和第二位置之间移动，以选择性地耦合两个输入和两个输出之间的光信号。 基本开关模块可以按比例扩大以形成一个装有N个可移动镜和N + 1个固定镜的装置，其中N是大于零的整数。 这种装置可以容纳2N个光纤输入和2N个光纤输出，例如在光分插复用器（OADM）中。 开关模块的并联配置利用了现有的透镜阵列和光纤V槽技术，便于将光纤和准直器集成在模块中，从而降低与对准，组装和封装相关的难度和成本。