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    IN-SITU HEATING AND CO-ANNEALING FOR LASER ANNEALED JUNCTION FORMATION
    1.
    发明申请
    IN-SITU HEATING AND CO-ANNEALING FOR LASER ANNEALED JUNCTION FORMATION 审中-公开
    激光退火结合层的原地加热和共退火

    公开(公告)号：WO2012040464A2

    公开(公告)日：2012-03-29

    申请号：PCT/US2011/052761

    申请日：2011-09-22

    Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. ,  RAMAPPA, Deepak ,  SULLIVAN, Paul

    Inventor： RAMAPPA, Deepak ,  SULLIVAN, Paul

    IPC: H01L21/02

    CPC classification number: H01L21/02675 ,  B23K26/0006 ,  B23K26/0081 ,  B23K26/0608 ,  B23K26/0619 ,  B23K2203/56 ,  H01L21/268

    Abstract: Improved methods of annealing a workpiece are disclosed. Lasers are used to both increase the temperature of the workpiece, and to laser melt anneal the workpiece. By utilizing lasers for both operations, the manufacturing complexity is reduced. Furthermore, laser melt anneal may provide better junctions and more well defined junction depths. By heating the workpiece either immediately before or after the laser melt anneal, the quality of the junction may be Improved. Shallow annealing may be accomplished and annealing may occur in the presence of a species to form a passivation layer, !f the workpiece is a solar cell, in-situ heating may improve open circuit voltage (V oc ) or dark currents. Insitu heating of the substrate lowers the melting threshold of the substrate and also increases light absorption in the substrate. This reduces the power of the melt laser and hence reduces the residual damage.

    Abstract translation: 公开了对工件进行退火的改进方法。 激光器既用于提高工件的温度，又用于激光熔化退火工件。 通过将激光器用于两种操作，制造复杂度降低。 此外，激光熔体退火可以提供更好的结和更确定的结深度。 通过在激光熔体退火之前或之后立即加热工件，可以改善结的质量。 可以实现浅退火，并且在存在物质的情况下可以发生退火以形成钝化层。如果工件是太阳能电池，则原位加热可以提高开路电压（V oc） 或黑暗的电流。 衬底的原位加热降低了衬底的熔化阈值并且还增加了衬底中的光吸收。 这会降低熔体激光器的功率，从而减少残余损伤。

    COUNTERDOPING FOR SOLAR CELLS
    3.
    发明申请
    COUNTERDOPING FOR SOLAR CELLS 审中-公开
    对太阳能电池的反制

    公开(公告)号：WO2009111666A3

    公开(公告)日：2009-12-10

    申请号：PCT/US2009036235

    申请日：2009-03-05

    Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ,  BATEMAN NICHOLAS P T ,  SULLIVAN PAUL ,  GUPTA ATUL

    Inventor： BATEMAN NICHOLAS P T ,  SULLIVAN PAUL ,  GUPTA ATUL

    IPC: H01L31/042 ,  H01L21/265

    CPC classification number: H01L31/022441 ,  H01L31/0682 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

    Abstract: Methods of counterdoping a solar cell, particularly an IBC solar cell are disclosed. One surface of a solar cell may require portions to be n-doped, while other portions are p- doped. Traditionally, a plurality of lithography and doping steps are required to achieve this desired configuration. In contrast, one lithography step can be eliminated by the use of a blanket doping of one conductivity and a mask patterned counterdoping process of the opposite conductivity. The areas dosed during the masked patterned doping receive a sufficient dose so as to completely reverse the effect of the blanket doping and achieve a conductivity that is opposite the blanket doping. In another embodiment, the counterdoping is performed by means of a direct patterning technique, thereby eliminating the remaining lithography step. Various methods of direct counterdoping processes are disclosed.

    Abstract translation: 公开了反掺杂太阳能电池特别是IBC太阳能电池的方法。 太阳能电池的一个表面可能需要部分是n掺杂的，而其他部分是p掺杂的。 传统上，需要多个光刻和掺杂步骤来实现这种期望的配置。 相反，通过使用一种导电性的全面掺杂和相反导电性的掩模图案反掺杂工艺，可以消除一个光刻步骤。 在掩模图案化掺杂期间定量的区域接收足够的剂量以完全反转覆盖掺杂的效果并实现与覆盖掺杂相反的导电性。 在另一个实施例中，借助于直接图案化技术来执行反掺杂，由此消除剩余的光刻步骤。 公开了直接反掺杂工艺的各种方法。

    QUICK RELEASE TOOL FOR ENGAGING ELONGATED OBJECTS, PARTICULARY SUITE FOR USE WITH TUBING
    4.
    发明申请
    QUICK RELEASE TOOL FOR ENGAGING ELONGATED OBJECTS, PARTICULARY SUITE FOR USE WITH TUBING 审中-公开
    快速释放工具，用于连接伸长的物体，特别适用于管道

