公开(公告)号：WO2006116428A3

公开(公告)日：2006-11-02

申请号：PCT/US2006/015679

申请日：2006-04-25

Applicant: ADVANCED TECHNOLOGY MATERIALS, INC. ,  WANG, Weihua ,  BERNHARD, David ,  BAUM, Thomas, H. ,  MIKKELSEN, Kirk ,  MLYNAR, Greg ,  HOVINEN, Minna ,  TOM, Glenn, M. ,  O'DOUGHERTY, Kevin, T. ,  YAN, Hongwei

Inventor： WANG, Weihua ,  BERNHARD, David ,  BAUM, Thomas, H. ,  MIKKELSEN, Kirk ,  MLYNAR, Greg ,  HOVINEN, Minna ,  TOM, Glenn, M. ,  O'DOUGHERTY, Kevin, T. ,  YAN, Hongwei

IPC: B65D35/22

Abstract: A fluid storage and dispensing package, including a rigid overpack defining an interior volume, a liner disposed in the interior volume of the overpack to hold liquid medium, and a positional fixation structure arranged to restrain movement of the liner when holding liquid medium, wherein the positional fixation structure is not in contact with liquid medium when liquid medium is contained in the liner. Such package, and associated packaging method, preferably involves zero-headspace containment of the liquid or liquid-containing material, and is particularly advantageous in application to storage and dispensing of film-forming colloidal silica-based chemical mechanical polishing (CMP) compositions, with respect to suppressing the presence of microbubbles and unwanted particles.

公开(公告)号：WO2006116428A2

公开(公告)日：2006-11-02

申请号：PCT/US2006015679

申请日：2006-04-25

Applicant: ADVANCED TECH MATERIALS ,  WANG WEIHUA ,  BERNHARD DAVID ,  BAUM THOMAS H ,  MIKKELSEN KIRK ,  MLYNAR GREG ,  HOVINEN MINNA ,  TOM GLENN M ,  O'DOUGHERTY KEVIN T ,  YAN HONGWEI

Inventor： WANG WEIHUA ,  BERNHARD DAVID ,  BAUM THOMAS H ,  MIKKELSEN KIRK ,  MLYNAR GREG ,  HOVINEN MINNA ,  TOM GLENN M ,  O'DOUGHERTY KEVIN T ,  YAN HONGWEI

IPC: B01J14/00

CPC classification number: B65D77/06 ,  B65D81/052 ,  B65D81/07 ,  B67D7/0261

Abstract: A fluid storage and dispensing package, including a rigid overpack defining an interior volume, a liner disposed in the interior volume of the overpack to hold liquid medium, and a positional fixation structure arranged to restrain movement of the liner when holding liquid medium, wherein the positional fixation structure is not in contact with liquid medium when liquid medium is contained in the liner. Such package, and associated packaging method, preferably involves zero-headspace containment of the liquid or liquid-containing material, and is particularly advantageous in application to storage and dispensing of film-forming colloidal silica-based chemical mechanical polishing (CMP) compositions, with respect to suppressing the presence of microbubbles and unwanted particles.

Abstract translation: 流体存储和分配包装，包括限定内部容积的刚性外包装，设置在外包装的内部容积中以保持液体介质的衬垫，以及布置成在保持液体介质时限制衬垫的运动的位置固定结构，其中 当液体介质包含在衬垫中时，位置固定结构不与液体介质接触。 这种包装和相关的包装方法优选地涉及液体或含液体材料的零顶部空间容纳，并且在应用于成膜胶体二氧化硅基化学机械抛光（CMP）组合物的储存和分配中是特别有利的， 关于抑制微泡和不需要的颗粒的存在。