公开(公告)号：WO2010008924A4

公开(公告)日：2010-06-24

申请号：PCT/US2009049011

申请日：2009-06-29

Applicant: CARL ZEISS SMT INC ,  NOTTE JOHN A IV ,  PERCIVAL RANDALL G ,  SANFORD COLIN A ,  GROHOLSKI ALEXANDER

Inventor： NOTTE JOHN A IV ,  PERCIVAL RANDALL G ,  SANFORD COLIN A ,  GROHOLSKI ALEXANDER

IPC: H01J37/08 ,  H01J27/26

CPC classification number: H01J37/08 ,  H01J27/024 ,  H01J2237/061 ,  H01J2237/0805 ,  H01J2237/0807

Abstract: Disclosed are charged particle systems that include a tip (504), at least one gas inlet (512a-f) configured to supply gas particles to the tip, and a element (506) having a curved surface (514) positioned to adsorb un-ionized gas particles (182a-d), and to direct desorbing gas particles to propagate toward the tip. The charged particle systems can include a field shunt connected to the tip, and configured to adjust an electric field at an apex of the tip.

Abstract translation: 公开了一种带电粒子系统，其包括尖端（504），被配置为向尖端供应气体颗粒的至少一个气体入口（512a-f）和具有弯曲表面（514）的元件（506） 离子化气体颗粒（182a-d），并引导解吸气体颗粒向尖端传播。 带电粒子系统可以包括连接到尖端的场分流器，并且被配置为调整尖端的顶点处的电场。

公开(公告)号：WO2010008924A2

公开(公告)日：2010-01-21

申请号：PCT/US2009049011

申请日：2009-06-29

Applicant: CARL ZEISS SMT INC ,  NOTTE JOHN A IV ,  PERCIVAL RANDALL G ,  SANFORD COLIN A ,  GROHOLSKI ALEXANDER

Inventor： NOTTE JOHN A IV ,  PERCIVAL RANDALL G ,  SANFORD COLIN A ,  GROHOLSKI ALEXANDER

IPC: H01J37/08 ,  H01J27/26

CPC classification number: H01J37/08 ,  H01J27/024 ,  H01J2237/061 ,  H01J2237/0805 ,  H01J2237/0807

Abstract: Disclosed are charged particle systems that include a tip, at least one gas inlet configured to supply gas particles to the tip, and a element having a curved surface positioned to adsorb un-ionized gas particles, and to direct desorbing gas particles to propagate toward the tip. The charged particle systems can include a field shunt connected to the tip, and configured to adjust an electric field at an apex of the tip.

Abstract translation: 公开了一种带电粒子系统，其包括尖端，至少一个气体入口被配置为向尖端供应气体颗粒，以及具有定位成吸附未离子化气体颗粒的弯曲表面的元件，并且引导解吸气体颗粒向着 小费。 带电粒子系统可以包括连接到尖端的场分流器，并且被配置为调整尖端的顶点处的电场。

公开(公告)号：WO2007067328A3

公开(公告)日：2008-02-28

申请号：PCT/US2006044729

申请日：2006-11-15

Applicant: ALIS CORP ,  WARD BILLY W ,  NOTTE JOHN A IV ,  FARKAS III LOUIS S ,  PERCIVAL RANDALL G ,  HILL RAYMOND

Inventor： WARD BILLY W ,  NOTTE JOHN A IV ,  FARKAS III LOUIS S ,  PERCIVAL RANDALL G ,  HILL RAYMOND

IPC: H01J37/28 ,  B81B1/00 ,  G01N23/225 ,  G12B21/02 ,  H01J9/02 ,  H01J27/26 ,  H01J37/08 ,  H01J37/252 ,  H01J37/317

CPC classification number: H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

Abstract: Ion sources, systems and methods are disclosed.

Abstract translation: 公开了离子源，系统和方法。

公开(公告)号：WO2007067317A3

公开(公告)日：2007-08-16

申请号：PCT/US2006044441

申请日：2006-11-15

Applicant: ALIS CORP ,  WARD BILLY W ,  NOTTE IV JOHN A ,  FARKAS LOUIS S III ,  PERCIVAL RANDALL G ,  HILL RAYMOND ,  MARKWORT LARS ,  ADERHOLD DIRK

Inventor： WARD BILLY W ,  NOTTE IV JOHN A ,  FARKAS LOUIS S III ,  PERCIVAL RANDALL G ,  HILL RAYMOND ,  MARKWORT LARS ,  ADERHOLD DIRK

IPC: H01J37/28 ,  B81B1/00 ,  G01N23/225 ,  G12B21/02 ,  H01J9/02 ,  H01J27/26 ,  H01J37/08 ,  H01J37/252 ,  H01J37/305 ,  H01J37/317

CPC classification number: H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

Abstract: Ion sources, systems and methods are disclosed.

公开(公告)号：WO2007067318A2

公开(公告)日：2007-06-14

申请号：PCT/US2006044442

申请日：2006-11-15

Applicant: ALIS CORP ,  WARD BILLY W ,  NOTTE IV JOHN A ,  FARKAS LOUIS S III ,  PERCIVAL RANDALL G ,  HILL RAYMOND ,  GROHOLSKI ALEXANDER ,  COMUNALE RICHARD

Inventor： WARD BILLY W ,  NOTTE IV JOHN A ,  FARKAS LOUIS S III ,  PERCIVAL RANDALL G ,  HILL RAYMOND ,  GROHOLSKI ALEXANDER ,  COMUNALE RICHARD

IPC: H01J9/02 ,  B81B1/00 ,  G01N23/225 ,  G12B21/02 ,  H01J27/26 ,  H01J37/08 ,  H01J37/252 ,  H01J37/26 ,  H01J37/28 ,  H01J37/305 ,  H01J37/317

CPC classification number: H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

Abstract: Ion sources, systems and methods are disclosed.