    公开(公告)号：WO2004070214A2

    公开(公告)日：2004-08-19

    申请号：PCT/US2004000209

    申请日：2004-01-27

    Applicant: SULLIVAN PAUL JOSEPH

    Inventor： SULLIVAN PAUL JOSEPH ,  SULLIVAN JUSTIN JOSEPH

    IPC: B25B7/02 ,  F16B

    CPC classification number: B25B7/02 ,  Y10T29/539 ,  Y10T29/53909 ,  Y10T29/53917

    Abstract: Tool includes a fixed handle and a movable, lockable handle. A working end of the tool includes an upper jaw and a movable lower jaw. A passage may be provided in one or both of upper and lower jaws. A sealing device may be provided in the upper jaw, the sealing device being disposed adjacent to the passage. Lower jaw may likewise include a passage therein. In use, an elongated object such as a tube may be inserted into the passage in the lower jaw and then into the passage in the upper jaw adjacent the sealing device. When the lower jaw is engaged with the upper jaw, the lower jaw compresses the sealing device and sealingly engages the sealing device, the passage, and the tube disposed therein. In that manner, a seal is achieved. In the case where an opening having a coupling is fluidly connected to the upper jaw, a sealed, fluid connection may be established between the coupling on the upper jaw and the tube engaged by the seal.

    Abstract translation: 工具包括固定手柄和可移动的可锁定手柄。 工具的工作端包括上颚和可动下颚。 通道可以设置在上下钳口中的一个或两个中。 密封装置可以设置在上颚中，密封装置邻近通道设置。 下颚同样可以包括其中的通道。 在使用中，诸如管的细长物体可以插入下颚中的通道中，然后插入邻近密封装置的上颚中的通道中。 当下颚与上颚接合时，下颚压缩密封装置并密封地接合密封装置，通道和设置在其中的管。 以这种方式，实现了密封。 在具有联接件的开口流体地连接到上钳口的情况下，可以在上钳口上的联接器和由密封件接合的管之间建立密封的流体连接。

    A DENTAL FLOSS DEVICE
    5.
    发明申请
    A DENTAL FLOSS DEVICE 审中-公开
    牙齿穿孔装置

    公开(公告)号：WO1993004641A1

    公开(公告)日：1993-03-18

    申请号：PCT/IE1992000007

    申请日：1992-09-11

    Applicant: EOLAS, THE IRISH SCIENCE AND TECHNOLOGY AGENCY ,  BENNETT, Clayton ,  SULLIVAN, Alan ,  SULLIVAN, Paul

    Inventor： EOLAS, THE IRISH SCIENCE AND TECHNOLOGY AGENCY

    IPC: A61C15/04

    CPC classification number: A61C15/046 ,  A61C15/048

    Abstract: A dental floss device (1, 40, 50, 60, 70) comprises a handle (2) having a shank (3) terminating in a head piece (4). A disposable dental floss holder (5) comprises a base portion (10) and a pair of spaced-apart jaws (11, 12) with a length of dental floss (13) extending therebetween. The head piece (4) has a groove (20) in which the base portion (10) is securely retained when the device is used in all flossing directions. Snap-fit projections (15) extend inwardly from the jaws (11, 12) of the floss holder (5) and are retained behing marginal edges (25) of a floor (24) of the groove (20). When used, the floss holder (5) is removed and a new floss holder (5) is fitted.

    Abstract translation: 牙线装置（1,40,50,60,70）包括具有终止于头部件（4）中的柄（3）的手柄（2）。 一次性牙线保持器（5）包括基部（10）和一对间隔开的钳口（11,12），其间延伸有一定长度的牙线（13）。 头部件（4）具有凹槽（20），当在所有牙线方向上使用该装置时，基部（10）牢固地保持在该凹槽中。 卡扣配合突起（15）从牙线保持器（5）的爪（11,12）向内延伸并且保持凹槽（20）的底板（24）的边缘边缘（25）。 当使用时，牙线保持器（5）被移除并且安装了新的牙线架（5）。

    METHOD TO SYNTHESIZE GRAPHENE
    6.
    发明申请
    METHOD TO SYNTHESIZE GRAPHENE 审中-公开
    合成石墨的方法

    公开(公告)号：WO2010148001A1

    公开(公告)日：2010-12-23

    申请号：PCT/US2010/038692

    申请日：2010-06-15

    Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES ,  RAMAPPA, Deepak ,  SULLIVAN, Paul

    Inventor： RAMAPPA, Deepak ,  SULLIVAN, Paul

    IPC: C23C14/48 ,  C23C14/06 ,  C23C14/58

    CPC classification number: C23C14/0605 ,  C23C14/48 ,  C23C14/5806

    Abstract: A method of using ion implantation techniques to create graphene is disclosed. Carbon ions are implanted in a substrate, such as a metal foil, using a plasma doping system or a beam line implanter. The implant is performed at an elevated temperature, to allow a large number of carbon ions to be absorbed by the foil. As the temperature is reduced, the excessive number of carbon atoms causes the foil to be saturated, and the carbon atoms diffuse to the surface, thereby producing graphene. In another embodiment, a plasma doping system is used, where a plasma containing carbon and other species is created. These additional species are also implanted, thereby causing the diffused atoms to contain both carbon and the additional species.

