公开(公告)号：WO2006075291A3

公开(公告)日：2007-04-12

申请号：PCT/IB2006050088

申请日：2006-01-10

Applicant: KONINKL PHILIPS ELECTRONICS NV ,  COMPTER JOHAN C ,  FRISSEN PETRUS C M ,  VAN EIJK JAN

Inventor： COMPTER JOHAN C ,  FRISSEN PETRUS C M ,  VAN EIJK JAN

IPC: G03F7/20

CPC classification number: G03F7/70758 ,  Y10S414/135

Abstract: Especially for use in the semiconductor industry, a displacement device (701) is disclosed comprising a first part comprising a carrier (714) on which a system of magnets (710) is arranged according to a pattern of row and columns extending parallel to the X- direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row and each column rotates 90° counter-clockwise. The second part comprises an electric coil system (712) with two types of electric coils, one type having an angular offset of +45°, and the other type having an offset of -45° with respect to the X-direction. The first part (714, 710) is movable over a range of centimeters or more with respect to the stationary second part (712). For high precision positioning of the first part, an interferometer system (731, 730) is provided.

Abstract translation: 特别是用于半导体工业中，公开了一种位移装置（701），其包括第一部分，该第一部分包括载体（714），磁体系统（710）根据平行于X的行和列的图案排列在其上 - 方向和Y方向。 每行和列中的磁体根据Halbach阵列布置，即每行中的连续磁体的磁性取向，并且每一列逆时针旋转90°。 第二部分包括具有两种类型的电线圈的电线圈系统（712），一种类型的角偏移为+ 45°，另一种类型相对于X方向具有-45°的偏移。 第一部分（714,710）可相对于固定的第二部分（712）在一厘米或更多的范围内移动。 对于第一部分的高精度定位，提供了干涉仪系统（731,730）。

公开(公告)号：WO2009050675A3

公开(公告)日：2009-06-25

申请号：PCT/IB2008054269

申请日：2008-10-17

Applicant: KONINKL PHILIPS ELECTRONICS NV ,  FRISSEN PETRUS C M ,  KLAVER RENATUS G

Inventor： FRISSEN PETRUS C M ,  KLAVER RENATUS G

IPC: G03F7/20 ,  G01D5/38 ,  H01L21/68

CPC classification number: G01D5/38 ,  G01D5/28 ,  G03F7/70758 ,  G03F7/70775 ,  H01L21/681

Abstract: A displacement device with precision measurement with a displacement device for supporting a workpiece including an optical sensor (52); a support plate (54) defining a support plate aperture (56); a planar motor (58) disposed parallel the support plate (54), the planar motor (58) having a first side (60) operable to support the workpiece (40) and a second side (62) opposite the support plate (54); and a 2D-grating (68) disposed on the planar motor (58), the 2D-grating (68) being in optical communication with the optical sensor (52) through the support plate aperture (56).

Abstract translation: 一种具有精度测量的位移装置，具有用于支撑包括光学传感器（52）的工件的位移装置; 限定支撑板孔（56）的支撑板（54）; 平面电动机（58），平行于所述支撑板（54），所述平面电动机（58）具有可操作以支撑所述工件（40）的第一侧面（60）和与所述支撑板（54）相对的第二侧面（62） ; 以及设置在所述平面电动机（58）上的2D光栅（68），所述2D光栅（68）通过所述支撑板孔（56）与所述光学传感器（52）光学连通。

公开(公告)号：WO2009083889A1

公开(公告)日：2009-07-09

申请号：PCT/IB2008055484

申请日：2008-12-22

Applicant: KONINKL PHILIPS ELECTRONICS NV ,  FRISSEN PETRUS C M ,  COMPTER JOHAN C

Inventor： FRISSEN PETRUS C M ,  COMPTER JOHAN C

IPC: H04L12/24 ,  H04L12/46 ,  H04L12/56

CPC classification number: G03F7/70758 ,  G03F7/70816 ,  H02K1/278 ,  H02K7/09 ,  H02K41/031 ,  H02K2201/18

Abstract: An inverted planar motor employs an integration of a magnetic planar support (20) and a magnetic lift support (30), and a coil actuator (10) magnetically interactive with the magnetic planar support (20) and the magnetic lift support (30). In operation, coil actuator (10) concurrently moves the magnetic planar support (20) and the magnetic lift support (30) parallel to an XY plane of an XYZ reference frame associated with the coil actuator (10) based on a magnetic interaction between the coil actuator (10) and the magnetic planar support (20), and exclusively moves the magnetic lift support (30) orthogonal to the XY plane of the XYZ reference frame associated with the coil actuator (10) based on a magnetic interaction between the coil actuator (10) and the magnetic lift support (30).

