公开(公告)号：WO2006019941A2

公开(公告)日：2006-02-23

申请号：PCT/US2005/025039

申请日：2005-07-13

Applicant: VAZU, INC. ,  LEROUX, Steve ,  GLODDY, Christian ,  GEAGAN, III., John B.

Inventor： LEROUX, Steve ,  GLODDY, Christian ,  GEAGAN, III., John B.

IPC: H04L12/28

CPC classification number: G06F17/30905

Abstract: An electronic document (e.g., a Web page) is automatically parsed for desired information (e.g., contact information such as a telephone number) and that information is marked or otherwise designated to show that it is transferable to a communication device (e.g., a mobile phone) or other location. Upon user request, the information is so transferred via a transfer agent, which formats the content appropriately for the chosen destination, using an appropriate network or other communication means.

Abstract translation: 自动解析电子文档（例如，网页）以获取所需的信息（例如，诸如电话号码的联系信息），并且该信息被标记或以其他方式指定，以示出其可传送到通信设备（例如，移动 电话）或其他位置。 根据用户请求，信息通过转移代理进行传输，转让代理使用合适的网络或其他通信方式，适当地为所选择的目的地格式化内容。

公开(公告)号：WO2005074002A2

公开(公告)日：2005-08-11

申请号：PCT/US2005/001756

申请日：2005-01-20

Applicant: APPLIED MATERIALS ISRAEL, LTD. ,  APPLIED MATERIALS, INC. ,  ROGERS, Steve, Robert

Inventor： ROGERS, Steve, Robert

IPC: H01J37/21

CPC classification number: H01J37/21 ,  H01J37/153 ,  H01J37/222 ,  H01J37/265 ,  H01J37/28 ,  H01J37/29 ,  H01J2237/1532 ,  H01J2237/216 ,  H01J2237/2538 ,  H01J2237/2817 ,  H01J2237/31774

Abstract: Apparatus for focusing a charged particle beam onto a surface, including a charged particle beam generator which is adapted to project the charged particle beam onto a location on the surface, thereby causing charges to be emitted from the location. The apparatus further includes an imaging detector which is adapted to receive the charges so as to form an image of the location, and an aberrating element which is positioned before the imaging detector and which is adapted to produce an aberration in the image. A processor is adapted to receive the image and to adjust at least one of the charged particle beam generator and a position of the surface in response to the aberration.

Abstract translation: 用于将带电粒子束聚焦到表面上的装置，包括带电粒子束发生器，其适于将带电粒子束投射到表面上的位置，从而导致从该位置发射电荷。 该装置还包括成像检测器，其适于接收电荷以形成该位置的图像，以及位于成像检测器之前并且适于产生图像中的像差的像差元件。 处理器适于接收图像并且响应于像差而调整带电粒子束发生器和表面中的至少一个。

公开(公告)号：WO2005073806A1

公开(公告)日：2005-08-11

申请号：PCT/US2005/001748

申请日：2005-01-20

Applicant: APPLIED MATERIALS ISRAEL, LTD. ,  APPLIED MATERIALS, INC. ,  BARTOV, Avishay

Inventor： BARTOV, Avishay

IPC: G03F1/00

CPC classification number: G03F1/84 ,  G01N21/95607 ,  G03F7/7065

Abstract: A method and system are presented for use in controlling the quality of a reticle. The method includes processing and analyzing reference data and test data, and generating output data indicative of the current condition of the reticle. The reference data is indicative of at least a portion of a reference pattern, which is produced on a reference article by using said reticle, when in a satisfied condition. The test data is indicative of a test pattern produced on an identicle article using said reticle when in the current condition, a certain time period after said reticle has been in use or stored.

Abstract translation: 提出了一种用于控制掩模版质量的方法和系统。 该方法包括处理和分析参考数据和测试数据，以及产生指示掩模版当前状态的输出数据。 参考数据表示在满足条件时通过使用所述掩模版在参考制品上产生的参考图案的至少一部分。 测试数据表示当在当前状态下，在所述掩模版已被使用或存储之后的特定时间段内使用所述掩模版产生的标号物品上产生的测试图案。

公开(公告)号：WO2005057193A1

公开(公告)日：2005-06-23

申请号：PCT/US2004/020874

申请日：2004-06-25

Applicant: APPLIED MATERIALS ISRAEL, LTD ,  APPLIED MATERIALS, INC. ,  AMAR, Gal ,  GUETTA, Avishay ,  SHOHAM, Doron ,  SCHWARTZ, Gilad ,  EYNAT, Ronen

Inventor： AMAR, Gal ,  GUETTA, Avishay ,  SHOHAM, Doron ,  SCHWARTZ, Gilad ,  EYNAT, Ronen

