公开(公告)号：WO2013023092A2

公开(公告)日：2013-02-14

申请号：PCT/US2012/050196

申请日：2012-08-09

Applicant: APPLIED MATERIALS, INC ,  ENGLHARDT, Eric A. ,  GILJUM, Richard ,  HUDGENS, Jeffrey C. ,  KOGAN, Igor G. ,  RICE, Michael Robert ,  KOSHTI, Sushant S.

Inventor： ENGLHARDT, Eric A. ,  GILJUM, Richard ,  HUDGENS, Jeffrey C. ,  KOGAN, Igor G. ,  RICE, Michael Robert ,  KOSHTI, Sushant S.

IPC: H01L21/677 ,  B65G49/07 ,  B25J9/04 ,  H01L21/02

CPC classification number: H01L21/67184 ,  H01L21/67109 ,  H01L21/67115 ,  H01L21/67167 ,  H01L21/67178 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/68742

Abstract: Substrate transport systems, apparatus, and methods are described. In one aspect, the systems are disclosed having vertically stacked transfer chamber bodies. In one embodiment, a common robot apparatus services process chambers or load lock chambers coupled to upper and lower transfer chamber bodies. In another embodiment, separate robot apparatus service the process chambers and/or load lock chambers coupled to upper and lower transfer chamber bodies, and an elevator apparatus transfers the substrates between the various elevations. Degassing apparatus are described, as are numerous other aspects.

Abstract translation: 描述了基板传送系统，设备和方法。 在一个方面，公开了具有垂直堆叠的传送室主体的系统。 在一个实施例中，常见的机器人设备服务于耦合到上部和下部传输室主体的处理室或负载锁定室。 在另一个实施例中，分离的机器人设备服务于联接至上部和下部传送室主体的处理室和/或负载锁定室，并且电梯设备在各种高度之间传送基板。 描述了脱气装置，以及许多其他方面。

公开(公告)号：WO2013023092A3

公开(公告)日：2013-04-04

申请号：PCT/US2012050196

申请日：2012-08-09

Applicant: APPLIED MATERIALS INC ,  ENGLHARDT ERIC A ,  GILJUM RICHARD ,  HUDGENS JEFFREY C ,  KOGAN IGOR G ,  RICE MICHAEL ROBERT ,  KOSHTI SUSHANT S

Inventor： ENGLHARDT ERIC A ,  GILJUM RICHARD ,  HUDGENS JEFFREY C ,  KOGAN IGOR G ,  RICE MICHAEL ROBERT ,  KOSHTI SUSHANT S

IPC: H01L21/677 ,  B25J9/04 ,  B65G49/07 ,  H01L21/02

CPC classification number: H01L21/67184 ,  H01L21/67109 ,  H01L21/67115 ,  H01L21/67167 ,  H01L21/67178 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67742 ,  H01L21/67745 ,  H01L21/68742

Abstract: Substrate transport systems, apparatus, and methods are described. In one aspect, the systems are disclosed having vertically stacked transfer chamber bodies. In one embodiment, a common robot apparatus services process chambers or load lock chambers coupled to upper and lower transfer chamber bodies. In another embodiment, separate robot apparatus service the process chambers and/or load lock chambers coupled to upper and lower transfer chamber bodies, and an elevator apparatus transfers the substrates between the various elevations. Degassing apparatus are described, as are numerous other aspects.

Abstract translation: 描述了基底输送系统，装置和方法。 在一个方面，公开了具有垂直堆叠的传送室主体的系统。 在一个实施例中，常见的机器人装置服务处理室或联接到上部和下部传送室主体的加载锁定室。 在另一个实施例中，分离的机器人装置服务于联接到上传送室主体和下传送室主体的处理室和/或加载锁定室，并且电梯装置在不同高度之间传送基板。 除了脱气装置之外，还描述了许多其它方面。