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公开(公告)号：WO2007067315A3
公开(公告)日：2007-12-06
申请号：PCT/US2006044439
申请日：2006-11-15
Applicant: ALIS CORP , WARD BILLY W , NOTTE IV JOHN A , FARKAS III LOUIS S , PERCIVAL RANDALL G , HILL RAYMOND , GROHOLSKI ALEXANDER , COMUNALE RICHARD , MCVEY SHAWN , BIHR JOHANNES
Inventor： WARD BILLY W , NOTTE IV JOHN A , FARKAS III LOUIS S , PERCIVAL RANDALL G , HILL RAYMOND , GROHOLSKI ALEXANDER , COMUNALE RICHARD , MCVEY SHAWN , BIHR JOHANNES
IPC: H01J9/02 , B81B1/00 , G01N23/225 , G12B21/02 , H01J27/26 , H01J37/08 , H01J37/252 , H01J37/305 , H01J37/317
CPC classification number: H01J9/02 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/024 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/20264 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/30477 , H01J2237/31737 , H01J2237/3174 , H01J2237/31755
Abstract: Ion sources, systems and methods are disclosed.
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公开(公告)号：WO2007067310A2
公开(公告)日：2007-06-14
申请号：PCT/US2006/044338
申请日：2006-11-15
Applicant: ALIS CORPORATION , WARD, Billy, W. , NOTTE, John, A., IV , FARKAS, Louis, S., III , PERCIVAL, Randall, G. , HILL, Raymond , GROHOLSKI, Alexander , COMUNALE, Richard
Inventor： WARD, Billy, W. , NOTTE, John, A., IV , FARKAS, Louis, S., III , PERCIVAL, Randall, G. , HILL, Raymond , GROHOLSKI, Alexander , COMUNALE, Richard
IPC: H01J9/02 , H01J37/08 , H01J37/252 , H01J37/305 , H01J37/317 , B81B1/00 , G01N23/225 , G12B21/02 , H01J27/26
CPC classification number: H01J9/02 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/024 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/20264 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/30477 , H01J2237/31737 , H01J2237/3174 , H01J2237/31755
Abstract: Ion sources, systems and methods are disclosed.
Abstract translation: 公开了离子源，系统和方法。
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公开(公告)号：WO2010147872A4
公开(公告)日：2011-12-15
申请号：PCT/US2010038459
申请日：2010-06-14
Applicant: ZEISS CARL NTS LLC , COMMUNALE RICHARD , BARRISS LOUISE , MCVEY SHAWN , DIMANNA MARK D , GROHOLSKI ALEXANDER , SANFORD COLIN A , BASSETT BRIAN M , NOTTE IV JOHN A
Inventor： COMMUNALE RICHARD , BARRISS LOUISE , MCVEY SHAWN , DIMANNA MARK D , GROHOLSKI ALEXANDER , SANFORD COLIN A , BASSETT BRIAN M , NOTTE IV JOHN A
CPC classification number: F17C13/02 , F25D3/12 , F25D19/006 , H01J37/08 , H01J37/28 , H01J2237/002 , H01J2237/0807 , H01J2237/2001
Abstract: Cooled charged particle sources and methods are disclosed. In some embodiments, a charged particle source is thermally coupled to a solid cryogen, such as solid nitrogen. The thermal coupling can be design to provide good thermal conductivity to maintain the charged particle source at a desirably low temperature.
Abstract translation: 公开了冷却带电粒子源和方法。 在一些实施例中，带电粒子源与固体致冷剂例如固体氮热耦合。 热耦合可以被设计成提供良好的导热性以将带电粒子源保持在理想的低温下。
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公开(公告)号：WO2009151458A1
公开(公告)日：2009-12-17
申请号：PCT/US2008/066933
申请日：2008-06-13
Applicant: CARL ZEISS SMT, INC. , COMUNALE, Richard , GROHOLSKI, Alexander , NOTTE IV, John A. , WARD, Billy W. , PERCIVAL, Randall
Inventor： COMUNALE, Richard , GROHOLSKI, Alexander , NOTTE IV, John A. , WARD, Billy W. , PERCIVAL, Randall
IPC: H01J37/20 , H01J37/26 , H01J37/28 , H01J37/304 , H01J37/305
CPC classification number: H01J37/304 , H01J37/20 , H01J37/265 , H01J37/28 , H01J37/3056 , H01J2237/0216 , H01J2237/0805 , H01J2237/0807 , H01J2237/2007 , H01J2237/204 , H01J2237/2482
Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).
