公开(公告)号：WO2008140027A1

公开(公告)日：2008-11-20

申请号：PCT/JP2008/058583

申请日：2008-04-25

Applicant: NIKON CORPORATION ,  TANAKA, Keiichi ,  KAKIZAKI, Yukio

Inventor： TANAKA, Keiichi ,  KAKIZAKI, Yukio

IPC: G03F7/20

CPC classification number: G03F7/7085 ,  F16C29/025 ,  F16C32/0603 ,  G03F7/70808 ,  G03F7/70816 ,  G03F7/70841 ,  G03F7/70866

Abstract: The upper end of a static gas bearing member (42) of a wafer side seal unit (40W) is connected to an edge section on the outgoing side of an exposure beam of a chamber (52) in an air tight state via bellows (72), and the lower end surface is in a state forming a predetermined clearance with a wafer (W) and a wafer holder (WH). By this arrangement, the inside of the chamber (52) is isolated from the outside. Accordingly, it becomes possible to maintain a vacuum environment in the periphery of the optical path of the exposure beam without arranging a vacuum chamber to house a wafer (W), a wafer holder (WH), and a wafer stage (WST), which allows the size of the entire exposure apparatus to be reduced, and also makes it easy to have access to the vicinity of the wafer stage (WST).

Abstract translation: 晶片侧密封单元（40W）的静态气体轴承构件（42）的上端通过波纹管（72）连接到处于气密状态的室（52）的曝光束的出射侧的边缘部分 ），并且下端表面处于与晶片（W）和晶片保持器（WH）形成预定间隙的状态。 通过这种布置，室（52）的内部与外部隔离。 因此，可以在不设置真空室来容纳晶片（W），晶片保持架（WH）和晶片台（WST））的同时，保持曝光光束的光路周边的真空环境，其中 允许整个曝光装置的尺寸减小，并且还使得容易接近晶片台（WST）附近。

公开(公告)号：WO2006009305A1

公开(公告)日：2006-01-26

申请号：PCT/JP2005/013785

申请日：2005-07-21

Applicant: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. ,  TANAKA, Keiichi ,  OHTO, Hidetaka ,  OASHI, Masahiro

Inventor： TANAKA, Keiichi ,  OHTO, Hidetaka ,  OASHI, Masahiro

IPC: G11B27/10

CPC classification number: H04N9/87 ,  G11B27/105 ,  G11B27/11 ,  G11B27/329 ,  G11B2220/2516 ,  G11B2220/2541

Abstract: A playback apparatus for playing a digital stream in conjunction with an application includes a package management unit operable to generate package information by merging files recorded on a first recording medium and a second recording medium, in accordance with merge management information, and a selection unit operable to detect a plurality of playable titles from the package information, and select one of the detected titles as a current title. After the application requests the package management unit to update the merge management information, by specifying new merge management information, the package management unit changes a file referenced from the newly specified merge management information to read-only before updating the package information, and at a point at which digital stream playback stops due to a current title change by the selection unit, the package management unit generates new package information by combining files recorded on the first and second recording media, in accordance with the newly specified merge management information.

Abstract translation: 一种用于与应用程序一起播放数字流的播放装置包括一个包管理单元，用于根据合并管理信息合并记录在第一记录介质和第二记录介质上的文件来生成包信息，以及可操作的选择单元 从包信息中检测多个可播放标题，并且将检测到的标题之一选择为当前标题。 在应用程序请求包管理单元更新合并管理信息之后，通过指定新的合并管理信息，包管理单元在更新包信息之前将从新指定的合并管理信息引用的文件改变为只读，并且在 由于选择单元由于当前标题改变而停止数字流播放的点，包管理单元根据新指定的合并管理信息，通过组合记录在第一和第二记录介质上的文件来生成新的包信息。

