A PROCESS OF IMAGING A DEEP ULTRAVIOLET PHOTORESIST WITH A TOP COATING AND MATERIALS THEREOF
    52.
    发明申请
    A PROCESS OF IMAGING A DEEP ULTRAVIOLET PHOTORESIST WITH A TOP COATING AND MATERIALS THEREOF 审中-公开
    一种具有顶部涂层的深层超紫外线光刻胶的成像方法及其材料

    公开(公告)号:WO2005088397A2

    公开(公告)日:2005-09-22

    申请号:PCT/IB2005000627

    申请日:2005-03-08

    CPC classification number: G03F7/2041 G03F7/091 G03F7/11

    Abstract: The present invention relates to a process for imaging , preferably deep ultraviolet (uv), photoresists with a topcoat using, preferably deep uv, immersion lithography. The invention further relates to a barrier coating composition comprising a polymer with at least one ionizable group having a pKa ranging from about -9 to about 11. The invention also relates to a process for imaging a photoresist with a (top) barrier coat to prevent contamination of the photoresist from environmental contaminants.

    Abstract translation: 本发明涉及一种用于使用优选深紫外浸没光刻术的具有顶涂层的成像(优选深紫外(UV))光刻胶的方法。 本发明还涉及包含聚合物的阻隔涂料组合物,所述聚合物具有至少一个具有约-9至约11的pKa的可离子化基团。本发明还涉及用(顶部)阻挡涂层对光致抗蚀剂进行成像以防止 污染环境污染物的光致抗蚀剂。

    PHOTORESIST COMPOSITIONS AND PROCESSESS OF USE
    53.
    发明申请
    PHOTORESIST COMPOSITIONS AND PROCESSESS OF USE 审中-公开
    光电组合物和使用过程

    公开(公告)号:WO2005067567A2

    公开(公告)日:2005-07-28

    申请号:PCT/US2005/000156

    申请日:2005-01-05

    CPC classification number: G03F7/40 G03F7/038

    Abstract: Photoresist compositions that demonstrate superior photolithographic performance and hardened resist films that show superior resistance to solvents, have excellent resistance to under plating during the electrodeposition of metals, and show excellent resist stripping characteristics. These photoresist compositions according to the invention are well-suited as for applications in the manufacture of MEMS and micromachine devices. These photoresist compositions according to the invention comprise one or more epoxide-substituted, polycarboxylic acid Resin Component (A), one or more photoacid generator compounds (B), and one or more solvent (C).

    Abstract translation: 显示优异的光刻性能的光刻胶组合物和显示出优异的耐溶剂性的硬化抗蚀剂膜,在金属电沉积期间具有优异的耐电镀性,并且显示出优异的抗剥离特性。 根据本发明的这些光致抗蚀剂组合物非常适用于制造MEMS和微机械装置的应用。 根据本发明的这些光致抗蚀剂组合物包含一种或多种环氧化物取代的多元羧酸树脂组分(A),一种或多种光酸产生剂化合物(B)和一种或多种溶剂(C)。

    BOTTOM ANTI-REFLECTIVE COATINGS DERIVED FROM SMALL CORE MOLECULES WITH MULTIPLE EPOXY MOIETIES
    54.
    发明申请
    BOTTOM ANTI-REFLECTIVE COATINGS DERIVED FROM SMALL CORE MOLECULES WITH MULTIPLE EPOXY MOIETIES 审中-公开
    从具有多种环氧基团的小核分子衍生的底部抗反射涂层

    公开(公告)号:WO2004034435A3

    公开(公告)日:2005-07-28

    申请号:PCT/US0332091

    申请日:2003-10-07

    Abstract: Novel anti-reflective coatings comprising small molecules (e.g., less than about 5,000 g/mole) in lieu of high molecular weight polymers and methods of using those coatings are provided. In one embodiment, aromatic carboxylic acids are used as the chromophores, and the resulting compounds are blended with a crosslinking agent and an acid. Anti-reflective coating films prepared according to the invention exhibit improved properties compared to high molecular weight polymeric anti-reflective coating films. The small molecule anti-reflective coatings have high etch rates and good via fill properties. Photolithographic processes carried out with the inventive material result in freestanding, 110-nm profiles.

    Abstract translation: 提供了包含小分子(例如小于约5,000g / mol)代替高分子量聚合物的新型抗反射涂层以及使用这些涂层的方法。 在一个实施方案中,使用芳族羧酸作为发色团,并将所得化合物与交联剂和酸共混。 与高分子量聚合物抗反射涂膜相比,根据本发明制备的抗反射涂膜显示出改进的性能。 小分子抗反射涂层具有高蚀刻速率和良好的通孔填充性能。 使用本发明材料进行的光刻工艺产生独立的110nm轮廓。

    IMAGING ELEMENT HAVING IMPROVED DURABILITY
    55.
    发明申请
    IMAGING ELEMENT HAVING IMPROVED DURABILITY 审中-公开
    具有改善耐久性的成像元件

    公开(公告)号:WO2005062123A1

    公开(公告)日:2005-07-07

    申请号:PCT/GB2004/004967

    申请日:2004-11-25

    Inventor: SLATER, Sean, D.

    Abstract: The invention provides an imaging element comprising a support having thereon, in order, at least one imaging layer, at least one interlayer containing a lubricant which provides scratch-resistance and at least one outermost layer containing a different lubricant which provides abrasion-resistance and a method of processing the element. The element has increased durability, especially with regard to scratch- and abrasion- (especially photoabrasion-) resistance, whilst retaining performance and ease of manufacture. Preferably the element is for use in the manufacture of printed circuit boards or the production of printing plates, wherein abrasion and scratches are particularly acute.

