公开(公告)号：WO2007130630A2

公开(公告)日：2007-11-15

申请号：PCT/US2007/010929

申请日：2007-05-04

Applicant: LAM RESEARCH CORPORATION ,  YOON, Hyungsuk, Alexander ,  BAILEY, Andrew, D., III. ,  JASON, A., Ryder ,  WILCOXSON, Mark, H. ,  GASPARITSCH, Jeffrey, G. ,  RANDY Johnson ,  HOFFMANN, Stephan, P.

Inventor： YOON, Hyungsuk, Alexander ,  BAILEY, Andrew, D., III. ,  JASON, A., Ryder ,  WILCOXSON, Mark, H. ,  GASPARITSCH, Jeffrey, G. ,  RANDY Johnson ,  HOFFMANN, Stephan, P.

IPC: A47L9/06

CPC classification number: H01L21/67046 ,  Y10S134/902

Abstract: An apparatus, system and method for cleaning a substrate edge include a bristle brush unit that cleans bevel polymers deposited on substrate edges using frictional contact in the presence of cleaning chemistry. The bristle brush unit is made up of a plurality of outwardly extending vanes and is mounted on a rotating shaft. An abrasive material is distributed throughout and within the outwardly extending vanes of the bristle brush unit to provide the frictional contact. The bristle brush unit cleans the edge of the substrate by allowing frictional contact of the plurality of abrasive particles with the edge of the substrate in the presence of fluids, such as cleaning chemistry, to cut, rip and tear the bevel polymer from the edge of the substrate.

Abstract translation: 用于清洁基材边缘的装置，系统和方法包括刷毛刷单元，其在清洁化学品存在下使用摩擦接触来清洁沉积在基板边缘上的斜面聚合物。 刷毛单元由多个向外延伸的叶片组成，并安装在旋转轴上。 研磨材料分布在刷毛刷单元的向外延伸的叶片内部和内部，以提供摩擦接触。 刷毛刷单元通过在诸如清洁化学的流体存在下允许多个磨料颗粒与基材的边缘摩擦接触来清洁基材的边缘，以从斜面聚合物的边缘切割，撕裂和撕裂斜面聚合物 底物。

公开(公告)号：WO2007130630A3

公开(公告)日：2008-12-31

申请号：PCT/US2007010929

申请日：2007-05-04

Applicant: LAM RES CORP ,  YOON HYUNGSUK ALEXANDER ,  BAILEY ANDREW D III ,  JASON A RYDER ,  WILCOXSON MARK H ,  GASPARITSCH JEFFREY G ,  RANDY JOHNSON ,  HOFFMANN STEPHAN P

Inventor： YOON HYUNGSUK ALEXANDER ,  BAILEY ANDREW D III ,  JASON A RYDER ,  WILCOXSON MARK H ,  GASPARITSCH JEFFREY G ,  RANDY JOHNSON ,  HOFFMANN STEPHAN P

IPC: B08B11/02

CPC classification number: H01L21/67046 ,  Y10S134/902

Abstract: An apparatus, system and method for cleaning a substrate edge include a bristle brush unit that cleans bevel polymers deposited on substrate edges using frictional contact in the presence of cleaning chemistry. The bristle brush unit is made up of a plurality of outwardly extending vanes and is mounted on a rotating shaft. An abrasive material is distributed throughout and within the outwardly extending vanes of the bristle brush unit to provide the frictional contact. The bristle brush unit cleans the edge of the substrate by allowing frictional contact of the plurality of abrasive particles with the edge of the substrate in the presence of fluids, such as cleaning chemistry, to cut, rip and tear the bevel polymer from the edge of the substrate.

Abstract translation: 用于清洁基材边缘的装置，系统和方法包括刷毛刷单元，其在清洁化学品存在下使用摩擦接触来清洁沉积在基板边缘上的斜面聚合物。 刷毛单元由多个向外延伸的叶片组成，并安装在旋转轴上。 研磨材料分布在刷毛刷单元的向外延伸的叶片内部和内部，以提供摩擦接触。 刷毛刷单元通过在诸如清洁化学的流体存在下允许多个磨料颗粒与基材的边缘摩擦接触来清洁基材的边缘，以从斜面聚合物的边缘切割，撕裂和撕裂斜面聚合物 底物。