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公开(公告)号:WO2011026295A1
公开(公告)日:2011-03-10
申请号:PCT/CN2009/076037
申请日:2009-12-25
IPC: B65G49/06 , H01L21/677
CPC classification number: H01L21/67706 , C03B35/163 , C03B35/165 , C03B35/186
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公开(公告)号:WO2011120269A1
公开(公告)日:2011-10-06
申请号:PCT/CN2010/074983
申请日:2010-07-05
IPC: H01L21/677 , H01L21/673
CPC classification number: H01L21/67706 , H01L21/67721 , H01L21/67769
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公开(公告)号:WO2011116561A1
公开(公告)日:2011-09-29
申请号:PCT/CN2010/074939
申请日:2010-07-02
CPC classification number: H01R9/18 , H01R13/533 , H01R2101/00
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