    Abstract translation: 公开了一种使用离子注入技术制造石墨烯的方法。 使用等离子体掺杂系统或束线注入机将碳离子注入诸如金属箔的衬底中。 植入物在升高的温度下进行，以允许大量的碳离子被箔吸收。 当温度降低时，碳原子数过多会导致箔饱和，碳原子扩散到表面，从而产生石墨烯。 在另一个实施例中，使用等离子体掺杂系统，其中产生含有碳和其它物质的等离子体。 这些另外的物质也被植入，从而使扩散的原子含有碳和另外的物质。

    COUNTERDOPING FOR SOLAR CELLS
    7.
    发明申请
    COUNTERDOPING FOR SOLAR CELLS 审中-公开
    太阳能电池的对策

    公开(公告)号：WO2009111666A2

    公开(公告)日：2009-09-11

    申请号：PCT/US2009/036235

    申请日：2009-03-05

    Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES ,  BATEMAN, Nicholas, P., T. ,  SULLIVAN, Paul ,  GUPTA, Atul

    Inventor： BATEMAN, Nicholas, P., T. ,  SULLIVAN, Paul ,  GUPTA, Atul

    IPC: H01L21/266 ,  H01L21/268 ,  H01L31/0248

    CPC classification number: H01L31/022441 ,  H01L31/0682 ,  H01L31/1804 ,  Y02E10/547 ,  Y02P70/521

    Abstract: Methods of counterdoping a solar cell, particularly an IBC solar cell are disclosed. One surface of a solar cell may require portions to be n-doped, while other portions are p- doped. Traditionally, a plurality of lithography and doping steps are required to achieve this desired configuration. In contrast, one lithography step can be eliminated by the use of a blanket doping of one conductivity and a mask patterned counterdoping process of the opposite conductivity. The areas dosed during the masked patterned doping receive a sufficient dose so as to completely reverse the effect of the blanket doping and achieve a conductivity that is opposite the blanket doping. In another embodiment, the counterdoping is performed by means of a direct patterning technique, thereby eliminating the remaining lithography step. Various methods of direct counterdoping processes are disclosed.

    Abstract translation: 公开了一种太阳能电池，特别是IBC太阳能电池的反掺杂方法。 太阳能电池的一个表面可能需要部分被掺杂，而其它部分是p-掺杂的。 传统上，需要多个光刻和掺杂步骤来实现这种期望的配置。 相比之下，可以通过使用一种导电性的覆盖掺杂和具有相反电导率的掩模图案化反向掺杂工艺来消除一个光刻步骤。 在掩模图案化掺杂期间计量的面积接收足够的剂量，以完全反转覆盖掺杂的效果，并获得与覆盖掺杂相反的电导率。 在另一个实施例中，通过直接图案化技术执行反掺杂，从而消除了剩余的光刻步骤。 公开了各种直接反打法的方法。

    DARKFIELD INSPECTION SYSTEM HAVING A PROGRAMMABLE LIGHT SELECTION ARRAY
    9.
    发明申请
    DARKFIELD INSPECTION SYSTEM HAVING A PROGRAMMABLE LIGHT SELECTION ARRAY 审中-公开
    暗场检查系统具有可编程的光选择阵列

    公开(公告)号：WO2005017952A2

    公开(公告)日：2005-02-24

    申请号：PCT/US2004011127

    申请日：2004-04-09

    Applicant: KLA TENCOR TECH CORP ,  BEVIS CHRISTOPHER F ,  SULLIVAN PAUL J ,  SHORTT DAVID W ,  KREN GEORGE J

    Inventor： BEVIS CHRISTOPHER F ,  SULLIVAN PAUL J ,  SHORTT DAVID W ,  KREN GEORGE J

    IPC: G01N21/47 ,  G01N21/88 ,  H01L

    CPC classification number: G01N21/4738 ,  G01N21/8806 ,  G01N2021/8822

    Abstract: An inspection tool embodiment includes an illumination source for directing a light beam onto a workpiece to generate scattered light that includes the ordinary scattering pattern of the workpiece as well as light scattered from defects of the workpiece. The embodiment includes a programmable light selection array that receives light scattered from the workpiece and selectively directs the light scattered from defects onto a photosensor which detects the defect signal. Processing circuitry receives the defect signal and conducts surface analysis of the workpiece that can include the characterizing of defects of the workpiece. The programmable light selection arrays can include, but are not limited to, reflector arrays and filter arrays. The invention also includes associated surface inspection methods.

    Abstract translation: 检查工具实施例包括用于将光束引导到工件上以产生散射光的照明源，该散射光包括工件的普通散射图案以及从工件的缺陷散射的光。 该实施例包括可编程光选择阵列，其接收从工件散射的光并选择性地将从缺陷散射的光引导到检测缺陷信号的光电传感器上。 处理电路接收缺陷信号并进行工件的表面分析，其可包括表征工件的缺陷。 可编程光选择阵列可以包括但不限于反射器阵列和滤波器阵列。 本发明还包括相关的表面检查方法。

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