公开(公告)号：WO2011056671A2

公开(公告)日：2011-05-12

申请号：PCT/US2010/054329

申请日：2010-10-27

Applicant: SAINT-GOBAIN ABRASIVES, INC. ,  SAINT-GOBAIN ABRASIFS ,  UPADHYAY, Rachana ,  VEDANTHAM, Ramanujam

Inventor： UPADHYAY, Rachana ,  VEDANTHAM, Ramanujam

IPC: B24D3/28 ,  H01L21/304

CPC classification number: B24D3/32 ,  B24B37/245 ,  B24D3/28

Abstract: A superabrasive resin product includes a superabrasive grain component, an oxide component, and a continuous phase defining a network of interconnected pores. The oxide component consists of an oxide of a lanthanoid, and the continuous phase includes a thermoplastic polymer component. The superabrasive grain component and the oxide component are distributed in the continuous phase.

Abstract translation: 超级磨料树脂产品包括超级磨料颗粒组分，氧化物组分和限定互连孔隙网络的连续相。 氧化物成分由镧系元素的氧化物构成，连续相包含热塑性聚合物成分。 超级磨粒组分和氧化物组分分布在连续相中。

公开(公告)号：WO2008083081A2

公开(公告)日：2008-07-10

申请号：PCT/US2007/088576

申请日：2007-12-21

Applicant: SAINT-GOBAIN CERAMICS & PLASTICS, INC. ,  TANIKELLA, Brahmanandam V. ,  SIMPSON, Matthew A. ,  CHINNAKARUPPAN, Palaniappan ,  RIZZUTO, Robert A. ,  VEDANTHAM, Ramanujam

Inventor： TANIKELLA, Brahmanandam V. ,  SIMPSON, Matthew A. ,  CHINNAKARUPPAN, Palaniappan ,  RIZZUTO, Robert A. ,  VEDANTHAM, Ramanujam

CPC classification number: B24B7/228 ,  Y10T428/257 ,  Y10T428/26

Abstract: A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 µm/cm 2 , wherein nTTV is total thickness variation normalized for surface area of teh generally planar surface, the substrate having a diameter not less than about 9.0 cm.

Abstract translation: 蓝宝石衬底包括具有从由a面，r面，m面和c面取向组成的组中选择的晶体学取向的大致平面表面，并且nTTV不是 大于约0.037微米/平方厘米，其中nTTV是总厚度变化归一化为大致平面表面的表面积，该基底的直径不小于约9.0厘米。

公开(公告)号：WO2011056671A3

公开(公告)日：2011-09-22

申请号：PCT/US2010054329

申请日：2010-10-27

Applicant: SAINT GOBAIN ABRASIVES INC ,  SAINT GOBAIN ABRASIFS SA ,  UPADHYAY RACHANA ,  VEDANTHAM RAMANUJAM

Inventor： UPADHYAY RACHANA ,  VEDANTHAM RAMANUJAM

IPC: B24D3/28 ,  H01L21/304

CPC classification number: B24D3/32 ,  B24B37/245 ,  B24D3/28

Abstract: A superabrasive resin product includes a superabrasive grain component, an oxide component, and a continuous phase defining a network of interconnected pores. The oxide component consists of an oxide of a lanthanoid, and the continuous phase includes a thermoplastic polymer component. The superabrasive grain component and the oxide component are distributed in the continuous phase.

Abstract translation: 超级磨料树脂产品包括超磨料颗粒组分，氧化物组分和限定互连孔网络的连续相。 氧化物组分由镧系元素的氧化物组成，连续相包括热塑性聚合物组分。 超磨料颗粒组分和氧化物组分分布在连续相中。

公开(公告)号：WO2011056680A2

公开(公告)日：2011-05-12

申请号：PCT/US2010/054347

申请日：2010-10-27

Applicant: SAINT-GOBAIN ABRASIVES, INC. ,  SAINT-GOBAIN ABRASIFS ,  VEDANTHAM, Ramanujam ,  UPADHYAY, Rachana ,  QUEREL, Gilles

Inventor： VEDANTHAM, Ramanujam ,  UPADHYAY, Rachana ,  QUEREL, Gilles

IPC: B24D3/10 ,  C09K3/14 ,  B24D3/34 ,  B24D7/00 ,  B24B37/04

CPC classification number: B24D3/10 ,  B24B37/245 ,  B24D3/18 ,  C09K3/1409

Abstract: A vitrified superabrasive product includes a superabrasive component and a vitrified bond component in which the superabrasive component is dispersed. The vitrified bond includes an oxide of a lanthanoid. Additionally, the vitrified bond component defines pores that can be essentially all less than 800 μm in diameter. Seventy percent of the pores are in a range of between about 40 μm and about 500 μm and have an average aspect ratio less than about 2. The porosity is in a range of between about 50% and about 90% of the total volume of the superabrasive product.