Abstract translation: 倒置的平面电动机采用磁性平面支撑件（20）和磁性提升支架（30）的集成，以及与磁性平面支撑件（20）和磁性升降支架（30）磁性交互的线圈致动器（10）。 在操作中，线圈致动器（10）同时基于磁性相互作用将磁性平面支撑件（20）和磁性提升支撑件（30）平行于与线圈致动器（10）相关联的XYZ参考框架的XY平面移动 线圈致动器（10）和磁性平面支撑件（20），并且基于线圈（10）和磁性平面支撑件（20）之间的磁性相互作用专门地移动与线圈致动器（10）相关联的XYZ参考框架的XY平面正交的磁升降支撑件 致动器（10）和磁升降支架（30）。

公开(公告)号：WO2006075291A2

公开(公告)日：2006-07-20

申请号：PCT/IB2006/050088

申请日：2006-01-10

Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V. ,  COMPTER, Johan, C. ,  FRISSEN, Petrus, C., M. ,  VAN EIJK, Jan

Inventor： COMPTER, Johan, C. ,  FRISSEN, Petrus, C., M. ,  VAN EIJK, Jan

IPC: G03F7/20

CPC classification number: G03F7/70758 ,  Y10S414/135

Abstract: Especially for use in the semiconductor industry, a displacement device (701) is disclosed comprising a first part comprising a carrier (714) on which a system of magnets (710) is arranged according to a pattern of row and columns extending parallel to the X- direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row and each column rotates 90° counter-clockwise. The second part comprises an electric coil system (712) with two types of electric coils, one type having an angular offset of +45°, and the other type having an offset of -45° with respect to the X-direction. The first part (714, 710) is movable over a range of centimeters or more with respect to the stationary second part (712). For high precision positioning of the first part, an interferometer system (731, 730) is provided.

Abstract translation: 特别是用于半导体工业中，公开了一种位移装置（701），其包括第一部分，该第一部分包括载体（714），磁体系统（710）根据平行于X的行和列的图案排列在其上 - 方向和Y方向。 每行和列中的磁体根据Halbach阵列布置，即每行中的连续磁体的磁性取向，并且每一列逆时针旋转90°。 第二部分包括具有两种类型的电线圈的电线圈系统（712），一种类型的角偏移为+ 45°，另一种类型相对于X方向具有-45°的偏移。 第一部分（714,710）可相对于固定的第二部分（712）在一厘米或更多的范围内移动。 对于第一部分的高精度定位，提供了干涉仪系统（731,730）。

公开(公告)号：WO2009083891A3

公开(公告)日：2009-07-09

申请号：PCT/IB2008/055486

申请日：2008-12-22

Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V. ,  FRISSEN, Petrus, C., M. ,  JANSEN, Gerardus, L., M.

Inventor： FRISSEN, Petrus, C., M. ,  JANSEN, Gerardus, L., M.

IPC: H02P6/00 ,  G03F7/20 ,  H02K41/03

Abstract: An inverted planar motor employ a magnetic displacement device (10), and a coil actuator (20) magnetically interactive with the magnetic displacement device (10). The coil actuator (20) includes an electric coil (21) and a current amplifier (26) switchable between a K-factor measuring mode and a current measuring mode. The K-factor measuring mode includes current amplifier (26) preventing a flow of current through the electric coil (21) to facilitate a measurement of an electro motive force voltage (VEMF) indicative of a K- factor of the electric coil (21). The current measuring mode includes current amplifier (26) controlling a flow of current through the electric coil (21) and a current sensor (27) facilitating a measurement of the flow of current through the electric coil (21). The coil actuator (20) further includes a primary cooling body (25) having current sensor (27) disposed therein to stabilize a current measuring temperature of the current sensor (27).

