Abstract:
A directional solidification furnace comprises a crucible assembly including a crucible for containing a melt having walls and a base with an opening therein, a crucible support for supporting the crucible, and a lid covering the crucible. A plate is received in the opening in the base. The plate has a higher thermal conductivity than that of the base. The base can include a composite having an additive such that the composite base has a higher thermal conductivity than a comparable without the additive.
Abstract:
Methods for producing multicrystalline silicon ingots by use of a Czochralski-type crystal puller and pulling assemblies that include a plurality of seed crystals for pulling multicrystalline silicon ingots.
Abstract:
Methods for preparing a melt from silicon powder for use in growing a single crystal or polycrystalline silicon ingot in accordance with the Czochralski method that include removal of silicon oxides from the powder; application of a vacuum to remove air and other oxidizing gases; controlling the position of the charge relative to the heater during and after melting of the powder and maintaining the charge above its melting temperature for a period of time to allow oxides to dissolve; and use of a removable spacer between the crucible sidewall and the silicon powder charge to reduce oxides and silicon bridging.
Abstract:
A method of continuously measuring an elevation and shape of an unmelted polycrystalline silicon island during a silicon meltdown process. The method comprises projecting a focused bright light on the silicon island to produce a bright dot on the silicon island. The method also includes electronically determining an elevation and a shape of the silicon island by tracking the bright dot during the meltdown process.
Abstract:
A method for melting granular polysilicon in a crucible to reduce silicon splatter includes melting a quantity of polysilicon in the crucible at a first pressure and a first argon flow rate to the crucible to form molten silicon, increasing pressure from the first pressure to a second pressure, and increasing the first argon flow rate to a second argon flow rate. The method also includes supplying granular polysilicon into the crucible at the second pressure and the second argon flow rate and decreasing the pressure to a pressure less than the second pressure and decreasing the argon flow rate to an argon flow rate less than the second argon flow rate after supplying the granular polysilicon into the crucible.
Abstract:
Three-dimensional measurement of a crystal being pulled from a crucible is described. A first camera captures a first image of the crystal on a first image plane and a second camera captures a second image of the crystal on a second image plane. A mathematical model of a crystal during crystal growth is generated. The model includes a plurality of model sample points. A crystal growth feature is detected within the first image and the second image. A first error value is determined by comparing the model to the at least one crystal growth feature within the first image and a second error value is determined by comparing the model to the at least one crystal growth feature within the second image. An estimated 3-D metrology value associated with the at least one crystal growth feature is generated by adjusting the mathematical model to minimize the determined first error value and the determined second error value.
Abstract:
A directional solidification furnace includes a crucible for holding molten silicon and a lid covering the crucible and forming an enclosure over the molten silicon. The crucible also includes an inlet in the lid for introducing inert gas above the molten silicon to inhibit contamination of the molten silicon.
Abstract:
Silicon nitride coated crucibles for holding melted semiconductor material and for use in preparing multicrystalline silicon ingots by a directional solidification process; methods for coating crucibles; methods for preparing silicon ingots and wafers; compositions for coating crucibles and silicon ingots and wafers with a low oxygen content.
Abstract:
Silicon nitride coated crucibles for holding melted semiconductor material and for use in preparing multicrystalline silicon ingots by a directional solidification process; methods for coating crucibles; methods for preparing silicon ingots and wafers; compositions for coating crucibles and silicon ingots and wafers with a low oxygen content.
Abstract:
Silicon nitride coated crucibles for holding melted semiconductor material and for use in preparing multicrystalline silicon ingots by a directional solidification process; methods for coating crucibles; methods for preparing silicon ingots and wafers; compositions for coating crucibles and silicon ingots and wafers with a low oxygen content.