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公开(公告)号：WO2022216897A1
公开(公告)日：2022-10-13
申请号：PCT/US2022/023774
申请日：2022-04-07
Applicant: APPLIED MATERIALS, INC.
Inventor： HERLE, Subramanya P. , GOPALAKRISHNAN NAIR, Girish Kumar , STOCK, Daniel , KUNDU, Sambhu , RANGASAMY, Ezhiylmurugan
IPC: H01M4/1393 , H01M4/1395 , H01M4/04 , H01M10/052 , H01M4/02
Abstract: A method and apparatus for fabricating electrodes used in energy storage devices are provided. In some implementations a surface of the electrode is activated for (a) a pre-treatment process to remove loosely held particles from the electrode surface; (b) a pre-treatment process to activate the surface of the electrode material for improved bonding or wetting for subsequently deposited materials; (c) a post-treatment of the pre-lithiation layer to improve subsequent bonding with additionally deposited layer, for example, passivation layers; and/or (d) a post-treatment of the pre-lithiation layer to improve/accelerate absorption of the lithium into the underlying electrode material.
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公开(公告)号：WO2020123174A1
公开(公告)日：2020-06-18
申请号：PCT/US2019/063995
申请日：2019-12-02
Applicant: APPLIED MATERIALS, INC.
Inventor： ISHIKAWA, David Masayuki , RANGASAMY, Ezhiylmurugan , GOIHL, Thomas , HERLE, Subramanya P.
Abstract: A method and apparatus for continuous web processing systems for pre- lithiating Li-ion battery substrates is provided. The modular processing system comprises a common transfer chamber body defining a transfer volume. The system further comprises a first vertical chamber body defining a first processing volume and positioned on the common transfer chamber body. The transfer volume is in fluid communication with the first processing volume. The system further comprises a second vertical chamber body defining a second processing volume and positioned on the common transfer chamber body. The transfer volume is in fluid communication with the second processing volume. The system further comprises a reel-to-reel system operable to transport a continuous flexible substrate having an electrode structure formed thereon. The continuous flexible substrate extends from the transfer volume, through the first processing volume, returning to the transfer volume, through the second processing volume, and returning to the transfer volume.
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公开(公告)号：WO2022125442A1
公开(公告)日：2022-06-16
申请号：PCT/US2021/062019
申请日：2021-12-06
Applicant: APPLIED MATERIALS, INC. [US]/[US]
Inventor： SEVILLA, Alejandro , RANGASAMY, Ezhiylmurugan , HERLE, Subramanya P. , ISHIKAWA, David Masayuki
IPC: H01M4/139 , H01M4/04 , H01M4/1393 , H01M4/1395 , H01M10/052 , C23C14/56 , C23C14/34
Abstract: A method and system for forming lithium anode devices are provided. In one embodiment, the methods and systems form pre-lithiated Group-IV alloy-type nanoparticles (NP's), for example, Li-Z where Z is Ge, Si, or Sn. In another embodiment, the methods and systems synthesize Group-IV nanoparticles and alloy the Group-IV nanoparticles with lithium. The Group-IV nanoparticles can be made on demand and premixed with anode materials or coated on anode materials. In yet another embodiment, the methods and systems form lithium metal-free silver carbon ("Ag-C") nanocomposites (NC's). In yet another embodiment, a method utilizing silver (PVD) and carbon (PECVD) co-deposition to make anode coatings that can regulate lithium nucleation energy to minimize dendrite formation is provided.
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公开(公告)号：WO2020256806A1
公开(公告)日：2020-12-24
申请号：PCT/US2020/026013
申请日：2020-03-31
Applicant: APPLIED MATERIALS, INC.
Inventor： RANGASAMY, Ezhiylmurugan , HERLE, Subramanya P.
IPC: H01M4/1395 , H01M4/38 , H01M4/66 , H01M4/62 , H01M4/04 , H01M10/052 , H01M4/02
Abstract: Interfacial films, which are both electronic conducting and ion conducting, for anode films are provided. The one or more protective films described herein may be mixed conduction materials, which are both electronic conducting and ion-conducting. The one or more protective films described herein may include materials selected from lithium transition metal dichalcogenides, Li 9 Ti 5 O 12 , or a combination thereof. The lithium transition metal dichalcogenide includes a transition metal dichalcogenide having the formula MX 2 , wherein M is selected from Ti, Mo, or W and X is selected from S, Se, or Te. The transition metal dichalcogenide may be selected from TiS 2 , MoS 2 , WS 2 , or a combination thereof. The lithium transition metal dichalcogenide may be selected from lithium-titanium-disulfide (e.g., LiTiS 2 ), lithium-tungsten-disulfide (e.g., LiWS 2 ), lithium-molybdenum-disulfide (e.g., LiMoS 2 ), or a combination thereof.
