公开(公告)号：WO2022169792A1

公开(公告)日：2022-08-11

申请号：PCT/US2022/014816

申请日：2022-02-02

Applicant: MKS INSTRUMENTS, INC.

Inventor： KAMAREHI, Mohammad ,  POKIDOV, Ilya ,  TRENHOLM, Kenneth

IPC: C23C16/455 ,  C23C16/48 ,  H05B6/64

Abstract: A microwave system for use within a microwave-assisted thermal atomic layer deposition system is disclosed which include at least one microwave generator configured to output at least one microwave signal, at least one waveguide assembly in communication with the at least one microwave generator and configured to receive the microwave signal, one or more isolators positioned within the waveguide assembly and configured to reduce or eliminate backscatter of the microwave signal from the waveguide assembly to the at least one microwave generator, at least one tuning device in positioned within the waveguide assembly and configured receive the microwave signal from the isolator and tune the microwave signal, and at least one microwave delivery device in communication with the waveguide assembly and configured to direct at least a portion of the microwave signal into at least one processing chamber of the microwave-assisted thermal atomic layer deposition system.

公开(公告)号：WO2017075557A1

公开(公告)日：2017-05-04

申请号：PCT/US2016/059618

申请日：2016-10-29

Applicant: NEWPORT CORPORATION

Inventor： CURRY, John ,  CHANDLER, Christopher ,  WATTS, Wade ,  HARRIOTT, Nicholas

IPC: G01R31/26 ,  G01R1/04

CPC classification number: G01R31/2875 ,  G01R31/2635 ,  H01S5/0014

Abstract: A high power laser diode test system is disclosed which includes a housing body defining at least one device test module compartment therein, a power supply, the system controller, and thermal control system positioned within the device test module compartment, a device test module having at least one carrier device receiver formed therein detachably coupled to the housing body, and at least one carrier device configured to support at least one laser diode device coupled thereto detachably positioned within the carrier device port formed on the device test module.

Abstract translation: 公开了一种高功率激光二极管测试系统，其包括在其中限定至少一个设备测试模块隔间的壳体，电源，系统控制器和位于设备测试模块内的热控制系统 隔室，具有形成在装置测试模块的至少一个载流子器件接收器在其中可拆卸地联接到所述外壳主体，以及至少一种载体装置，被配置为支持耦合到其可拆卸地定位在器件上形成的承载设备端口中的至少一个激光二极管器件 测试模块。

公开(公告)号：WO2017049257A1

公开(公告)日：2017-03-23

申请号：PCT/US2016/052391

申请日：2016-09-17

Applicant: NEWPORT CORP

Inventor： JIN, Wen Xu ,  SEBASTIAN, Richard Michael

IPC: G02B7/02 ,  G02B7/00

CPC classification number: G02B7/1825 ,  G02B7/004 ,  G02B7/006 ,  G02B7/023

Abstract: An optical component mount system which includes an optical mount having at least one mount body. At least one optical component receiver may be formed on the mount body. The optical component receiver may be configured to receive at least one optical component therein. In addition, at least one coupling extension extends from the optical mount body. The coupling extension includes at least one coupling receiver formed therein. The coupling receiver is configured to receive at least a portion of at least one optical rail body therein. In one embodiment, the coupling receiver and optical component receiver are co-aligned along a common longitudinal axis of the optical mount.

Abstract translation: 一种光学部件安装系统，其包括具有至少一个安装体的光学安装座。 至少一个光学部件接收器可以形成在安装体上。 光学部件接收器可以被配置为在其中接收至少一个光学部件。 此外，至少一个耦合延伸部从光学安装体延伸。 耦合延伸部包括形成在其中的至少一个耦合接收器。 耦合接收器被配置为在其中容纳至少一个光学轨道体的至少一部分。 在一个实施例中，耦合接收器和光学部件接收器沿着光学安装座的公共纵向轴线共同对准。

公开(公告)号：WO2015073378A1

公开(公告)日：2015-05-21

申请号：PCT/US2014/064861

申请日：2014-11-10

Applicant: NEWPORT CORPORATION

Inventor： LI, Hongqi ,  LIM, Alan

IPC: G02B6/44

CPC classification number: H02G15/007 ,  F16L3/222 ,  G02B6/4471

Abstract: The present application is directed to a flexure-type strain relief device and includes a device body having a first surface and at least one support member formed on the device body, at least one fastener receiver may be formed in and traversing through the device body, at least one flex channel formed in and traversing through the device body and configured to be selectively movable in relation to at least one of the first surface of the device body and the support member of the device body, and at least one conduit receiving port formed in the flex channel wherein at least one transverse dimension of the receiving port configured to be selectively adjustable by controllably moving the flex channel thereby applying at least one clamping force to at least one conduit positioned within the receiving port.

Abstract translation: 本申请涉及一种挠曲型应变消除装置，并且包括具有第一表面和形成在装置主体上的至少一个支撑构件的装置主体，至少一个紧固件接收器可以形成在穿过装置主体中并穿过装置主体， 至少一个柔性通道形成并穿过装置主体并被构造成相对于装置主体的第一表面和装置主体的支撑构件中的至少一个选择性地移动，并且形成至少一个导管接收口 在柔性通道中，其中接收端口的至少一个横向尺寸被配置为通过可控地移动柔性通道来选择性地调节，从而将至少一个夹紧力施加到位于接收端口内的至少一个导管。

公开(公告)号：WO2014121261A1

公开(公告)日：2014-08-07

申请号：PCT/US2014/014620

申请日：2014-02-04

Applicant: NEWPORT CORPORATION

Inventor： BOVATSEK, James ,  PATEL, Rajesh

IPC: B23K26/38 ,  B23K26/40 ,  B23K26/06 ,  B23K26/08 ,  B23K26/359

CPC classification number: B23K26/0057 ,  B23K26/40 ,  B23K2203/50 ,  C03B33/0222

Abstract: The present application is directed to a method and apparatus for processing a transparent or semitransparent material with a laser beam resulting in deterministic separation of a single sheet of the material into two or more pieces.