Abstract translation: 公开了离子源，系统和方法。 在一些实施例中，离子源，系统和方法可以表现出相对较少的不期望的振动和/或可以充分地抑制不期望的振动。 这可以提高性能（例如，增加可靠性，稳定性等）。 在某些实施方案中，离子源，系统和方法可以增强制备具有期望物理属性的尖端（例如尖端顶点上的原子数）的能力。 这可以提高性能（例如，增加可靠性，稳定性等）。
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公开(公告)号：WO2007067296A8
公开(公告)日：2008-05-29
申请号：PCT/US2006043621
申请日：2006-11-08
Applicant: ALIS CORP , WARD BILLY W , NOTTE JOHN A IV , MCVEY SHAWN , FARKAS LOUIS S III , PERCIVAL RANDALL G , GROHOLSKI ALEXANDER , COMUNALE RICHARD
Inventor： WARD BILLY W , NOTTE JOHN A IV , MCVEY SHAWN , FARKAS LOUIS S III , PERCIVAL RANDALL G , GROHOLSKI ALEXANDER , COMUNALE RICHARD
IPC: H01J37/28
CPC classification number: H01J9/02 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/024 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/20264 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/30477 , H01J2237/31737 , H01J2237/3174 , H01J2237/31755
Abstract: The present invention refers to a method that comprises the following steps: Providing an electrically conductive tip with a terminal shelf which has between three and twenty atoms, generating a first ion beam by interacting a gas with the electrically conductive tip, providing an ion optical system, eliminating by the ion optical system some of the ions in the first ion beam to generate a second ion beam comprising ions 70% or more of which are generated via interaction of the gas with one atom of the terminal shelf of the electrically conductive tip, and interacting the second ion beam with an activating gas to promote a chemical reaction at a surface of a sample. The figure shows a gas field ion microscope system (100).
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Patent Agency Ranking
公开(公告)号：WO2007067310A3
公开(公告)日：2008-03-13
申请号：PCT/US2006044338
申请日：2006-11-15
Applicant: ALIS CORP , WARD BILLY W , NOTTE JOHN A IV , FARKAS III LOUIS S , PERCIVAL RANDALL G , HILL RAYMOND , GROHOLSKI ALEXANDER , COMUNALE RICHARD
Inventor： WARD BILLY W , NOTTE JOHN A IV , FARKAS III LOUIS S , PERCIVAL RANDALL G , HILL RAYMOND , GROHOLSKI ALEXANDER , COMUNALE RICHARD
IPC: H01J9/02 , B81B1/00 , G01N23/225 , G12B21/02 , H01J27/26 , H01J37/08 , H01J37/252 , H01J37/305 , H01J37/317
CPC classification number: H01J9/02 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/024 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/20264 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/30477 , H01J2237/31737 , H01J2237/3174 , H01J2237/31755
Abstract: Ion sources, systems and methods are disclosed.
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公开(公告)号：WO2010147872A3
公开(公告)日：2011-10-20
申请号：PCT/US2010038459
申请日：2010-06-14
Applicant: ZEISS CARL NTS LLC , COMMUNALE RICHARD , BARRISS LOUISE , MCVEY SHAWN , DIMANNA MARK D , GROHOLSKI ALEXANDER , SANFORD COLIN A , BASSETT BRIAN M , NOTTE IV JOHN A
Inventor： COMMUNALE RICHARD , BARRISS LOUISE , MCVEY SHAWN , DIMANNA MARK D , GROHOLSKI ALEXANDER , SANFORD COLIN A , BASSETT BRIAN M , NOTTE IV JOHN A
CPC classification number: F17C13/02 , F25D3/12 , F25D19/006 , H01J37/08 , H01J37/28 , H01J2237/002 , H01J2237/0807 , H01J2237/2001
Abstract: Cooled charged particle sources and methods are disclosed. In some embodiments, a charged particle source is thermally coupled to a solid cryogen, such as solid nitrogen. The thermal coupling can be design to provide good thermal conductivity to maintain the charged particle source at a desirably low temperature.