公开(公告)号：WO0010058A9

公开(公告)日：2000-07-27

申请号：PCT/US9918480

申请日：1999-08-12

Applicant: NIPPON KOGAKU KK ,  HAZELTON ANDREW J ,  HAYASHI YUTAKA ,  TANAKA KEIICHI ,  ITO NOBUKAZU

Inventor： HAZELTON ANDREW J ,  HAYASHI YUTAKA ,  TANAKA KEIICHI ,  ITO NOBUKAZU

IPC: G12B5/00 ,  F16F15/02 ,  G03F7/20 ,  G03F9/00 ,  G12B9/08 ,  H01L21/027 ,  H01L21/68 ,  H02K41/03 ,  G05B5/01 ,  B64C17/06 ,  G05B11/01

CPC classification number: G03F7/70358 ,  F16F15/02 ,  G03F7/70716 ,  G03F7/70758 ,  G03F7/70833 ,  G03F7/709

Abstract: The present invention provides a structure (60) for isolating the reaction forces generated by a planar motor (30). Specifically, the fixed portion (50) of the reaction motor (30), which is subject to reaction forces, is structurally isolated from the rest of the system in which the planar motor (30) is deployed. In accordance with one embodiment of the present invention, the fixed portion (50) of the planar motor (30) is separated from the rest of the system and coupled to ground. The rest of the system is isolated from ground by deploying vibration isolation elements (60). Alternatively or in addition, the fixed portion (50) of the planar motor (30) may be structured to move (e.g., on bearings) in the presence of reaction forces, so as to absorb the reaction forces with its inertia. In a further embodiment of the present invention, the fixed portion (50) of the planar motor (30) and the article (12) to be moved are supported by the same frame (52), with the fixed portion (50) of the planar motor (30) movable on bearings.

Abstract translation: 本发明提供了一种用于隔离由平面马达（30）产生的反作用力的结构（60）。 具体地说，反作用力马达（30）的固定部分（50）受到反作用力的作用，其与平面马达（30）所布置的系统的其余部分在结构上是隔离的。 根据本发明的一个实施例，平面电机（30）的固定部分（50）与系统的其余部分分离并且耦合到地。 通过部署振动隔离元件（60）将系统的其余部分与地面隔离。 可选地或附加地，平面马达（30）的固定部分（50）可以构造成在存在反作用力的情况下（例如，在轴承上）移动，从而利用其惯性来吸收反作用力。 在本发明的另一个实施例中，平面马达30的固定部分50和待移动的物品12由同一框架52支撑， 平面马达（30）可在轴承上移动。

公开(公告)号：WO1997040540A1

公开(公告)日：1997-10-30

申请号：PCT/JP1997001397

申请日：1997-04-23

Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD. ,  FUKUDA, Yutaka ,  HANAFUSA, Koji ,  TANAKA, Keiichi

Inventor： SUMITOMO ELECTRIC INDUSTRIES, LTD.

IPC: H01M02/02

CPC classification number: H01M2/0275 ,  H01M2/0287 ,  H01M2/08 ,  H01M2/20 ,  H01M2/30 ,  H01M6/16 ,  H01M10/0436 ,  H01M10/0525 ,  H01M2300/0017

Abstract: A non-aqueous electrolyte cell (10) which is provided with a non-aqueous electrolyte (20) which is a non-aqueous electrolytic medium, an anode plate (30) and a cathode plate (32) which are in contact with the medium (20), a first lead wire (18a) one end of which is connected to the plate (30) and the other of which extends to the outside, a second lead wire (18b) one end of which is connected to the plate (32) and the other of which extends to the outside, and a sealing bag (14) in which the plates (30 and 32), electrolyte (20), and parts of the wires (18a and 18b) are sealed by heat-sealing. At least heat-sealed part (12) of the bag has a layer made of maleic-acid-modified polyolefin. Maleic-acid-modified polyolefin has a low moisture absorption and a low compatibility with the electrolyte (20). Therefore, the bag (14) has a high sealability because the non-aqueous electrolyte and steam blocking properties of the bag (14) are improved.