Abstract translation: 本申请涉及一种用激光束处理透明或半透明材料的方法和装置，其导致单片材料确定性地分离成两片或多片。

公开(公告)号：WO2021188230A1

公开(公告)日：2021-09-23

申请号：PCT/US2021/017214

申请日：2021-02-09

Applicant: MKS INSTRUMENTS, INC.

Inventor： SULLIVAN, Philip ,  SYSSOEV, Sergei ,  MATTOR, Ethan ,  SWAMINATHAN, Venkatesan ,  LUCAS, Paul

IPC: G01L9/00 ,  G01L9/12

Abstract: A capacitance manometer is disclosed which includes at least one electrode structure having an inner electrode structure and an outer electrode structure separated by at least one gap, at least one flexible diaphragm having at least one conductive material positioned thereon or integrated therein may be positioned in movable relation to the electrode structure and in proximity to the electrode structure, and at least one non-planar baffle having an inner baffle structure and an outer baffle structure separated by at least one baffle orifice positioned distantly from the electrode structure proximate to the flexible diaphragm.

公开(公告)号：WO2019169140A1

公开(公告)日：2019-09-06

申请号：PCT/US2019/020063

申请日：2019-02-28

Applicant: NEWPORT CORPORATION

Inventor： SOSNOWSKI, Thomas ,  PETERSEN, Alan ,  BOGGY, Richard ,  THIJSSEN, Christoph ,  UTTER, Steven ,  FELDMAN, Mark

IPC: G02B1/11

Abstract: The present application is directed to various embodiments of optical components having hybrid nano-textured anti-reflective coatings applied thereto which includes at least one substrate having at least one substrate body defining at least one surface, at least one layer may be applied to a surface of the substrate body, and at least one nano-textured surface formed on least one layer applied to the surface of the substrate body.

公开(公告)号：WO2019108831A2

公开(公告)日：2019-06-06

申请号：PCT/US2018/063124

申请日：2018-11-29

Applicant: MKS INSTRUMENTS

Inventor： CHIU, Johannes ,  CHEN, Xing ,  TAI, Chiu-Ying ,  HARRIS, Michael ,  GUPTA, Atul

Abstract: The present application is directed to a multi-sensor gas sampling detection system and method for detecting and measuring the radicals in a radical gas stream and includes at least one radical gas generator in communication with at least one gas source. The radical gas generator may be configured to generate at least one radical gas stream which may be used within a processing chamber. As such, the processing chamber is in fluid communication with the radical gas generator. At least one analysis circuit in fluid communication with the radical gas generator may be used in the detection and measurement system. The analysis may be configured to receive a defined volume and/or flow rate of the radical gas stream. In one embodiment, the analysis circuit may be configured to react at least one reagent with radicals within the defined volume of the radical gas stream thereby forming at least one chemical species within at least one compound stream. At least one sensor module within the analysis circuit may be configured to measure a concentration of the chemical species within the compound stream. One or more flow measurement modules may be in fluid communication with the sensor module. During use, the flow measurement module may be configured to measure the volume of at least one of the compound stream and radical gas stream.

公开(公告)号：WO2018102791A1

公开(公告)日：2018-06-07

申请号：PCT/US2017/064369

申请日：2017-12-02

Applicant: NEWPORT CORPORATION

Inventor： SCHAAR, Joseph ,  CHIEN, Ching-Yuan ,  BOGGY, Richard ,  KAFKA, James ,  DINER, Adi

IPC: H01S3/11 ,  H01S3/16 ,  H01S3/067

Abstract: A high-power ytterbium-doped calcium fluoride laser system is disclosed herein which includes at least one pump source, at least one laser cavity formed by at least one high reflector and at least one output coupler, and at least one ytterbium-doped calcium fluoride optical crystal positioned within the laser cavity in communication with the pump source, the ytterbium-doped calcium fluoride optical crystal configured to output at least one output signal of at least 20 W, having a pulse width of 200 fs or less, and a repetition rate of at least 40 MHz.

公开(公告)号：WO2012174309A2

公开(公告)日：2012-12-20

申请号：PCT/US2012/042550

申请日：2012-06-14

Applicant: NEWPORT CORPORATION ,  LI, Zhuoyun

Inventor： LI, Zhuoyun

IPC: G01J1/02 ,  G01J1/04 ,  A61B5/00

CPC classification number: F21V9/02 ,  F21S8/006 ,  F21V9/06 ,  G01J1/0488 ,  G02B5/208

Abstract: The present application is directed to an optical filter system for use in a solar simulator, and includes at least one supplemental filter configured not to transmit light having a wavelength of 295nm or less and to output at least one conditioned signal at least one WG320 optical filter configured to be irradiated by the conditioned signal and output at least one partially filtered signal having a wavelength of about 300nm or greater, and at least one UG11 pass filter configured to be irradiated by the partially filtered signal and output at least one output signal having a wavelength of about 300nm to about 400nm.

Abstract translation: 本申请涉及一种用于太阳能模拟器的光学滤波器系统，并且包括至少一个辅助滤波器，其被配置为不透射波长为295nm或更小的光，并且输出至少一个调节信号至少一个WG320滤光器 被配置为被经调节的信号照射并输出具有约300nm或更大的波长的至少一个部分滤波的信号，以及至少一个UG11通滤波器，其被配置为被部分滤波的信号照射，并输出至少一个具有 波长约300nm至约400nm。