公开(公告)号：WO2004016672A2

公开(公告)日：2004-02-26

申请号：PCT/US0325912

申请日：2003-08-19

Applicant: RENSSELAER POLYTECH INST ,  SENKEVICH JOHN JOSEPH ,  YANG GUANGRONG ,  LU TOH-MING

Inventor： SENKEVICH JOHN JOSEPH ,  YANG GUANGRONG ,  LU TOH-MING

IPC: B05D7/24 ,  B32B1/00 ,  C09D165/00 ,  C09D165/04 ,  H01L21/312 ,  H01L21/768 ,  C08G61/02 ,  C23C16/30 ,  C23C16/56

CPC classification number: B05D1/60 ,  C08G61/025 ,  C08G2261/3424 ,  C09D165/00 ,  C09D165/04 ,  H01L21/312 ,  H01L21/76828 ,  H01L21/76829 ,  Y10T428/24959 ,  Y10T428/26 ,  Y10T428/265 ,  Y10T428/31678

Abstract: The present invention relates to a method for forming a conformal coating having a reactive surface. In the method, an ultrathin layer composed of a polymer having repeating units derived from unsubstituted p-xylylene, substituted p-xylylene, phenylene vinylene, phenylene ethynylene, 1,4-methylene naphthalene, 2,6-methylene naphthalene, 1,4-vinylene naphthalene, 2,6-vinylene naphthalene, 1,4-ethynylene naphthalene, 2,6-ethynylene naphthalene, combinations thereof, precursors therefor or combinations of precursors therefor, is deposited on a substrate by a thermal CVD process. The surface may be readily modified.

Abstract translation: 本发明涉及形成具有反应性表面的保形涂层的方法。 在该方法中，由具有衍生自未取代的对二甲苯，取代的对二甲苯，亚苯基亚乙烯基，亚苯基亚乙炔基，1,4-亚甲基萘，2,6-亚甲基萘， 亚乙烯基萘，2,6-亚乙烯基萘，1,4-亚乙炔基萘，2,6-亚乙炔基萘，其组合，其前体或其前体的组合通过热CVD工艺沉积在基底上。 表面可能容易修改。

公开(公告)号：WO2004016672A3

公开(公告)日：2004-02-26

申请号：PCT/US2003/025912

申请日：2003-08-19

Applicant: RENSSELAER POLYTECHNIC INSTITUTE ,  SENKEVICH, John, Joseph ,  YANG, Guangrong ,  LU, Toh-Ming

Inventor： SENKEVICH, John, Joseph ,  YANG, Guangrong ,  LU, Toh-Ming

IPC: C08G61/02

Abstract: The present invention relates to a method for forming a conformal coating having a reactive surface. In the method, an ultrathin layer composed of a polymer having repeating units derived from unsubstituted p-xylylene, substituted p-xylylene, phenylene vinylene, phenylene ethynylene, 1,4-methylene naphthalene, 2,6-methylene naphthalene, 1,4-vinylene naphthalene, 2,6-vinylene naphthalene, 1,4-ethynylene naphthalene, 2,6-ethynylene naphthalene, combinations thereof, precursors therefor or combinations of precursors therefor, is deposited on a substrate by a thermal CVD process. The surface may be readily modified.