Abstract translation: 设置有非水电解质（20）的非水电解质电池（10），非水电解质电池（20）和与介质接触的阳极板（30）和阴极板（32） （20），其一端连接到所述板（30）并且另一端延伸到外部的第一引线（18a），第二引线（18a），其一端连接到所述板（ 32），另一个延伸到外部，并且密封袋（14），其中板（30和32），电解质（20）和电线（18a和18b）的一部分通过热封 。 袋的至少热密封部分（12）具有由马来酸改性的聚烯烃制成的层。 马来酸改性聚烯烃具有低吸湿性和与电解质（20）的低相容性。 因此，袋（14）具有高密封性，因为袋（14）的非水电解质和蒸汽阻隔性能得到改善。

公开(公告)号：WO2006009270A1

公开(公告)日：2006-01-26

申请号：PCT/JP2005/013535

申请日：2005-07-19

Applicant: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. ,  OASHI, Masahiro ,  TANAKA, Keiichi ,  OHTO, Hidetaka ,  LEICHSENRING, Germano

Inventor： OASHI, Masahiro ,  TANAKA, Keiichi ,  OHTO, Hidetaka ,  LEICHSENRING, Germano

IPC: G11B20/00

CPC classification number: G11B27/10 ,  G11B20/00086 ,  G11B20/0021 ,  G11B20/00731 ,  G11B27/329 ,  G11B2220/213 ,  G11B2220/2541 ,  H04N5/765 ,  H04N5/775 ,  H04N5/781 ,  H04N5/85 ,  H04N5/907 ,  H04N9/8042 ,  H04N9/8063 ,  H04N9/8205 ,  H04N9/8211 ,  H04N9/8227 ,  H04N9/8233 ,  H04N9/8715

Abstract: In the Local Storage (18), a plurality of files, merge management information which specifies a file out of the plurality of files to be used in combination with what is recorded on a Read-Only recording medium, and signature information used for judging the authenticity of the merge management information. The Virtual File System unit (38) judges the authenticity of the merge management information based on the signature information. In the case where the merge management information is judged to be authentic, the Virtual File System unit (38) generates package information which indicates a new file structure obtained by adding the file specified by the merge management information to the file structure of the Read-Only recording medium.

Abstract translation: 在本地存储器（18）中，多个文件合并管理信息，其将要与使用的多个文件中的文件指定为记录在只读记录介质上的文件，以及用于判断 合并管理信息的真实性。 虚拟文件系统单元（38）基于签名信息判断合并管理信息的真实性。 在合并管理信息被判定为可信的情况下，虚拟文件​​系统单元（38）生成表示通过将合并管理信息指定的文件与读取文件的文件结构相加而获得的新文件结构的包信息， 只有记录媒体。

公开(公告)号：WO0003301A2

公开(公告)日：2000-01-20

申请号：PCT/US9915278

申请日：1999-07-07

Applicant: NIPPON KOGAKU KK ,  HAZELTON ANDREW J ,  TANAKA KEIICHI ,  EATON JOHN K

Inventor： HAZELTON ANDREW J ,  TANAKA KEIICHI ,  EATON JOHN K

IPC: H01J37/20 ,  G03F7/20 ,  H01L21/027 ,  H01L21/68 ,  H02K41/02 ,  H02K41/03 ,  G03F

CPC classification number: G03F7/70716 ,  G03F7/70758 ,  G03F7/70858 ,  H02K41/031 ,  H02K2201/18

Abstract: Disclosed is a planar motor device capable of effectively restraining thermal influence on the environment. When an electric current is supplied to armature coils (38) opposed to the magnet of a movable member (51), the movable member (51) is driven along a movement surface (21a) by electromagnetic force. When the movable member (51) is continued to be driven in a certain direction, electric current is supplied to the armature coils (38) opposed to the magnet for each movement position of the movable member (51), whereby the armature coils (38) supplied with electric current generate heat. The armature coils (38) are accommodated in a vacuum chamber (41) in a base (21), and are arranged so as to be in contact with a stator yoke (43), with a predetermined gap being defined between them and a ceramic plate (36) forming the vacuum chamber (41). Thus, the heat transmission from the armature coils (38) to the movement surface (21a) side is effected substantially by radiation alone, so that it is possible to effectively restrain thermal influence on the environment.