Abstract translation: 公开了冷却的带电粒子源和方法。 在一些实施方案中，带电粒子源与固体冷冻剂如固体氮热偶合。 热耦合可以设计成提供良好的导热性，以将带电粒子源保持在期望的低温。
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公开(公告)号：WO2010008924A4
公开(公告)日：2010-06-24
申请号：PCT/US2009049011
申请日：2009-06-29
Applicant: CARL ZEISS SMT INC , NOTTE JOHN A IV , PERCIVAL RANDALL G , SANFORD COLIN A , GROHOLSKI ALEXANDER
Inventor： NOTTE JOHN A IV , PERCIVAL RANDALL G , SANFORD COLIN A , GROHOLSKI ALEXANDER
CPC classification number: H01J37/08 , H01J27/024 , H01J2237/061 , H01J2237/0805 , H01J2237/0807
Abstract: Disclosed are charged particle systems that include a tip (504), at least one gas inlet (512a-f) configured to supply gas particles to the tip, and a element (506) having a curved surface (514) positioned to adsorb un-ionized gas particles (182a-d), and to direct desorbing gas particles to propagate toward the tip. The charged particle systems can include a field shunt connected to the tip, and configured to adjust an electric field at an apex of the tip.
Abstract translation: 公开了一种带电粒子系统，其包括尖端（504），被配置为向尖端供应气体颗粒的至少一个气体入口（512a-f）和具有弯曲表面（514）的元件（506） 离子化气体颗粒（182a-d），并引导解吸气体颗粒向尖端传播。 带电粒子系统可以包括连接到尖端的场分流器，并且被配置为调整尖端的顶点处的电场。
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公开(公告)号：WO2010008924A2
公开(公告)日：2010-01-21
申请号：PCT/US2009049011
申请日：2009-06-29
Applicant: CARL ZEISS SMT INC , NOTTE JOHN A IV , PERCIVAL RANDALL G , SANFORD COLIN A , GROHOLSKI ALEXANDER
Inventor： NOTTE JOHN A IV , PERCIVAL RANDALL G , SANFORD COLIN A , GROHOLSKI ALEXANDER
CPC classification number: H01J37/08 , H01J27/024 , H01J2237/061 , H01J2237/0805 , H01J2237/0807
Abstract: Disclosed are charged particle systems that include a tip, at least one gas inlet configured to supply gas particles to the tip, and a element having a curved surface positioned to adsorb un-ionized gas particles, and to direct desorbing gas particles to propagate toward the tip. The charged particle systems can include a field shunt connected to the tip, and configured to adjust an electric field at an apex of the tip.
Abstract translation: 公开了一种带电粒子系统，其包括尖端，至少一个气体入口被配置为向尖端供应气体颗粒，以及具有定位成吸附未离子化气体颗粒的弯曲表面的元件，并且引导解吸气体颗粒向着 小费。 带电粒子系统可以包括连接到尖端的场分流器，并且被配置为调整尖端的顶点处的电场。
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公开(公告)号：WO2007067318A2
公开(公告)日：2007-06-14
申请号：PCT/US2006044442
申请日：2006-11-15
Applicant: ALIS CORP , WARD BILLY W , NOTTE IV JOHN A , FARKAS LOUIS S III , PERCIVAL RANDALL G , HILL RAYMOND , GROHOLSKI ALEXANDER , COMUNALE RICHARD
Inventor： WARD BILLY W , NOTTE IV JOHN A , FARKAS LOUIS S III , PERCIVAL RANDALL G , HILL RAYMOND , GROHOLSKI ALEXANDER , COMUNALE RICHARD
IPC: H01J9/02 , B81B1/00 , G01N23/225 , G12B21/02 , H01J27/26 , H01J37/08 , H01J37/252 , H01J37/26 , H01J37/28 , H01J37/305 , H01J37/317
CPC classification number: H01J9/02 , H01J37/08 , H01J37/20 , H01J37/252 , H01J37/28 , H01J37/3056 , H01J37/3174 , H01J2237/024 , H01J2237/0807 , H01J2237/202 , H01J2237/20228 , H01J2237/20264 , H01J2237/2566 , H01J2237/2623 , H01J2237/2812 , H01J2237/30438 , H01J2237/30477 , H01J2237/31737 , H01J2237/3174 , H01J2237/31755
Abstract: Ion sources, systems and methods are disclosed.
Abstract translation: 公开了离子源，系统和方法。
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