公开(公告)号：WO2007024730A3

公开(公告)日：2009-04-16

申请号：PCT/US2006032431

申请日：2006-08-21

Applicant: INOVATIVE MICRO TECHNOLOGY ,  ERLACH DAVID M ,  SUMMERS JEFFERY F ,  THOMPSON DOUGLAS L

Inventor： ERLACH DAVID M ,  SUMMERS JEFFERY F ,  THOMPSON DOUGLAS L

IPC: H01L21/00 ,  H01L33/00

CPC classification number: B81C1/00269 ,  B81C2203/0118 ,  B81C2203/019 ,  Y10T29/5317

Abstract: Systems and methods for forming an encapsulated MEMS device include a hermetic seal which seals an insulating gas between two substrates, one of which supports the MEMS device. The hermetic seal may be formed by heating at least two metal layers, in order to melt at least one of the metal layers. The first melted metal material flows into and forms an alloy with a second metal material, forming a hermetic seal which encapsulates the MEMS device.

Abstract translation: 用于形成封装的MEMS器件的系统和方法包括密封两个衬底之间的绝缘气体的气密密封件，其中之一支撑MEMS器件。 可以通过加热至少两个金属层来形成气密密封，以便熔化至少一个金属层。 第一熔化的金属材料流入并与第二金属材料形成合金，形成封装MEMS装置的气密密封。

公开(公告)号：WO2008045230A2

公开(公告)日：2008-04-17

申请号：PCT/US2007021113

申请日：2007-10-02

Applicant: INNOVATIVE MICRO TECHNOLOGY ,  PARANJPYE ALOK ,  THOMPSON DOUGLAS L

Inventor： PARANJPYE ALOK ,  THOMPSON DOUGLAS L

IPC: H01H1/06

CPC classification number: H01H1/0036 ,  H01H1/06 ,  H01H59/0009 ,  H01H61/02 ,  H01H2001/0052 ,  H01H2061/008

Abstract: A contact electrode for a device is made using an etching process to etch the surface of the contact electrode to form a corrugated contact surface wherein the outer edges of at least one grain is recessed from the outer edges of adjecent grains and is recessed by at least about 0.05 µm from the contact plane. By having such a corrugated surface, the contact electrode is likely to contact another conductor with at least one pure metal grain. This etching treatment reduces contact resistance and contact resistance variability throughout many cycles of use of the contact electrode.

Abstract translation: 使用蚀刻工艺来制造用于器件的接触电极以蚀刻接触电极的表面以形成波纹状接触表面，其中至少一个晶粒的外边缘从凹凸晶粒的外边缘凹陷并且至少凹陷 距接触面约0.05μm。 通过具有这种波纹表面，接触电极很可能与另一导体接触至少一个纯金属颗粒。 该蚀刻处理在接触电极的许多使用周期中减少接触电阻和接触电阻变化性。

公开(公告)号：WO2007131151A2

公开(公告)日：2007-11-15

申请号：PCT/US2007/068207

申请日：2007-05-04

Applicant: ZENON TECHNOLOGY PARTNERSHIP ,  COTE, Pierre, Lucien ,  PAWLOSKI, Jennifer, Lynn ,  THEODOULOU, Michael, David ,  LI, Stanford, Chuk-wah ,  THOMPSON, Douglas, Joseph ,  ADNAN, Ali

Inventor： COTE, Pierre, Lucien ,  PAWLOSKI, Jennifer, Lynn ,  THEODOULOU, Michael, David ,  LI, Stanford, Chuk-wah ,  THOMPSON, Douglas, Joseph ,  ADNAN, Ali

IPC: B01D61/16 ,  B01D61/18 ,  B01D65/00 ,  B01D65/02 ,  B01D65/08 ,  B01D39/10

CPC classification number: B01D61/16 ,  B01D61/145 ,  B01D61/147 ,  B01D61/18 ,  B01D61/20 ,  B01D65/00 ,  B01D65/02 ,  B01D65/08 ,  B01D2311/04 ,  B01D2321/04 ,  B01D2321/185 ,  C02F3/1273 ,  C02F3/30 ,  C02F2303/16 ,  C02F2303/24 ,  Y02W10/15 ,  B01D2311/2649

Abstract: A static screen used upstream of a membrane assembly within a water treatment system has a screening surface with a number of openings distributed over its area. Liquid flows through the screening surface to reach the membrane assembly. Various shapes of screening surfaces are described including three-dimensional bodies with openings at or near their lower ends. Methods for cleaning the screen are described including aeration, backwashing and lowering down the water level in an upstream section by partially or completely draining a tank. Various treatment systems or process designs incorporating the screen are described. Screen elements may be made in two or more parts comprising a supporting structure and a separation layer and may be mounted on a conduit or pan.