Abstract translation: 公开了能够有效地抑制对环境的热影响的平面电动机装置。 当向与可移动部件（51）的磁体相对的电枢线圈（38）供给电流时，通过电磁力沿着移动面（21a）驱动可动部件51。 当可动构件（51）沿一定的方向继续被驱动时，向可动构件（51）的每个移动位置的电磁线圈（38）供给与磁体相对的电枢线圈（38），由此电枢线圈 ）提供电流产生热量。 电枢线圈（38）被容纳在基座（21）中的真空室（41）中，并且被布置成与定子轭（43）接触，在它们之间形成预定的间隙，并且陶瓷 形成真空室（41）的板（36）。 因此，从电枢线圈（38）到移动面（21a）侧的热传递基本上仅通过放射线实现，从而可以有效地抑制对环境的热影响。

公开(公告)号：WO2010010452A1

公开(公告)日：2010-01-28

申请号：PCT/IB2009/006340

申请日：2009-07-24

Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA ,  TANAKA, Keiichi

Inventor： TANAKA, Keiichi

IPC: G07C5/08

CPC classification number: G07C5/085 ,  G07C5/008

Abstract: A vehicle data storage system, in which vehicle data obtained from a vehicle-mounted device is stored, includes a vehicle data storage portion in which the vehicle data is stored; a country determination portion that determines a country in which a vehicle exists, based on position data of the vehicle; a selection table storage portion in which a type of the vehicle data that should be stored in the vehicle data storage portion is stored in association with country data; a data determination portion that determines the type of the vehicle data that should be stored in the vehicle data storage portion, based on the country determined by the country determination portion, by referring to the selection table storage portion; and a data processing portion that stores, in the vehicle data storage portion, the vehicle data determined by the data determination portion.

Abstract translation: 一种车载数据存储系统，其中存储从车载装置得到的车辆数据，包括其中存储车辆数据的车辆数据存储部分; 基于车辆的位置数据确定车辆所在的国家的国家确定部分; 选择表存储部，其中应该存储在车辆数据存储部分中的车辆数据的类型与国家数据相关联地存储; 数据确定部分，通过参照选择表存储部分，基于由国家确定部分确定的国家来确定应存储在车辆数据存储部分中的车辆数据的类型; 以及数据处理部，其在车辆数据存储部中存储由数据确定部确定的车辆数据。

公开(公告)号：WO2010001945A1

公开(公告)日：2010-01-07

申请号：PCT/JP2009/062079

申请日：2009-06-25

Applicant: NIKON CORPORATION ,  TANAKA, Keiichi

Inventor： TANAKA, Keiichi

IPC: G03F7/20

CPC classification number: G03F7/70916 ,  G03F7/70066 ,  G03F7/70558 ,  G03F7/70808

Abstract: A light shielding unit 38, which shields a part of an exposure light with a light shielding member 39a, includes a sensor 43 which detects displacement of the light shielding member 39a, a driving device 44 which drives the light shielding member 39a based on a detection result obtained by the sensor 43, a case 40 which accommodates the sensor 43 and the driving device 44, and a bellows mechanism 41 which gas-seals the case 40 with respect to the light shielding member. When the illumination area of the illumination light is defined, it is possible to mitigate the influence of the foreign matters and/or the heat generated from the driving mechanism.