    Abstract translation: 本发明提供了一种成像元件,其包括依次具有至少一个成像层,至少一个含有提供耐刮擦性的润滑剂的中间层和至少一个包含提供耐磨性的不同润滑剂的最外层的支撑体, 处理元素的方法。 该元件具有增加的耐久性,特别是在耐划伤和耐磨损(特别是耐光腐蚀)的同时,同时保持性能和易于制造。 优选地,该元件用于印刷电路板的制造或印刷版的制造,其中磨损和划痕特别尖锐。

    LITHIUM SALT OF POLYACETYLENE AS RADIATION SENSITIVE FILAMENTS AND PREPARATION AND USE THEREOF
    58.
    发明申请
    LITHIUM SALT OF POLYACETYLENE AS RADIATION SENSITIVE FILAMENTS AND PREPARATION AND USE THEREOF 审中-公开
    聚苯乙烯的盐酸盐作为辐射敏感性膜,其制备和使用

    公开(公告)号:WO2004095065A2

    公开(公告)日:2004-11-04

    申请号:PCT/US2004007273

    申请日:2004-03-10

    CPC classification number: G03F7/025 G03F7/029

    Abstract: This invention relates to photochromic filaments composed of the lithium salt of a conjugated, polymerizable polyacetylene having a carboxylic acid or carboxylate terminal group wherein the length to width ratio of said filaments is between about 5000:1 and about 5:1 and the average length of the filament is up to about 5cm. The invention also pertains to the use of said salts in maximized radiation sensitivity for imaging, radiation dose measurement or mapping and detection of radiation fields.

    Abstract translation: 本发明涉及由具有羧酸或羧酸酯端基的共轭可聚合聚乙炔的锂盐组成的光致变色长丝,其中所述长丝的长宽比为约5000:1至约5:1,平均长度为 灯丝长达约5厘米。 本发明还涉及使用所述盐以最大的辐射敏感度进行成像,辐射剂量测量或辐射场的映射和检测。

    PHOTOPATTERNABLE SORBENT AND FUNCTIONALIZED FILMS
    59.
    发明申请
    PHOTOPATTERNABLE SORBENT AND FUNCTIONALIZED FILMS 审中-公开
    光可吸收性吸附剂和功能化膜

    公开(公告)号:WO0236652A3

    公开(公告)日:2002-07-04

    申请号:PCT/US0145173

    申请日:2001-10-31

    CPC classification number: G03F7/0757 C09D183/04 G03F7/0755 C08L83/00

    Abstract: A composition containing a polymer, a crosslinker and a photo-activatable catalyst is placed on a substrate. The composition is exposed to a predetermined pattern of light, leaving an unexposed region. The light causes the polymer to become crosslinked by hydrosilylation. A solvent is used to remove the unexposed composition from the substrate, leaving the exposed pattern to become a sorbent polymer film that will absorb a predetermined chemical species when exposed to such chemical species.

    Abstract translation: 将含有聚合物,交联剂和可光活化催化剂的组合物置于基底上。 将该组合物暴露于预定图案的光下,留下未暴露的区域。 光使聚合物通过氢化硅烷化交联。 使用溶剂将未暴露的组合物从基材上除去,使暴露的图案成为吸收性聚合物膜,当暴露于这样的化学物质时将吸收预定的化学物质。

    UV-ABSORBING SUPPORT LAYERS AND FLEXOGRAPHIC PRINTING ELEMENTS COMPRISING SAME
    60.
    发明申请
    UV-ABSORBING SUPPORT LAYERS AND FLEXOGRAPHIC PRINTING ELEMENTS COMPRISING SAME 审中-公开
    紫外线吸收支撑层和包含其的柔性印刷元件

    公开(公告)号:WO01027696A1

    公开(公告)日:2001-04-19

    申请号:PCT/US2000/025536

    申请日:2000-09-18

    CPC classification number: G03F7/091 G03F7/029 G03F7/202

    Abstract: The present invention provides a method for producing direct-imaged flexographic printing elements such that both the front and back exposure times are economically efficient for the manufacturer. In one embodiment, the method comprises providing at least one solid photocurable element. The solid photocurable element comprises a solid photocurable material comprising an oxygen scavenger, a support layer having an actinic radiation absorbing compound integrated uniformly throughout such that is absorbs at least some actinic radiation during exposure, and a photoablative mask layer. The methods of the invention involve creating a floor in the solid photocurable material by back exposure through the support layer having the actinic radiation absorbing compound, transferring a negative image directly onto the solid photocurable material by photoablating the photoablatable mask layer, followed by front exposure effective to cure the solid photocurable material.

    Abstract translation: 本发明提供了一种用于生产直接成像的柔版印刷元件的方法,使得正面和背面曝光时间对于制造商来说是经济有效的。 在一个实施方案中,该方法包括提供至少一种固体可光固化元件。 固体光固化元件包括固体光固化材料,其包含除氧剂,具有均匀整合的光化辐射吸收化合物的支撑层,以便在曝光期间吸收至少一些光化辐射,以及光蚀刻掩模层。 本发明的方法包括通过背光曝光通过具有光化辐射吸收化合物的支撑层来形成固体光固化材料中的底板,通过照相可光化掩模层将负像直接转印到固体可光固化材料上,然后进行正面曝光 固化固体光固化材料。

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