ARTICLE HAVING DIAMOND-ONLY CONTACT SURFACES
    3.
    发明申请
    ARTICLE HAVING DIAMOND-ONLY CONTACT SURFACES 审中-公开
    具有金刚石接触表面的物品

    公开(公告)号:WO2016164498A1

    公开(公告)日:2016-10-13

    申请号:PCT/US2016/026272

    申请日:2016-04-06

    Abstract: Diamond-containing articles such as composite materials shaped as some specific article, can be engineered such that bodies that contact the article only contact diamond. In an embodiment, the article may be in the form of equipment for handling semiconductor wafers such as vacuum or electrostatic chucks. In one embodiment, the diamond-containing article can be a composite of diamond particulate reinforcing a Si/SiC body such as reaction-bonded SiC. Lapping the diamond-reinforced RBSC body with progressively finer diamond grit removes some of the SiC/Si matrix material, leaving diamond particles of uniform height "standing proud" above the rest of the surface of the formed article. Further, if the diamond-containing article is sufficiently electrically conductive, it may be machinable using electrical discharge machining.

    Abstract translation: 含有金刚石的物品,例如形状为一些特定物品的复合材料,可以被设计成使得接触物品的物体仅接触钻石。 在一个实施例中,制品可以是用于处理诸如真空或静电卡盘的半导体晶片的设备的形式。 在一个实施方案中,含金刚石的制品可以是金刚石颗粒增强Si / SiC体的复合物,例如反应结合的SiC。 使用逐渐更细的金刚石砂粒研磨金刚石增强的RBSC体,去除了一些SiC / Si基体材料,使成形制品表面其余部分均匀高度的金刚石颗粒“站立起来”。 此外,如果含有金刚石的制品具有足够的导电性,则可以使用放电加工机械加工。

    POLYCRYSTALLINE DIAMOND CONSTRUCTION AND METHOD FOR MAKING SAME
    5.
    发明申请
    POLYCRYSTALLINE DIAMOND CONSTRUCTION AND METHOD FOR MAKING SAME 审中-公开
    多晶金刚石构造及其制造方法

    公开(公告)号:WO2013064435A1

    公开(公告)日:2013-05-10

    申请号:PCT/EP2012/071295

    申请日:2012-10-26

    Abstract: A polycrystalline diamond construction comprises diamond grains exhibiting inter-granular bonding and defining a plurality of interstitial regions, and a non-diamond phase at least partially filling a plurality of the interstitial regions to form non-diamond pools. The percentage of non-diamond phase in the total area of a cross-section of the body of polycrystalline diamond material is between around 0 to 5 %, and the average nearest neighbour distance between grains of the non-diamond phase is less than around 1.3 microns in an analysed image of a cross-section through the body of polycrystalline material when analysed using an image analysis technique at a magnification of around 1000 and an image area of 1280 by 960 pixels; or is between around 5 to 10 %, and the average nearest neighbour distance between grains of the non-diamond phase is less than around 1.04 microns, or is between around 10 to 15 %, and the average nearest neighbour distance between grains of the non-diamond phase is less than around 1.04 microns, or is between around 15 to 30%, and the average nearest neighbour distance between grains of the non-diamond phase is less than around 0.8 microns.

    Abstract translation: 多晶金刚石结构包括呈现颗粒间结合并限定多个间隙区域的金刚石晶粒和至少部分填充多个间隙区域以形成非金刚石池的非金刚石相。 非金刚石相在多晶金刚石材料主体截面总面积中的百分比在0至5%之间,非金刚石相晶粒之间的平均最近相邻距离小于约1.3 当使用图像分析技术以大约1000的放大倍率和1280×960像素的图像区域分析时,通过多晶材料体的横截面的分析图像中的微米; 或在约5至10%之间,并且非金刚石相的晶粒之间的平均最近相邻距离小于约1.04微米,或者在约10至15%之间,并且非金刚石晶粒之间的平均最近邻距离 - 金刚石相小于约1.04微米,或者在约15至30%之间,并且非金刚石相的晶粒之间的平均最近相邻距离小于约0.8微米。

    FUSION BONDED EPOXY REMOVAL TOOL
    7.
    发明申请
    FUSION BONDED EPOXY REMOVAL TOOL 审中-公开
    FUSION粘结环氧去除工具

    公开(公告)号:WO2011056509A3

    公开(公告)日:2011-10-27

    申请号:PCT/US2010053962

    申请日:2010-10-25

    Inventor: SWIATOWY JEFFREY

    CPC classification number: B24D13/142 B24D3/10 B24D7/06

    Abstract: A tool (10) for removing fusion bonded epoxy coating from the surface of a pipe has an elongate rotatable shaft (12) suitable for being received in a rotating tool holder of a machine. Extending radially outward of the distal end (16) of the shaft (12) are a plurality of fingers (40), the outer ends of which are spaced apart. Each of the fingers (40) is made of a spring metal, and at the distal end of each finger is an abrasive pad (60) having diamond particles embedded in soft metal. Spring force is independently applied by each spring finger (40) to its associated abrasive pad (60).

    Abstract translation: 用于从管表面去除熔接环氧树脂涂层的工具(10)具有适于容纳在机器的旋转工具架中的细长的可旋转轴(12)。 在轴(12)的远端(16)的径向外侧延伸的是多个指状物(40),其外端间隔开。 每个手指(40)由弹簧金属制成,并且在每个手指的远端处是具有镶嵌在软金属中的金刚石颗粒的研磨垫(60)。 每个弹簧手指(40)独立地施加弹簧力到其相关联的研磨垫(60)。

    AN ABRASIVE MATERIAL, WHEEL AND TOOL FOR GRINDING SEMICONDUCTOR SUBSTRATES, AND METHOD OF MANUFACTURE OF SAME
    10.
    发明申请
    AN ABRASIVE MATERIAL, WHEEL AND TOOL FOR GRINDING SEMICONDUCTOR SUBSTRATES, AND METHOD OF MANUFACTURE OF SAME 审中-公开
    用于研磨半导体基板的抛光材料,轮和工具及其制造方法

    公开(公告)号:WO2009138435A1

    公开(公告)日:2009-11-19

    申请号:PCT/EP2009/055786

    申请日:2009-05-13

    CPC classification number: B24B7/228 B24D3/10 B24D5/06 B24D7/06 B24D18/00

    Abstract: A cup wheel for a grinding tool for use in grinding semiconductor substrates is presented herein, the wheel comprising: a hub having a pair of opposing faces and a peripheral rim linking said faces; and at least one grinding segment mounted on and upstanding from at least one face of the hub; wherein in use, as the wheel is rotated, the face ofthe hub on which the at least one grinding segment is mounted is directed towards the substrate to be ground, to bring the at least one grinding segment into contact withthe substrate, and wherein at least one pair of side faces of the at least one grinding segment intersect at a leading edge which substantially faces the direction of travel of the grinding segment as the wheel rotates.

    Abstract translation: 本文提出了一种用于研磨半导体衬底的研磨工具的杯轮,该轮包括:轮毂,其具有一对相对面和连接所述面的外围边缘; 以及至少一个磨削段,其安装在所述轮毂的至少一个面上并且直立; 其中在使用中,当车轮旋转时,其上安装有至少一个研磨段的毂的表面被引向待研磨的基底,以使至少一个研磨段与基底接触,并且其中至少 所述至少一个研磨段的一对侧面在前进边缘处相交,所述前缘基本上面对所述研磨段随所述轮旋转时的行进方向。

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