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公开(公告)号：WO2008076319A1
公开(公告)日：2008-06-26
申请号：PCT/US2007/025525
申请日：2007-12-13
Applicant: MOMENTIVE PERFORMANCE MATERIALS , VAIDHYANATHAN, Balasubramaniam , JOSHI, Salil, Mohan , RAMASESHA, Sheela, Kollali , NAGESH, Mamatha , LOU, Victor, Lienkong , DALAKOS, George, Theodore , WITTBRODT, Michael, John , ZHONG, Dalong
Inventor： VAIDHYANATHAN, Balasubramaniam , JOSHI, Salil, Mohan , RAMASESHA, Sheela, Kollali , NAGESH, Mamatha , LOU, Victor, Lienkong , DALAKOS, George, Theodore , WITTBRODT, Michael, John , ZHONG, Dalong
CPC classification number: H01L21/67103 , C03C8/02 , C03C8/08 , C03C8/24 , H01L21/67098 , H05B3/143 , H05B3/283
Abstract: A wafer processing apparatus, including a heater apparatus, is provided. The heater apparatus includes a coating layer; and a seal structure in contact with the coating layer. The seal structure is formed from a seal formable material. The seal formable material includes at least one of a YASB glassy composition, a CGYP glassy composition, or a combination of the YASB glassy composition and the CGYP glassy composition. A method and device are also included.
Abstract translation: 提供了包括加热器装置的晶片处理装置。 加热器装置包括涂层; 以及与涂层接触的密封结构。 密封结构由可密封成型材料形成。 可密封成型材料包括YASB玻璃组合物，CGYP玻璃组合物或YASB玻璃组合物和CGYP玻璃组合物的组合中的至少一种。 还包括一种方法和装置。
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Patent Agency Ranking
公开(公告)号：WO2008076320A2
公开(公告)日：2008-06-26
申请号：PCT/US2007/025529
申请日：2007-12-13
Applicant: MOMENTIVE PERFORMANCE MATERIALS, INC. , CHANDRAN, Ramachandran, Gopi , DALAKOS, George, Theodore , ZHONG, Dalong
CPC classification number: H01L21/68757 , C04B35/44 , C04B35/6261 , C04B2235/3206 , C04B2235/3208 , C04B2235/445 , C04B2235/9607 , C04B2235/9669 , C23C16/4581 , H01L21/67103 , H01L21/6831 , H02N13/00
Abstract: A processing apparatus for use in a corrosive operating environment is provided. The apparatus includes a base substrate for placing a wafer thereon. The base substrate has a coefficient of thermal expansion. At least one electrode is embedded in or disposed on or under the base substrate. The electrode has a coefficient of thermal expansion in a range of from about 0.70 to about 1.25 times that of the base substrate coefficient of thermal expansion (CTE). At least one coating layer is disposed on the base substrate. The coating layer includes a composition capable of forming a calcium aluminate coating. The calcium aluminate coatingJay.er is doped with one of MgO, CaO, CaF 2 and mixtures thereof to control the CTE of the coating layer to match the CTE of the base substrate. The apparatus is exposed to a corrosive operating environment at a temperature range of from about 25 degrees Celsius to about 1500 degrees Celsius. A coated article and associated method are provided.
Abstract translation: 提供一种用于腐蚀性操作环境的处理装置。 该装置包括用于在其上放置晶片的基底基板。 基底具有热膨胀系数。 至少一个电极嵌入或设置在基底基板上或下方。 电极的热膨胀系数在基底热膨胀系数（CTE）的约0.70至约1.25倍的范围内。 在基底基板上设置至少一层涂层。 涂层包括能够形成铝酸钙涂层的组合物。 将铝酸钙涂料掺入MgO，CaO，CaF 2 O 2中的一种及其混合物，以控制涂层的CTE以匹配基底基材的CTE。 该装置暴露在约25摄氏度至约1500摄氏度的温度范围内的腐蚀性操作环境中。 提供涂覆制品和相关方法。
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公开(公告)号：WO2011106184A1
公开(公告)日：2011-09-01
申请号：PCT/US2011/024677
申请日：2011-02-14
Applicant: GENERAL ELECTRIC COMPANY , XIA, Hua , BUSBOOM, Axel , DUROCHER, Kevin, Matthew , GUIDA, Renato , DALAKOS, George, Theodore , KOSTE, Glen, Peter , LEE, Boon, Kwee
Inventor： XIA, Hua , BUSBOOM, Axel , DUROCHER, Kevin, Matthew , GUIDA, Renato , DALAKOS, George, Theodore , KOSTE, Glen, Peter , LEE, Boon, Kwee
CPC classification number: G02B6/4492 , G01D5/35316 , G01K11/3206 , G01L1/246 , G01L11/025
Abstract: In one aspect, the present invention provides a hermetically sealed fiber sensing cable comprising: a core fiber comprising at least one Bragg grating region, an outer surface and a length; a fiber cladding in contact with the core fiber along the entire length of the core fiber, the fiber cladding having an outer surface and a length; a carbon layer disposed upon the outer surface of the fiber cladding along the entire length of the fiber cladding, the carbon layer comprising diamond-like carbon; a hydrogen ion absorption layer in contact with the carbon layer, the hydrogen ion absorption layer being disposed on the outer surface of the carbon layer; and an outer sleeve. Also provided in another aspect of the present invention, is a component for a hermetically sealed fiber sensing cable.