IPC: G01N21/95

CPC classification number: G01N21/9501

Abstract: Apparatus for optical inspection of a sample includes a detector assembly, which is configured to receive radiation from a focal area on the sample, and a translation mechanism, which is operative to impart motion to at least one of the detector assembly and the sample so that the focal area of the detector assembly translates over the sample along a translation path. A height sensor is positioned in a known location relative to the detector assembly so as to measure a height of the height sensor relative to a point on the sample that is ahead of the focal area by a predetermined distance along the translation path. A controller is adapted to determine an estimated height of the detector assembly, responsively to the height measured by the height sensor along the translation path.

Abstract translation: 用于光学检查样品的装置包括检测器组件，其被配置为接收来自样品上的聚焦区域的辐射，以及平移机构，该平移机构可操作以向至少一个检测器组件和样品施加运动，使得 检测器组件的焦点区域沿着平移路径在样本上翻译。 高度传感器位于相对于检测器组件的已知位置，以便测量高度传感器相对于位于聚焦区域之前的样品上沿着平移路径预定距离的点的高度。 控制器适于响应于由高度传感器沿着平移路径测量的高度来确定检测器组件的估计高度。

公开(公告)号：WO2004094695A3

公开(公告)日：2004-11-04

申请号：PCT/US2004/006352

申请日：2004-03-01

Applicant: GENUS, INC. ,  KIM, Gi, Youl ,  SRIVASTAVA, Anuranjan ,  SEIDEL, Thomas, E. ,  LONDERGAN, Ana ,  RAMANATHAN, Sasangan

Inventor： KIM, Gi, Youl ,  SRIVASTAVA, Anuranjan ,  SEIDEL, Thomas, E. ,  LONDERGAN, Ana ,  RAMANATHAN, Sasangan

IPC: C23C16/455

Abstract: A process in which a wafer is exposed to a first chemically reactive precursor dose insufficient to result in a maximum saturated ALD deposition rate on the wafer, and then to a second chemically reactive precursor dose, the precursors being distributed in a manner so as to provide substantially uniform film deposition. The second chemically reactive precursor dose may likewise be insufficient to result in a maximum saturated ALD deposition rate on the wafer or, alternatively, sufficient to result in a starved saturating deposition on the wafer. The process may or may not include purges between the precursor exposures, or between one set of exposures and not another.

公开(公告)号：WO2004034044A1

公开(公告)日：2004-04-22

申请号：PCT/US2003/032037

申请日：2003-10-08

Applicant: APPLIED MATERIALS ISRAEL, LTD. ,  APPLIED MATERIALS, INC. ,  SHEMESH, Dror

Inventor： SHEMESH, Dror

IPC: G01N23/225

CPC classification number: G01N23/2252

Abstract: Systems and methods for process monitoring based upon X-ray emission induced by a beam of charged particles such as electrons or ions. Concept as expressed herein.

Abstract translation: 基于由诸如电子或离子的带电粒子束引起的X射线发射的过程监测的系统和方法。 概念如本文所述。

公开(公告)号：WO2004031791A2

公开(公告)日：2004-04-15

申请号：PCT/US2003/031398

申请日：2003-10-03

Applicant: APPLIED MATERIALS ISRAEL, LTD. ,  APPLIED MATERIALS, INC. ,  ALMOGY, Gilad ,  TALBOT, Chris ,  LEVIN, Lior

Inventor： ALMOGY, Gilad ,  TALBOT, Chris ,  LEVIN, Lior

IPC: G01R31/308

CPC classification number: G01R31/2812 ,  G01N21/956

Abstract: A method and system for defect localization includes: (i) receiving a test structure that includes at least one conductor that is at least partially covered by an electro-optically active material; (ii) providing an electrical signal to the conductor, such as charge at least a portion of the conductor; and (iii) imaging the test structure to locate a defect.

Abstract translation: 用于缺陷定位的方法和系统包括：（i）接收包括至少部分被电光活性材料覆盖的导体的测试结构; （ii）向导体提供电信号，例如对导体的至少一部分充电; 和（iii）对测试结构进行成像以定位缺陷。

公开(公告)号：WO2004031753A1

公开(公告)日：2004-04-15

申请号：PCT/US2003/028061

申请日：2003-09-08

Applicant: APPLIED MATERIALS ISRAEL, LTD. ,  APPLIED MATERIALS, INC. ,  KORENGUT, Doron ,  COHEN, Binyamin ,  GUETTA, Avishay

