公开(公告)号：WO2022119769A1

公开(公告)日：2022-06-09

申请号：PCT/US2021/060988

申请日：2021-11-29

Applicant: APPLIED MATERIALS, INC.

Inventor： SEVILLA, Alejandro ,  LEI, Wei-Sheng ,  GOPALAKRISHNANNAIR, Girishkumar ,  RANGASAMY, Ezhiylmurugan ,  ISHIKAWA, David Masayuki ,  HERLE, Subramanya P.

IPC: C23C16/56 ,  C23C16/40 ,  C23C16/54 ,  C23C28/00 ,  H01M4/1395 ,  H01M4/04

Abstract: Exemplary processing methods may include translating a lithium film beneath a first showerhead. The methods may include introducing an oxidizer gas through the first showerhead onto the lithium film. The methods may include forming an oxide monolayer on the lithium film. The oxide monolayer may be or include the oxidizer gas adsorbed on the lithium film. The methods may include translating the lithium film beneath a second showerhead after forming the oxide monolayer. The methods may include introducing a carbon source gas through the first showerhead onto the lithium film. The methods may also include converting the oxide monolayer into a carbonate passivation layer through reaction of the oxide monolayer with the carbon source gas.