Abstract translation: 一方面，本发明提供了一种密封的光纤感测电缆，包括：芯纤维，其包括至少一个布拉格光栅区域，外表面和长度; 光纤包层与芯纤维沿核心纤维的整个长度接触，纤维包层具有外表面和长度; 沿着所述纤维包层的整个长度设置在所述纤维包层的外表面上的碳层，所述碳层包含类金刚石碳; 与碳层接触的氢离子吸收层，氢离子吸收层设置在碳层的外表面上; 和外套筒。 在本发明的另一方面中还提供了一种用于气密密封的光纤传感电缆的部件。
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公开(公告)号：WO2008076320A3
公开(公告)日：2008-11-13
申请号：PCT/US2007025529
申请日：2007-12-13
Applicant: MOMENTIVE PERFORMANCE MAT INC , CHANDRAN RAMACHANDRAN GOPI , DALAKOS GEORGE THEODORE , ZHONG DALONG
Inventor： CHANDRAN RAMACHANDRAN GOPI , DALAKOS GEORGE THEODORE , ZHONG DALONG
IPC: C04B35/057 , C04B35/44 , C23C16/44 , C23C16/458 , H01L21/00 , H01L21/683 , H01L21/687 , H02N13/00 , H05B3/14
CPC classification number: H01L21/68757 , C04B35/44 , C04B35/6261 , C04B2235/3206 , C04B2235/3208 , C04B2235/445 , C04B2235/9607 , C04B2235/9669 , C23C16/4581 , H01L21/67103 , H01L21/6831 , H02N13/00
Abstract: A processing apparatus for use in a corrosive operating environment is provided. The apparatus includes a base substrate for placing a wafer thereon. The base substrate has a coefficient of thermal expansion. At least one electrode is embedded in or disposed on or under the base substrate. The electrode has a coefficient of thermal expansion in a range of from about 0.70 to about 1.25 times that of the base substrate coefficient of thermal expansion (CTE). At least one coating layer is disposed on the base substrate. The coating layer includes a composition capable of forming a calcium aluminate coating. The calcium aluminate coatingJay.er is doped with one of MgO, CaO, CaF 2 and mixtures thereof to control the CTE of the coating layer to match the CTE of the base substrate. The apparatus is exposed to a corrosive operating environment at a temperature range of from about 25 degrees Celsius to about 1500 degrees Celsius. A coated article and associated method are provided.
Abstract translation: 提供一种用于腐蚀性操作环境的处理装置。 该装置包括用于在其上放置晶片的基底基板。 基底具有热膨胀系数。 至少一个电极嵌入或设置在基底基板上或下方。 电极的热膨胀系数在基底热膨胀系数（CTE）的约0.70至约1.25倍的范围内。 在基底基板上设置至少一层涂层。 涂层包括能够形成铝酸钙涂层的组合物。 将铝酸钙涂料掺入MgO，CaO，CaF 2 O 2中的一种及其混合物，以控制涂层的CTE以匹配基底基材的CTE。 该装置暴露在约25摄氏度至约1500摄氏度的温度范围内的腐蚀性操作环境中。 提供涂覆制品和相关方法。
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公开(公告)号：WO2008018956A3
公开(公告)日：2008-04-10
申请号：PCT/US2007015026
申请日：2007-06-28
Applicant: MOMENTIVE PERFORMANCE MAT INC , LOU VICTOR LIENKONG , DALAKOS GEORGE THEODORE , SCHAEPKENS MARC
Inventor： LOU VICTOR LIENKONG , DALAKOS GEORGE THEODORE , SCHAEPKENS MARC
IPC: H01L21/687
CPC classification number: H01L21/68757 , C03C3/062 , C03C3/095 , C03C4/20
Abstract: A processing apparatus for use in a corrosive operating environment at a temperature range of 25 - 1500 0 C is provided. The apparatus has protective coating structure that includes a glassy material. The glassy material includes at least one of yttrium, cerium, or gadolinium; and aluminum and silicon. The coating composition resists etching by a harsh environment.
Abstract translation: 提供了在25-1500℃的温度范围内的腐蚀性操作环境中使用的处理装置。 该设备具有包含玻璃质材料的保护涂层结构。 玻璃质材料包括钇，铈或钆中的至少一种; 和铝和硅。 该涂料组合物抵抗恶劣环境下的蚀刻。
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公开(公告)号：WO2008018956A2
公开(公告)日：2008-02-14
申请号：PCT/US2007/015026
申请日：2007-06-28
Applicant: MOMENTIVE PERFORMANCE MATERIALS, INC. , LOU, Victor, Lienkong , DALAKOS, George, Theodore , SCHAEPKENS, Marc
Inventor： LOU, Victor, Lienkong , DALAKOS, George, Theodore , SCHAEPKENS, Marc
IPC: H01L21/683 , C23C16/458
CPC classification number: H01L21/68757 , C03C3/062 , C03C3/095 , C03C4/20
Abstract: A processing apparatus for use in a corrosive operating environment at a temperature range of 25 - 1500 0 C is provided. The apparatus has protective coating structure that includes a glassy material. The glassy material includes at least one of yttrium, cerium, or gadolinium; and aluminum and silicon. The coating composition resists etching by a harsh environment.
Abstract translation: 提供了一种在温度范围为25-1500℃的腐蚀性操作环境中使用的加工设备。 该装置具有包括玻璃状材料的保护涂层结构。 玻璃状材料包括钇，铈或钆中的至少一种; 和铝和硅。 涂料组合物可以抵抗恶劣环境的蚀刻。
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