Abstract translation: 在水处理系统内的膜组件上游使用的静态屏幕具有在其区域上分布有多个开口的筛选表面。 液体流过筛分表面以到达膜组件。 描述了各种形状的屏蔽表面，包括在其下端处或其下端具有开口的三维体。 描述了用于清洁屏幕的方法，其包括曝气，回洗和通过部分地或完全地排出罐来降低上游部分中的水位。 描述了包括屏幕的各种处理系统或工艺设计。 筛网元件可以由包括支撑结构和分离层的两个或更多个部分制成，并且可以安装在导管或盘上。

公开(公告)号：WO2007111861A3

公开(公告)日：2007-10-04

申请号：PCT/US2007/006751

申请日：2007-03-19

Applicant: INNOVATIVE MICRO TECHNOLOGY ,  CARLSON, Gregory, A. ,  FOSTER, John, S. ,  LIU, Donald, C. ,  THOMPSON, Douglas, L.

Inventor： CARLSON, Gregory, A. ,  FOSTER, John, S. ,  LIU, Donald, C. ,  THOMPSON, Douglas, L.

IPC: H01L29/82

Abstract: A material for forming a conductive structure for a MEMS device is described, which is an alloy containing about 0.01% manganese and the remainder nickel. Data shows that the alloy possesses advantageous mechanical and electrical properties. In particular, the sheet resistance of the alloy is actually lower than the sheet resistance of the pure metal. In addition, the alloy may have superior creep and higher recrystallization temperature than the pure metal. It is hypothesized that these advantageous material properties are a result of the larger grain structure existing in the NiMn alloy film compared to the pure nickel metal film. These properties may make the alloy appropriate for applications such as MEMS thermal electrical switches for telecommunications applications.

公开(公告)号：WO2005039742A1

公开(公告)日：2005-05-06

申请号：PCT/CA2004/001897

申请日：2004-10-29

Applicant: ZENON ENVIRONMENTAL INC. ,  PHAGOO, Deonarine ,  THOMPSON, Douglas Joseph ,  PENNY, Jeffrey Peter ,  GOLDSTEIN, Jake ,  DIAMOND, Jason A.

Inventor： PHAGOO, Deonarine ,  THOMPSON, Douglas Joseph ,  PENNY, Jeffrey Peter ,  GOLDSTEIN, Jake ,  DIAMOND, Jason A.

IPC: B01D61/00

CPC classification number: B01D65/08 ,  B01D61/142 ,  B01D61/20 ,  B01D65/02 ,  B01D2315/06 ,  B01D2321/04 ,  B01D2321/16 ,  B01D2321/185 ,  C02F1/444

Abstract: A liquid treatment plant has sets of membrane trains and processing trains with flow between them through channels. Means of withdrawing permeate and sludge from the trains are described. Cyclic aeration is provided to the membrane trains. Methods of foam control, backwashing and chemical cleaning are described. Single membrane trains or process trains may be isolated for various functions. An isolated membrane train may be used to thicken sludge.

Abstract translation: 液体处理厂有一套膜列车和加工列车，通过通道在其间流动。 描述了从列车中抽出渗透物和污泥的方法。 循环曝气提供给膜列车。 描述了泡沫控制，反冲洗和化学清洁的方法。 单个膜列车或过程列车可能被隔离用于各种功能。 可以使用隔离膜系来增稠污泥。

公开(公告)号：WO2010033140A3

公开(公告)日：2010-03-25

申请号：PCT/US2009/002756

申请日：2009-05-05

Applicant: INNOVATIVE MICRO TECHNOLOGY ,  BISHOP, Jamie, H. ,  ERLACH, David, M. ,  FOSTER, Ian, S. ,  FOSTER, John, S. ,  HARLEY, John, C. ,  THOMPSON, Douglas, L.

Inventor： BISHOP, Jamie, H. ,  ERLACH, David, M. ,  FOSTER, Ian, S. ,  FOSTER, John, S. ,  HARLEY, John, C. ,  THOMPSON, Douglas, L.