公开(公告)号：WO2009083889A9

公开(公告)日：2009-07-09

申请号：PCT/IB2008/055484

申请日：2008-12-22

Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V. ,  FRISSEN, Petrus, C., M. ,  COMPTER, Johan, C.

Inventor： FRISSEN, Petrus, C., M. ,  COMPTER, Johan, C.

Abstract: An inverted planar motor employs an integration of a magnetic planar support (20) and a magnetic lift support (30), and a coil actuator (10) magnetically interactive with the magnetic planar support (20) and the magnetic lift support (30). In operation, coil actuator (10) concurrently moves the magnetic planar support (20) and the magnetic lift support (30) parallel to an XY plane of an XYZ reference frame associated with the coil actuator (10) based on a magnetic interaction between the coil actuator (10) and the magnetic planar support (20), and exclusively moves the magnetic lift support (30) orthogonal to the XY plane of the XYZ reference frame associated with the coil actuator (10) based on a magnetic interaction between the coil actuator (10) and the magnetic lift support (30).

公开(公告)号：WO2009050675A2

公开(公告)日：2009-04-23

申请号：PCT/IB2008/054269

申请日：2008-10-17

Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V. ,  FRISSEN, Petrus, C., M. ,  KLAVER, Renatus, G.

Inventor： FRISSEN, Petrus, C., M. ,  KLAVER, Renatus, G.

IPC: G03F7/20

CPC classification number: G01D5/38 ,  G01D5/28 ,  G03F7/70758 ,  G03F7/70775 ,  H01L21/681

Abstract: A displacement device with precision measurement with a displacement device for supporting a workpiece including an optical sensor (52); a support plate (54) defining a support plate aperture (56); a planar motor (58) disposed parallel the support plate (54), the planar motor (58) having a first side (60) operable to support the workpiece (40) and a second side (62) opposite the support plate (54); and a 2D-grating (68) disposed on the planar motor (58), the 2D-grating (68) being in optical communication with the optical sensor (52) through the support plate aperture (56).

Abstract translation: 一种具有精度测量的位移装置，具有用于支撑包括光学传感器（52）的工件的位移装置; 限定支撑板孔（56）的支撑板（54）; 平面电动机（58），平行于所述支撑板（54），所述平面电动机（58）具有可操作以支撑所述工件（40）的第一侧面（60）和与所述支撑板（54）相对的第二侧面（62） ; 以及设置在所述平面电动机（58）上的2D光栅（68），所述2D光栅（68）通过所述支撑板孔（56）与所述光学传感器（52）光学连通。

公开(公告)号：WO2006054243A3

公开(公告)日：2008-06-12

申请号：PCT/IB2005053766

申请日：2005-11-15

Applicant: KONINKL PHILIPS ELECTRONICS NV ,  POTZE WILLEM ,  FRISSEN PETRUS C M

Inventor： POTZE WILLEM ,  FRISSEN PETRUS C M

IPC: H02P6/00 ,  G03F7/20 ,  H02K41/02

CPC classification number: G03F7/70758 ,  G03F7/70725 ,  H02K41/03 ,  H02K2201/18 ,  H02P25/00 ,  H02P31/00

Abstract: For ensuring high-precision control of a planar motor (1) comprising a magnet (2) and j coils (3), j=l ...N, wherein currents T7 can flow through the coils (3) such that a force and a moment are generated that interact with the magnet (2), it has been proposed to determine force and moment needed to change the relative position of magnet (2) and coils from a present position to a desired position, and then to determine the currents T7 necessary for generating this force and moment in the computing means (43) of the control unit (4) of the electric motor (1). The coil currents are then regulated accordingly with regulating means (44). The relative position of magnet (2) and coils (3) is measured with measuring means (5) and fed into the first input means (41) of the control unit (4).