Abstract translation: 公开了离子源，系统和方法。

公开(公告)号：WO2007067311A3

公开(公告)日：2007-06-14

申请号：PCT/US2006/044339

申请日：2006-11-15

Applicant: ALIS CORPORATION ,  WARD, Billy W. ,  NOTTE, John A., IV ,  FARKAS III, Louis, S. ,  PERCIVAL, Randall G. ,  HILL, Raymond ,  EDINGER, Klaus ,  MARKWORT, Lars ,  ADERHOLD, Dirk ,  MANTZ, Ulrich

Inventor： WARD, Billy W. ,  NOTTE, John A., IV ,  FARKAS III, Louis, S. ,  PERCIVAL, Randall G. ,  HILL, Raymond ,  EDINGER, Klaus ,  MARKWORT, Lars ,  ADERHOLD, Dirk ,  MANTZ, Ulrich

IPC: H01J37/28 ,  H01J9/02 ,  H01J37/08 ,  H01J37/252 ,  H01J37/305 ,  H01J37/317 ,  B81B1/00 ,  G01N23/225 ,  G12B21/02 ,  H01J27/26

Abstract: Ion sources, systems and methods are disclosed.

公开(公告)号：WO2007067315A3

公开(公告)日：2007-12-06

申请号：PCT/US2006044439

申请日：2006-11-15

Applicant: ALIS CORP ,  WARD BILLY W ,  NOTTE IV JOHN A ,  FARKAS III LOUIS S ,  PERCIVAL RANDALL G ,  HILL RAYMOND ,  GROHOLSKI ALEXANDER ,  COMUNALE RICHARD ,  MCVEY SHAWN ,  BIHR JOHANNES

Inventor： WARD BILLY W ,  NOTTE IV JOHN A ,  FARKAS III LOUIS S ,  PERCIVAL RANDALL G ,  HILL RAYMOND ,  GROHOLSKI ALEXANDER ,  COMUNALE RICHARD ,  MCVEY SHAWN ,  BIHR JOHANNES

IPC: H01J9/02 ,  B81B1/00 ,  G01N23/225 ,  G12B21/02 ,  H01J27/26 ,  H01J37/08 ,  H01J37/252 ,  H01J37/305 ,  H01J37/317

CPC classification number: H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

Abstract: Ion sources, systems and methods are disclosed.

公开(公告)号：WO2007067313A3

公开(公告)日：2007-09-07

申请号：PCT/US2006044388

申请日：2006-11-15

Applicant: ALIS CORP ,  WARD BILLY W ,  NOTTE IV JOHN A ,  FARKAS III LOUIS S ,  PERCIVAL RANDALL G ,  HILL RAYMOND ,  MANTZ ULRICH ,  STEIGERWALD MICHAEL

Inventor： WARD BILLY W ,  NOTTE IV JOHN A ,  FARKAS III LOUIS S ,  PERCIVAL RANDALL G ,  HILL RAYMOND ,  MANTZ ULRICH ,  STEIGERWALD MICHAEL

IPC: H01J9/02 ,  B81B1/00 ,  G01N23/225 ,  G12B21/02 ,  H01J27/26 ,  H01J37/08 ,  H01J37/252 ,  H01J37/28 ,  H01J37/305 ,  H01J37/317

CPC classification number: H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

Abstract: Ion sources, systems and methods are disclosed.

公开(公告)号：WO2007067328A2

公开(公告)日：2007-06-14

申请号：PCT/US2006/044729

申请日：2006-11-15

Applicant: ALIS CORPORATION ,  WARD, Billy W. ,  NOTTE, John, A., IV ,  FARKAS, Louis, S., III ,  PERCIVAL, Randall G. ,  HILL, Raymond

Inventor： WARD, Billy W. ,  NOTTE, John, A., IV ,  FARKAS, Louis, S., III ,  PERCIVAL, Randall G. ,  HILL, Raymond

CPC classification number: H01J9/02 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/28 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/024 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/20264 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/30477 ,  H01J2237/31737 ,  H01J2237/3174 ,  H01J2237/31755

Abstract: Ion sources, systems and methods are disclosed.

公开(公告)号：WO2010132265A3

公开(公告)日：2011-01-20

申请号：PCT/US2010033844

申请日：2010-05-06

Applicant: ZEISS CARL NTS LLC ,  WARD BILLY W ,  NOTTE JOHN A IV ,  PERCIVAL RANDALL

Inventor： WARD BILLY W ,  NOTTE JOHN A IV ,  PERCIVAL RANDALL

IPC: H01J37/08 ,  H01J37/28

CPC classification number: H01J37/28 ,  H01J37/08 ,  H01J2237/006 ,  H01J2237/038 ,  H01J2237/061 ,  H01J2237/0807

Abstract: Disclosed are systems (300) and methods for applying (304) a voltage gradient to a gas delivery system (310 - 316), delivering a gas through a length of the gas delivery system having the voltage gradient, the gas having a pressure-distance product of less than about 1x10-2 Torr-inches or greater than about 100 Torr-inches, and delivering the gas into a housing of an ion microscope, the housing including an emitter (208) and an extractor (214). (1 Torr-inch = 3,38 Pa m)

Abstract translation: 公开了一种系统（300）和用于向气体输送系统（310-316）应用（304）电压梯度的系统（300），将气体输送通过具有电压梯度的气体输送系统的长度，气体具有压力距离 产品小于约1×10 -2 Torr-英寸或大于约100托/英寸，并且将气体输送到离子显微镜的壳体中，壳体包括发射器（208）和提取器（214）。 （1Torr-inch = 3,38Pa m）