SCANNING CHARGED PARTICLE BEAMS
    4.
    发明申请
    SCANNING CHARGED PARTICLE BEAMS 审中-公开
    扫描带电粒子束

    公开(公告)号:WO2009077450A2

    公开(公告)日:2009-06-25

    申请号:PCT/EP2008/067419

    申请日:2008-12-12

    Abstract: Methods are disclosed that include exposing, in direct succession, portions of a surface of a sample to a charged particle beam, the portions of the surface of the sample forming a row in a first direction, the charged particle beam having an average spot size f at the surface of the sample, each portion being spaced from its neighboring portions by a distance of at least d in the first direction, and a ratio d/f being 2 or more.

    Abstract translation: 公开了一些方法,其包括将样本的表面的一部分直接连续地暴露于带电粒子束,样本表面的部分在第一方向上形成一排,带电的 在样本表面处具有平均光斑尺寸f的粒子束,每个部分与其相邻部分在第一方向上间隔至少d 1,并且 比率d / f为2或更大。

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