IPC: B07C5/344

Abstract: A micromechanical particle sorting system uses a removable/disposable apparatus which may include a compressible device, a filter apparatus and a cell sorter chip assembly. The chip assembly may include a tubing strain relief manifold and a microfabricated cell sorting chip. The chip assembly may be detachable from the filter apparatus in order to mount the MEMS particle sorting chip adjacent to a force- generating apparatus which resides with the particle sorting system. A disturbance device installed in the particle sorting system may interact with a transducer on the removable/disposable apparatus to reduce clogging of the flow through the system. Using this removable/disposable apparatus, when the sample is changed, the entire apparatus can be thrown away with minimal expense and system down time.

公开(公告)号：WO2007131151A3

公开(公告)日：2008-11-13

申请号：PCT/US2007068207

申请日：2007-05-04

Applicant: ZENON TECHNOLOGY PARTNERSHIP ,  COTE PIERRE LUCIEN ,  PAWLOSKI JENNIFER LYNN ,  THEODOULOU MICHAEL DAVID ,  LI STANFORD CHUK-WAH ,  THOMPSON DOUGLAS JOSEPH ,  ADNAN ALI

Inventor： COTE PIERRE LUCIEN ,  PAWLOSKI JENNIFER LYNN ,  THEODOULOU MICHAEL DAVID ,  LI STANFORD CHUK-WAH ,  THOMPSON DOUGLAS JOSEPH ,  ADNAN ALI

IPC: B01D61/16 ,  B01D39/10 ,  B01D61/18 ,  B01D65/00 ,  B01D65/02 ,  B01D65/08

CPC classification number: B01D61/16 ,  B01D61/145 ,  B01D61/147 ,  B01D61/18 ,  B01D61/20 ,  B01D65/00 ,  B01D65/02 ,  B01D65/08 ,  B01D2311/04 ,  B01D2321/04 ,  B01D2321/185 ,  C02F3/1273 ,  C02F3/30 ,  C02F2303/16 ,  C02F2303/24 ,  Y02W10/15 ,  B01D2311/2649

Abstract: A static screen used upstream of a membrane assembly within a water treatment system has a screening surface with a number of openings distributed over its area. Liquid flows through the screening surface to reach the membrane assembly. Various shapes of screening surfaces are described including three-dimensional bodies with openings at or near their lower ends. Methods for cleaning the screen are described including aeration, backwashing and lowering down the water level in an upstream section by partially or completely draining a tank. Various treatment systems or process designs incorporating the screen are described. Screen elements may be made in two or more parts comprising a supporting structure and a separation layer and may be mounted on a conduit or pan.

Abstract translation: 在水处理系统内的膜组件上游使用的静态屏幕具有在其区域上分布有多个开口的筛选表面。 液体流过筛分表面以到达膜组件。 描述了各种形状的屏蔽表面，包括在其下端处或其下端具有开口的三维体。 描述了用于清洁屏幕的方法，其包括曝气，回洗和通过部分地或完全地排出罐来降低上游部分中的水位。 描述了包括屏幕的各种处理系统或工艺设计。 筛网元件可以由包括支撑结构和分离层的两个或更多个部分制成，并且可以安装在导管或盘上。

公开(公告)号：WO2007024730A2

公开(公告)日：2007-03-01

申请号：PCT/US2006/032431

申请日：2006-08-21

Applicant: INOVATIVE MICRO TECHNOLOGY ,  ERLACH, David, M. ,  SUMMERS, Jeffery, F. ,  THOMPSON, Douglas, L.

Inventor： ERLACH, David, M. ,  SUMMERS, Jeffery, F. ,  THOMPSON, Douglas, L.

IPC: H01L21/00

CPC classification number: B81C1/00269 ,  B81C2203/0118 ,  B81C2203/019 ,  Y10T29/5317

Abstract: Systems and methods for forming an encapsulated MEMS device include a hermetic seal which seals an insulating gas between two substrates, one of which supports the MEMS device. The hermetic seal may be formed by heating at least two metal layers, in order to melt at least one of the metal layers. The first melted metal material flows into and forms an alloy with a second metal material, forming a hermetic seal which encapsulates the MEMS device.