Abstract translation: 玻璃化超级磨料产品包括超级磨料组分和玻璃化粘结组分，其中超级磨料组分分散在其中。 玻璃化的键包括镧系元素的氧化物。 另外，玻璃化的粘结组分限定了基本上全部小于800μm直径的孔。 百分之七十的孔位于约40μm与约500μm之间的范围内，并具有小于约2的平均纵横比。孔隙率在总体积的约50％与约90％之间的范围内 超级磨料产品。

公开(公告)号：WO2008083081A3

公开(公告)日：2008-11-06

申请号：PCT/US2007088576

申请日：2007-12-21

Applicant: SAINT GOBAIN CERAMICS ,  TANIKELLA BRAHMANANDAM V ,  SIMPSON MATTHEW A ,  CHINNAKARUPPAN PALANIAPPAN ,  RIZZUTO ROBERT A ,  VEDANTHAM RAMANUJAM

Inventor： TANIKELLA BRAHMANANDAM V ,  SIMPSON MATTHEW A ,  CHINNAKARUPPAN PALANIAPPAN ,  RIZZUTO ROBERT A ,  VEDANTHAM RAMANUJAM

IPC: B24B7/22 ,  B24B37/04 ,  H01L21/20

CPC classification number: B24B7/228 ,  Y10T428/257 ,  Y10T428/26

Abstract: A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 µm/cm 2 , wherein nTTV is total thickness variation normalized for surface area of teh generally planar surface, the substrate having a diameter not less than about 9.0 cm.

Abstract translation: 蓝宝石衬底包括具有选自由a面，r面，m面和c面取向组成的组的结晶取向，且具有不大于约0.037μm/ cm 2的nTTV的大致平坦的表面， SUP> 2，其中nTTV是对于大致平坦表面的表面积归一化的总厚度变化，所述基底具有不小于约9.0cm的直径。

公开(公告)号：WO2008083071A1

公开(公告)日：2008-07-10

申请号：PCT/US2007/088548

申请日：2007-12-21

Applicant: SAINT-GOBAIN CERAMICS & PLASTICS, INC. ,  TANIKELLA, Brahmanandam, V. ,  CHINNAKARUPPAN, Palaniappan ,  RIZZUTO, Robert, A. ,  CHERIAN, Isaac, K. ,  VEDANTHAM, Ramanujam

Inventor： TANIKELLA, Brahmanandam, V. ,  CHINNAKARUPPAN, Palaniappan ,  RIZZUTO, Robert, A. ,  CHERIAN, Isaac, K. ,  VEDANTHAM, Ramanujam

IPC: B24B1/00 ,  B24B7/22

CPC classification number: B24B7/228 ,  B24B1/00

Abstract: A method of machining a sapphire substrate comprises grinding a first surface of a sapphire substrate using a first fixed abrasive and grinding said first surface of the sapphire substrate using a second fixed abrasive, wherein the second fixed abrasive has a smaller average grain size than the first fixed abrasive, and wherein the second, fixed abrasive is self -dressing.

Abstract translation: 一种加工蓝宝石衬底的方法包括使用第一固定磨料研磨蓝宝石衬底的第一表面并使用第二固定磨料研磨蓝宝石衬底的第一表面，其中第二固定磨料具有比第一固定磨料更小的平均粒度 固定磨料，其中第二固定磨料是自压的。

公开(公告)号：WO2011056680A3

公开(公告)日：2011-09-22

申请号：PCT/US2010054347

申请日：2010-10-27

Applicant: SAINT GOBAIN ABRASIVES INC ,  SAINT GOBAIN ABRASIFS SA ,  VEDANTHAM RAMANUJAM ,  UPADHYAY RACHANA ,  QUEREL GILLES

Inventor： VEDANTHAM RAMANUJAM ,  UPADHYAY RACHANA ,  QUEREL GILLES

IPC: B24D3/10 ,  B24B37/04 ,  B24D3/34 ,  B24D7/00 ,  C09K3/14

CPC classification number: B24D3/10 ,  B24B37/245 ,  B24D3/18 ,  C09K3/1409

Abstract: A vitrified superabrasive product includes a superabrasive component and a vitrified bond component in which the superabrasive component is dispersed. The vitrified bond includes an oxide of a lanthanoid. Additionally, the vitrified bond component defines pores that can be essentially all less than 800 µm in diameter. Seventy percent of the pores are in a range of between about 40 µm and about 500 µm and have an average aspect ratio less than about 2. The porosity is in a range of between about 50% and about 90% of the total volume of the superabrasive product.