Abstract translation: 为了确保包括磁体（2）和j个线圈（3）的平面电动机（1）的高精度控制，j = 1 ... N，其中电流T7可以流过线圈（3），使得 产生与磁体（2）相互作用的时刻，已经提出了确定将磁体（2）和线圈从当前位置改变到期望位置所需的力和力矩，然后确定电流 T7用于在电动机（1）的控制单元（4）的计算装置（43）中产生该力和力矩。 然后用调节装置（44）相应地调节线圈电流。 用测量装置（5）测量磁体（2）和线圈（3）的相对位置，并送入控制单元（4）的第一输入装置（41）。

公开(公告)号：WO2009083891A2

公开(公告)日：2009-07-09

申请号：PCT/IB2008055486

申请日：2008-12-22

Applicant: KONINKL PHILIPS ELECTRONICS NV ,  FRISSEN PETRUS C M ,  JANSEN GERARDUS L M

Inventor： FRISSEN PETRUS C M ,  JANSEN GERARDUS L M

CPC classification number: H02P6/006 ,  H02K9/00 ,  H02K11/225 ,  H02K11/33 ,  H02K41/031 ,  H02K2201/18 ,  H02K2213/12

Abstract: An inverted planar motor employ a magnetic displacement device (10), and a coil actuator (20) magnetically interactive with the magnetic displacement device (10). The coil actuator (20) includes an electric coil (21) and a current amplifier (26) switchable between a K-factor measuring mode and a current measuring mode. The K-factor measuring mode includes current amplifier (26) preventing a flow of current through the electric coil (21) to facilitate a measurement of an electro motive force voltage (VEMF) indicative of a K- factor of the electric coil (21). The current measuring mode includes current amplifier (26) controlling a flow of current through the electric coil (21) and a current sensor (27) facilitating a measurement of the flow of current through the electric coil (21). The coil actuator (20) further includes a primary cooling body (25) having current sensor (27) disposed therein to stabilize a current measuring temperature of the current sensor (27).

Abstract translation: 倒置平面电动机采用磁位移装置（10）和与磁位移装置（10）磁性交互的线圈致动器（20）。 线圈致动器（20）包括可在K因子测量模式和电流测量模式之间切换的电线圈（21）和电流放大器（26）。 K因子测量模式包括电流放大器（26），其防止电流流过电线圈（21），以便于测量表示电线圈（21）的K因子的电动力电压（VEMF） 。 电流测量模式包括控制通过电线圈（21）的电流的电流放大器（26）和便于测量通过电线圈（21）的电流的电流传感器（27）。 线圈致动器（20）还包括具有设置在其中的电流传感器（27）的主冷却体（25），用于稳定电流传感器（27）的电流测量温度。

公开(公告)号：WO2006077511A1

公开(公告)日：2006-07-27

申请号：PCT/IB2006/050133

申请日：2006-01-13

Applicant: KONINKLIJKE PHILIPS ELECTRONICS N.V. ,  COMPTER, Johan, C. ,  FRISSEN, Petrus, C., M. ,  TABOR, Rob ,  VAN GAAL, Frans ,  EGGINK, Hendrik, J.

Inventor： COMPTER, Johan, C. ,  FRISSEN, Petrus, C., M. ,  TABOR, Rob ,  VAN GAAL, Frans ,  EGGINK, Hendrik, J.

IPC: H02K41/03 ,  H02K5/20

CPC classification number: H02K41/031 ,  H02K5/20 ,  H02K2201/18

Abstract: Coil assemblies (2) of electric motors (1) produce heat that can be a disadvantage when needing the electric motor (1) for high precision positioning applications. To reduce the negative impact of the heat, the coils (26a, 26b, 26c) are arranged in an internally cooled housing (21). The housing (21) has an outermost layer (25) at least on the side lacing the magnet assembly (3) of the electric motor (1), the outermost layer (25) being made of low or non-electrically conductive, non-magnetic or nearly non-magnetic material. The outermost layer (25) prevents heat radiation to the environment.

Abstract translation: 电动机（1）的线圈组件（2）产生热量，当需要电动机（1）用于高精度定位应用时，这可能是一个缺点。 为了减少热的负面影响，线圈（26a，26b，26c）布置在内部冷却的壳体（21）中。 壳体（21）至少在装在电动机（1）的磁体组件（3）的一侧上具有最外层（25），最外层（25）由低或非导电， 磁性或近乎非磁性的材料。 最外层（25）防止对环境的热辐射。