Abstract:
A method of imaging a sample with a charged particle beam device, comprising: determining a first focusing strength of an objective lens of the charged particle beam device, the first focusing strength being adapted to focus a charged particle beam on a first surface region of the sample; determining a first focal subrange of a plurality of focal subranges such that the first focusing strength is within the first focal subrange, wherein the plurality of focal subranges is associated with a set of values of a calibration parameter; determining a first value of the calibration parameter, the first value being associated with the first focal subrange; and imaging the first surface region with the first value.
Abstract:
According to an embodiment, a method for automated critical dimension measurement on a substrate for display manufacturing is provided. The method includes scanning a first field of view having a first size with a charged particle beam to obtain a first image having a first resolution of a first portion of the substrate for display manufacturing; determining a pattern within the first image, the pattern having a first position; scanning a second field of view with the charged particle beam to obtain a second image of a second portion of the substrate, the second field of view has a second size smaller than the first size and has a second position provided relative to the first position, the second image has a second.
Abstract:
According to one aspect of the present disclosure, a method and an apparatus for processing a substrate (10), e.g. a display element, are described. The substrate has an electrically insulating back side (12) and a front side (14) opposite the electrically insulating back side. The method includes: coating the electrically insulating back side (12) with a conductive layer (20) to provide a conductive back side (22), connecting the conductive back side with ground (25) or with a reference potential, and processing of the substrate, particularly of the front side and/or of one or more electronic devices (32) formed on the front side. Further, an apparatus for processing of a substrate is described. According to a further aspect, a display element including a substrate (10) having an electrically insulating back side coated with a conductive layer (20) is described.
Abstract:
An apparatus for inspecting a large area substrate for display manufacturing is described. The apparatus includes a vacuum chamber; a substrate support arranged in the vacuum chamber, wherein the substrate support is configured for supporting the large area substrate for display manufacturing; and a first imaging charged particle beam microscope configured for generating a charged particle beam for inspecting a substrate supported by the substrate support, wherein the first imaging charged particle beam microscope includes a retarding field lens component of an objective lens.
Abstract:
Provided herein are antibodies and methods of using the antibodies to treat, prevent, modulate, attenuate and diagnose iron-related disorders.
Abstract:
Provided herein are antibodies and methods of using the antibodies to treat, prevent, modulate, attenuate and diagnose iron-related disorders.
Abstract:
A voltage compensation assembly adapted for apparatus having a prober for contacting th electronic elements on a substrate is described. The voltage compensation assembly includes a controller connected to the prober and adapted for active voltage compensation; and voltage measuring unit connected to the controller and for measuring a voltage on th substrate.
Abstract:
The invention concerns the identification and use of neogenin receptor-binding domains of members of the repulsive guidance molecule (RGM) protein family as well as polypeptide fragments derived therefrom. The inventive domains, i.e. peptide fragments are suited as agents for the active or passive immunization of individuals as well as diagnostic and therapeutic agents for use with diseases or pathological conditions in whose origin or progression, a member of the RGM family and a cellular receptor assigned to this molecule are involved. The invention also concerns monoclonal and polyclonal antibodies directed against the inventive binding domains and against the polypeptides derived therefrom, and to method for producing the inventive domains, polypeptides and antibodies.