Abstract translation: 玻璃化超级磨料产品包括超磨料组分和超硬磨料组分分散在其中的玻璃化粘结组分。 玻璃化键包括镧系元素的氧化物。 此外，玻璃化粘合组分限定了基本上全部小于800μm的孔。 70％的孔隙在约40μm至约500μm之间的范围内，并且具有小于约2的平均纵横比。孔隙率在总体积的约50％至约90％的范围内 超级磨料产品。

公开(公告)号：WO2010141464A3

公开(公告)日：2011-05-05

申请号：PCT/US2010036895

申请日：2010-06-01

Applicant: SAINT GOBAIN ABRASIVES INC ,  SAINT GOBAIN ABRASIFS SA ,  WU JIANHUI ,  HWANG TAEWOOK ,  VEDANTHAM RAMANUJAM ,  DINH-NGOC CHARLES ,  PUTHANANGADY THOMAS ,  SCHULZ ERIC M ,  RAMANATH SRINIVASAN

Inventor： WU JIANHUI ,  HWANG TAEWOOK ,  VEDANTHAM RAMANUJAM ,  DINH-NGOC CHARLES ,  PUTHANANGADY THOMAS ,  SCHULZ ERIC M ,  RAMANATH SRINIVASAN

IPC: H01L21/304

CPC classification number: B24B53/017 ,  B24B53/12 ,  B24D3/08 ,  B24D18/00

Abstract: An abrasive tool for conditioning CMP pads includes abrasive grains coupled to a substrate through a metal bond and a coating, e.g., a fluorine-doped nanocomposite coating. The abrasive grains can be arranged in a self-avoiding random distribution. In one implementation, an abrasive tool includes a coated plate and a coated abrasive article that has two abrading surfaces. Other implementations related to a process for producing an abrasive tool that includes a coating at one or more of its surfaces. Also described are methods for dressing a CMP pad.

Abstract translation: 用于调节CMP垫的研磨工具包括通过金属键和涂层（例如氟掺杂的纳米复合涂层）与基底相连的磨料颗粒。 磨粒可以以自回避的随机分布布置。 在一个实施方案中，研磨工具包括涂覆的板和具有两个研磨表面的涂覆的磨料制品。 涉及用于生产研磨工具的方法的其它实施方式，其包括在其一个或多个表面上的涂层。 还描述了用于修整CMP垫的方法。

公开(公告)号：WO2010141464A2

公开(公告)日：2010-12-09

申请号：PCT/US2010/036895

申请日：2010-06-01

Applicant: SAINT-GOBAIN ABRASIVES, INC. ,  SAINT-GOBAIN ABRASIFS ,  WU, Jianhui ,  HWANG, Taewook ,  VEDANTHAM, Ramanujam ,  DINH-NGOC, Charles ,  PUTHANANGADY, Thomas ,  SCHULZ, Eric, M. ,  RAMANATH, Srinivasan

Inventor： WU, Jianhui ,  HWANG, Taewook ,  VEDANTHAM, Ramanujam ,  DINH-NGOC, Charles ,  PUTHANANGADY, Thomas ,  SCHULZ, Eric, M. ,  RAMANATH, Srinivasan

IPC: H01L21/304

CPC classification number: B24B53/017 ,  B24B53/12 ,  B24D3/08 ,  B24D18/00

Abstract: An abrasive tool for conditioning CMP pads includes abrasive grains coupled to a substrate through a metal bond and a coating, e.g., a fluorine-doped nanocomposite coating. The abrasive grains can be arranged in a self-avoiding random distribution. In one implementation, an abrasive tool includes a coated plate and a coated abrasive article that has two abrading surfaces. Other implementations related to a process for producing an abrasive tool that includes a coating at one or more of its surfaces. Also described are methods for dressing a CMP pad.

Abstract translation: 用于调节CMP垫的研磨工具包括通过金属键和涂层（例如氟掺杂的纳米复合涂层）与基底相连的磨料颗粒。 磨粒可以以自回避的随机分布布置。 在一个实施方案中，研磨工具包括涂覆的板和具有两个研磨表面的涂覆的磨料制品。 涉及用于生产研磨工具的方法的其它实施方式，其包括在其一个或多个表面上的涂层。 还描述了用于修整CMP垫的方法。

公开(公告)号：WO2008083073A1

公开(公告)日：2008-07-10

申请号：PCT/US2007/088550

申请日：2007-12-21

Applicant: SAINT-GOBAIN CERAMICS & PLASTICS, INC. ,  TANIKELLA, Brahmanandam V. ,  SIMPSON, Matthew A. ,  CHINNAKARUPPAN, Palaniappan ,  RIZZUTO, Robert A. ,  CHERIAN, Isaac K. ,  VEDANTHAM, Ramanujam

Inventor： TANIKELLA, Brahmanandam V. ,  SIMPSON, Matthew A. ,  CHINNAKARUPPAN, Palaniappan ,  RIZZUTO, Robert A. ,  CHERIAN, Isaac K. ,  VEDANTHAM, Ramanujam

IPC: C30B29/20

CPC classification number: C30B29/20

Abstract: A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 µm/cm 2 , wherein nTTV is total thickness variation normalized for surface area of the generally planar surface, the substrate having a diameter not less than about 9.0 cm.

Abstract translation: 蓝宝石衬底包括具有选自由a面，r面，m面和c面取向组成的组的结晶取向，且具有不大于约0.037μm/ cm 2的nTTV的大致平坦的表面， SUP> 2，其中nTTV是对于大体上平坦的表面的表面积归一化的总厚度变化，所述基底具有不小于约9.0cm的直径。