Inventor： KORENGUT, Doron ,  COHEN, Binyamin ,  GUETTA, Avishay

IPC: G01N21/88

CPC classification number: G01N21/8806 ,  G01N21/47 ,  G01N21/4788 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/1772 ,  G01N2021/4711 ,  G01N2021/4735 ,  G01N2021/479 ,  G01N2021/4792 ,  G01N2021/8822 ,  G01N2021/8845 ,  G01N2201/0697

Abstract: Apparatus for imaging an area of a surface along a viewing angle that is oblique to the surface includes an afocal optical relay (192), which is adapted to form a tilted initial image of the area by collecting optical radiation from the area along an optical axis oriented at the viewing angle. A tilt correction unit (194) is coupled to correct a tilt of the initial image so as to form a substantially undistorted intermediate image. A magnification module (198) is coupled to focus the intermediate image onto an image detector.

Abstract translation: 用于沿着与表面倾斜的视角成像表面区域的设备包括无焦光学中继器（192），其适于通过从沿着光轴的区域收集光学辐射来形成该区域的倾斜初始图像 以视角定向。 耦合倾斜校正单元（194）以校正初始图像的倾斜度，以便形成基本上无失真的中间图像。 耦合放大模块（198）以将中间图像聚焦到图像检测器上。

公开(公告)号：WO2004031741A2

公开(公告)日：2004-04-15

申请号：PCT/US2003/028054

申请日：2003-09-08

Applicant: APPLIED MATERIALS ISRAEL, LTD. ,  APPLIED MATERIALS, INC. ,  NAFTALI, Ron ,  GUETTA, Avishay ,  FELDMAN, Haim ,  SHOHAM, Doron

Inventor： NAFTALI, Ron ,  GUETTA, Avishay ,  FELDMAN, Haim ,  SHOHAM, Doron

IPC: G01N21/00

CPC classification number: G01N21/8806 ,  G01N21/47 ,  G01N21/4788 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/1772 ,  G01N2021/4711 ,  G01N2021/4735 ,  G01N2021/479 ,  G01N2021/4792 ,  G01N2021/8822 ,  G01N2021/8845 ,  G01N2201/0697

Abstract: Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.

Abstract translation: 用于产生光辐射的装置包括激光器，其被配置为同时以多个横向模式操作，以便产生输入光束，其特征在于第一斑点对比度。 输入光束的横向模式被光学混合，以便产生输出光束具有基本上小于第一散斑对比度的第二散斑对比度。

公开(公告)号：WO2004010227A2

公开(公告)日：2004-01-29

申请号：PCT/US2003/021670

申请日：2003-07-11

Applicant: APPLIED MATERIALS, INC. ,  APPLIED MATERIALS ISRAEL, LTD.

Inventor： ALMOGY, Gilad ,  FELDMAN, Haim ,  ALONI, Meir

IPC: G03F7/20

CPC classification number: G03F7/70208 ,  G03F7/70275 ,  G03F7/70291 ,  G03F7/70358

Abstract: A printer and method for recording a predefined multiple intensity level image on a substrate, the method includes the steps of: converting the predetermined image to multiple intensity level associated images; converting a light beam to multiple light beam arrays; modulating each light beam array to provide modulated light beam arrays, in response to a corresponding intensity level associated image to be recorded on the substrate; directing each modulated light beam array to impinge on the substrate; and repeating the steps of converting, modulating and directing while moving the substrate until the predefined image is imaged on the substrate. The printer includes a programmable optical radiation source for providing multiple modulated light beam arrays and for directing the modulated light beam arrays to impinge on the substrate, each modulated light beam array being modulated in response to an input signal corresponding to a corresponding intensity level associated image to be recorded on the substrate; whereas a superposition of the intensity level associated images forms the predefined image on the substrate, and a movable stage for moving the substrate until the predefined image is imaged on the substrate.

Abstract translation: 一种用于在基板上记录预定多重强度级图像的打印机和方法，所述方法包括以下步骤：将预定图像转换成多个强度级相关图像; 将光束转换成多个光束阵列; 调制每个光束阵列以响应于要记录在所述衬底上的对应的强度级相关图像来提供调制的光束阵列; 引导每个调制的光束阵列撞击在基底上; 并且重复在移动衬底的同时转换，调制和引导步骤，直到预定图像被成像在衬底上。 打印机包括可编程光辐射源，用于提供多个调制光束阵列并用于引导调制的光束阵列撞击在衬底上，每个被调制的光束阵列响应于对应于对应的强度级相关图像的输入信号被调制 被记录在基板上; 而强度级相关图像的叠加在衬底上形成预定义的图像，以及用于移动衬底的可移动台，直到预定图像在衬底上成像为止。