Abstract translation: 用遮光部件39a遮挡曝光用光的一部分遮光部38包括检测遮光部件39a的位移的传感器43，基于检测部驱动遮光部件39a的驱动装置44 由传感器43获得的结果，容纳传感器43和驱动装置44的壳体40，以及相对于遮光部件对壳体40进行气密封的波纹管机构41。 当照明光的照明区域被限定时，可以减轻异物的影响和/或由驱动机构产生的热量。

公开(公告)号：WO0212742A3

公开(公告)日：2002-04-18

申请号：PCT/JP0106536

申请日：2001-07-30

Applicant: NIPPON STEEL CORP ,  NIPPON KOGAKU KK ,  MUKAI TOSHIO ,  TANAKA KEIICHI

Inventor： MUKAI TOSHIO ,  TANAKA KEIICHI

IPC: F16C29/02 ,  F16C32/06

CPC classification number: F16C29/025 ,  F16C32/0614

Abstract: The present invention has its object to provide a hydrostatic gas bearing excellent in a vibration-damping characteristic. The hydrostatic gas bearing is provided with a gas ejecting equipments composed of a cylindrical fine hole having a diameter of not less than 0.04 mm and not more than 0.4 mm, wherein a helium gas is ejected through the cylindrical fine hole. The cylindrical hole has a diameter D and a length L, and in the case where a relationship of D /L is not more than 2 x 10 mm is established, the hydrostatic gas bearing excellent in the vibration-damping characteristic is specifically realized.

Abstract translation: 本发明的目的是提供一种阻尼特性优异的静压气体轴承。 静压气体轴承设置有由直径不小于0.04mm且不大于0.4mm的圆柱形细孔组成的气体喷射设备，其中氦气通过圆柱形细孔喷射。 圆柱形孔的直径D和长度L成立，在D 4 / L的关系不大于2×10 -4 mm 3的情况下，具有优异的静压气体轴承 具体实现了减震特性。

公开(公告)号：WO0003301A9

公开(公告)日：2000-05-25

申请号：PCT/US9915278

申请日：1999-07-07

Applicant: NIPPON KOGAKU KK ,  HAZELTON ANDREW J ,  TANAKA KEIICHI ,  EATON JOHN K

Inventor： HAZELTON ANDREW J ,  TANAKA KEIICHI ,  EATON JOHN K

IPC: H01J37/20 ,  G03F7/20 ,  H01L21/027 ,  H01L21/68 ,  H02K41/02 ,  H02K41/03 ,  H02K41/00 ,  G03B27/42

CPC classification number: G03F7/70716 ,  G03F7/70758 ,  G03F7/70858 ,  H02K41/031 ,  H02K2201/18

Abstract: Disclosed is a planar motor device capable of effectively restraining thermal influence on the environment. When an electric current is supplied to armature coils (38) opposed to the magnet of a movable member (51), the movable member (51) is driven along a movement surface (21a) by electromagnetic force. When the movable member (51) is continued to be driven in a certain direction, electric current is supplied to the armature coils (38) opposed to the magnet for each movement position of the movable member (51), whereby the armature coils (38) supplied with electric current generate heat. The armature coils (38) are accommodated in a vacuum chamber (41) in a base (21), and are arranged so as to be in contact with a stator yoke (43), with a predetermined gap being defined between them and a ceramic plate (36) forming the vacuum chamber (41). Thus, the heat transmission from the armature coils (38) to the movement surface (21a) side is effected substantially by radiation alone, so that it is possible to effectively restrain thermal influence on the environment.

Abstract translation: 公开了一种能够有效抑制热对环境的影响的平面电动机装置。 当电流供应到与可移动部件（51）的磁体相对的电枢线圈（38）时，可移动部件（51）通过电磁力沿着移动表面（21a）被驱动。 当可动部件（51）继续沿一定方向被驱动时，对于可动部件（51）的每个移动位置，电流被提供给与磁体相对的电枢线圈（38），由此电枢线圈 ）提供电流产生热量。 电枢线圈38容纳在基座21内的真空室41内，与定子磁轭43接触配置，在它们之间形成规定的间隙， 板（36）形成真空室（41）。 因此，从电枢线圈（38）到移动表面（21a）侧的热传递基本上仅通过辐射来实现，从而可以有效地抑制热对环境的影响。