Abstract translation: 用于形成封装的MEMS器件的系统和方法包括密封两个衬底之间的绝缘气体的气密密封件，其中之一支撑MEMS器件。 可以通过加热至少两个金属层来形成气密密封，以便熔化至少一个金属层。 第一熔化的金属材料流入并与第二金属材料形成合金，形成封装MEMS装置的气密密封。

公开(公告)号：WO2005055281A3

公开(公告)日：2006-12-21

申请号：PCT/US2004038702

申请日：2004-11-17

Applicant: UNIV ARIZONA STATE ,  ALFORD TERRY L ,  THOMPSON DOUGLAS C JR ,  KIM HYUNCHUL ,  NASTASI MICHAEL ,  MAYER JAMES W ,  ADAMS DANIEL

Inventor： ALFORD TERRY L ,  THOMPSON DOUGLAS C JR ,  KIM HYUNCHUL ,  NASTASI MICHAEL ,  MAYER JAMES W ,  ADAMS DANIEL

IPC: H01L21/36 ,  H01L20060101 ,  H01L21/00 ,  H01L21/265 ,  H01L21/77 ,  H01L29/786

CPC classification number: H01L27/1266 ,  G02F1/133305 ,  G02F1/136277 ,  H01L21/265 ,  H01L27/1214 ,  H01L29/78603 ,  H05K1/16 ,  H05K1/189 ,  H05K3/38 ,  H05K2203/092

Abstract: An electronic apparatus uses a single crystalline silicon substrate disposed adjacent to a flexible substrate. The electronic apparatus may be a flexible flat panel display, or a flexible printed circuit board. The flexible substrate can be made from polymer, plastic, paper, flexible glass, and stainless steel. The flexible substrate is bonded to the single crystalline substrate using an ion implantation process. The ion implantation process involves the use of a noble gas such as hydrogen, helium, xenon, and krypton. A plurality of semiconductor devices are formed on the single crystalline silicon substrate. The semiconductor devices may be thin film transistors for the flat panel display, or active and passive components for the electronic device.

Abstract translation: 电子设备使用与柔性基板相邻设置的单晶硅衬底。 电子设备可以是柔性平板显示器或柔性印刷电路板。 柔性基材可以由聚合物，塑料，纸，柔性玻璃和不锈钢制成。 使用离子注入工艺将柔性基板结合到单晶衬底。 离子注入工艺涉及惰性气体如氢气，氦气，氙气和氪气。 在单晶硅衬底上形成多个半导体器件。 半导体器件可以是用于平板显示器的薄膜晶体管，或用于电子器件的主动和无源部件。

公开(公告)号：WO2006002529A1

公开(公告)日：2006-01-12

申请号：PCT/CA2005/001011

申请日：2005-06-29

Applicant: ZENON ENVIRONMENTAL INC. ,  COTE, Pierre Lucien ,  THOMPSON, Douglas Joseph ,  PAWLOSKI, Jennifer Lynn ,  LIU, Minggang ,  SIMON, Rafael David ,  ADNAN, Ali

Inventor： COTE, Pierre Lucien ,  THOMPSON, Douglas Joseph ,  PAWLOSKI, Jennifer Lynn ,  LIU, Minggang ,  SIMON, Rafael David ,  ADNAN, Ali

IPC: B01D39/10

CPC classification number: B01D61/18 ,  B01D35/027 ,  B01D61/145 ,  B01D61/147 ,  B01D61/16 ,  B01D65/08 ,  B01D2311/04 ,  B01D2315/06 ,  B01D2321/04 ,  B01D2321/185 ,  C02F1/001 ,  C02F1/40 ,  C02F1/444 ,  C02F3/1273 ,  C02F2303/24 ,  Y02W10/15 ,  B01D2311/16

Abstract: A static screen used upstream of a membrane assembly within a water treatment system has a screening surface with a number of openings distributed over its area. Liquid flows through the screening surface to reach the membrane assembly. Various shapes of screening surfaces are described including undulating panels and geometric shapes. Methods for cleaning the screen are described including aeration and backwashing. Various treatment systems or process designs incorporating the screen are described.

Abstract translation: 在水处理系统内的膜组件上游使用的静态屏幕具有在其区域上分布有多个开口的筛选表面。 液体流过筛分表面以到达膜组件。 描述了各种形状的筛面，包括起伏面板和几何形状。 描述了用于清洁屏幕的方法，包括曝气和反冲洗。 描述了包括屏幕的各种处理系统或工艺设计。