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Patent Agency Ranking
公开(公告)号：WO2022125441A1
公开(公告)日：2022-06-16
申请号：PCT/US2021/062013
申请日：2021-12-06
Applicant: APPLIED MATERIALS, INC. [US]/[US]
Inventor： ISHIKAWA, David Masayuki , GOPALAKRISHNANNAIR, Girish Kumar , RANGASAMY, Ezhiylmurugan , ALVAREZ, David , ZHAO, Kent
IPC: C23C14/54 , C23C14/56 , H01M4/1395
Abstract: Metrology systems and processing methods for continuous lithium ion battery (LIB) anode pre-lithiation and solid metal anode protection are provided. In some embodiments, the metrology system integrates at least one complementary non-contact sensor to measure at least one of surface composition, coating thickness, and nanoscale roughness. The metrology system and processing methods can be used to address anode edge quality. The metrology system and methods can facilitate high quality and high yield closed loop anode pre-lithiation and anode protection layer deposition, alloy-type anode pre-lithiation stage control improves LIB coulombic efficiency, and anode coating with pinhole free and electrochemically active protection layers resist dendrite formation.
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公开(公告)号：WO2022119769A1
公开(公告)日：2022-06-09
申请号：PCT/US2021/060988
申请日：2021-11-29
Applicant: APPLIED MATERIALS, INC.
Inventor： SEVILLA, Alejandro , LEI, Wei-Sheng , GOPALAKRISHNANNAIR, Girishkumar , RANGASAMY, Ezhiylmurugan , ISHIKAWA, David Masayuki , HERLE, Subramanya P.
Abstract: Exemplary processing methods may include translating a lithium film beneath a first showerhead. The methods may include introducing an oxidizer gas through the first showerhead onto the lithium film. The methods may include forming an oxide monolayer on the lithium film. The oxide monolayer may be or include the oxidizer gas adsorbed on the lithium film. The methods may include translating the lithium film beneath a second showerhead after forming the oxide monolayer. The methods may include introducing a carbon source gas through the first showerhead onto the lithium film. The methods may also include converting the oxide monolayer into a carbonate passivation layer through reaction of the oxide monolayer with the carbon source gas.
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公开(公告)号：WO2022108940A1
公开(公告)日：2022-05-27
申请号：PCT/US2021/059554
申请日：2021-11-16
Applicant: APPLIED MATERIALS, INC.
Inventor： ISHIKAWA, David Masayuki , RANGASAMY, Ezhiylmurugan , VACHHANI, Kiran , HERLE, Subramanya P. , GOPALAKRISHNANNAIR, Girish Kumar
IPC: C23C14/56 , C23C14/50 , C23C14/54 , C23C14/06 , C23C14/30 , C23C14/34 , C23C16/54 , H01M4/139 , H01M4/04
Abstract: Methods, systems, and apparatuses for coating flexible substrates are provided. A coating system includes an unwinding module housing a feed reel capable of providing a continuous sheet of flexible material, a winding module housing a take-up reel capable of storing the continuous sheet of flexible material, and a processing module arranged downstream from the unwinding module, The processing module includes a plurality of sub-chambers arranged in sequence, each configured to perform one or more processing operations to the continuous sheet of flexible material. The processing module includes a coating drum capable of guiding the continuous sheet of flexible material past the plurality of sub-chambers along a travel direction. The sub-chambers are radially disposed about the coating drum and at least one of the sub-chambers includes a deposition module. The deposition module includes a pair of electron beam sources positioned side-by-side along a transverse direction perpendicular to the travel direction.
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公开(公告)号：WO2022040075A1
公开(公告)日：2022-02-24
申请号：PCT/US2021/046122
申请日：2021-08-16
Applicant: APPLIED MATERIALS, INC.
Inventor： DEPPISCH, Thomas , RANGASAMY, Ezhiylmurugan , BANGERT, Stefan , ALLISON, Mathew, Dean
Abstract: A processing system (100) for processing a flexible substrate (11) is described. The processing system (100) includes a vacuum chamber (110) having a wall (111) with an opening (112) for the flexible substrate (11), a substrate support (120) for supporting the flexible substrate (11) during transportation of the flexible substrate (11) through the opening (112), and a measurement assembly (130) for measuring at least one of a property of the flexible substrate (11) and a property of one or more coatings (12) on the flexible substrate (11). The measurement assembly (130) and the substrate support (120) are attached to the wall (111).
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公开(公告)号：WO2022035661A1
公开(公告)日：2022-02-17
申请号：PCT/US2021/044537
申请日：2021-08-04
Applicant: APPLIED MATERIALS, INC.
Inventor： RANGASAMY, Ezhiylmurugan , DELMAS, Jean , FREY, Bernard , HERLE, Subramanya P. , GOPALAKRISHNANNAIR, Girish Kumar
IPC: H01M4/1393 , H01M4/1395 , H01M4/04 , H01M10/0525 , C23C14/56 , C23C16/54 , B05C9/12
Abstract: A method and system for fabricating a pre-lithiated electrode structure are provided. The method includes supplying a first continuous web substrate from an unwinder roller to a winder roller. The first continuous web substrate includes a layer of lithium metal. The method further includes supplying a second continuous web substrate comprising a layer of patterned anode material adjacent to the first continuous web substrate. The first continuous web substrate and the second continuous web substrate are wound together on the unwinder roller, wherein a surface of the layer of anode material contacts a surface of the layer of lithium metal. Pressure is applied to the first continuous web substrate and the second continuous web substrate to pre-lithiate the patterned anode material, wherein applying pressure comprises tensioning at least one of the unwinder roller and the winder roller.
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