公开(公告)号：WO2014035486A1

公开(公告)日：2014-03-06

申请号：PCT/US2013/032702

申请日：2013-03-15

Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY ,  MURARKA, Apoorva ,  BULOVIC, Vladimir ,  WANG, Annie, I-jen ,  LANG, Jeffrey, Hastings

Inventor： MURARKA, Apoorva ,  BULOVIC, Vladimir ,  WANG, Annie, I-jen ,  LANG, Jeffrey, Hastings

IPC: B81B7/04 ,  G02B26/08

CPC classification number: B81B7/04 ,  B06B1/02 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/0127 ,  B81B2207/053 ,  B81C2201/0185 ,  B81C2201/0194 ,  G02B26/0825 ,  G02B26/0841 ,  G10K9/12

Abstract: The disclosed embodiments provide sensitive pixel arrays formed using solvent-assisted or unassisted release processes. Exemplary devices include detectors arrays, tunable optical instruments, deflectable mirrors, digital micro-mirrors, digital light processing chips, tunable optical micro-cavity resonators, acoustic sensors, acoustic actuators, acoustic transducer devices and capacitive zipper actuators to name a few.

Abstract translation: 所公开的实施例提供了使用溶剂辅助或非辅助释放方法形成的敏感像素阵列。 示例性设备包括检测器阵列，可调谐光学仪器，偏转镜，数字微镜，数字光处理芯片，可调谐光学微腔谐振器，声学传感器，声学致动器，声学换能器装置和电容拉链致动器。

公开(公告)号：WO2012061830A1

公开(公告)日：2012-05-10

申请号：PCT/US2011/059639

申请日：2011-11-07

Applicant: MASSACHUSETTS INSTITUTE OF TECHNOLOGY ,  BULOVIC, Vladimir ,  LANG, Jeffrey H. ,  PAYDAVOSI, Sarah ,  WANG, Annie I-Jen ,  ANDREW, Trisha L. ,  MURARKA, Apoorva ,  NIROUI, Farnaz ,  YAUL, Frank ,  GROSSMAN, Jeffrey C.

Inventor： BULOVIC, Vladimir ,  LANG, Jeffrey H. ,  PAYDAVOSI, Sarah ,  WANG, Annie I-Jen ,  ANDREW, Trisha L. ,  MURARKA, Apoorva ,  NIROUI, Farnaz ,  YAUL, Frank ,  GROSSMAN, Jeffrey C.

IPC: H01L45/00

CPC classification number: H01L29/84 ,  H01L27/0629 ,  H01L29/41725 ,  H01L45/00 ,  Y10S977/742

Abstract: A method and apparatus for making analog and digital electronics which includes a composite including a squishable material doped with conductive particles. A microelectromechanical systems (MEMS) device has a channel made from the composite, where the channel forms a primary conduction path for the device. Upon applied voltage, capacitive actuators squeeze the composite, causing it to become conductive. The squishable device includes a control electrode, and a composite electrically and mechanically connected to two terminal electrodes. By applying a voltage to the control electrode relative to a first terminal electrode, an electric field is developed between the control electrode and the first terminal electrode. This electric field results in an attractive force between the control electrode and the first terminal electrode, which compresses the composite and enables electric control of the electron conduction from the first terminal electrode through the channel to the second terminal electrode.

Abstract translation: 一种用于制造模拟和数字电子学的方法和装置，其包括掺杂有导电颗粒的可堆置材料的复合材料。 微机电系统（MEMS）装置具有由复合材料制成的通道，其中通道形成器件的主导通路径。 在施加电压时，电容执行器挤压复合材料，使其变得导电。 可挤压装置包括控制电极，以及电气和机械连接到两个端子电极的复合体。 通过相对于第一端子电极向控制电极施加电压，在控制电极和第一端子电极之间产生电场。 该电场导致控制电极和第一端子电极之间的吸引力，其压缩复合材料并且能够电控制从第一端子电极通过通道到第二端子电极的电子传导。