公开(公告)号：WO2022189088A1

公开(公告)日：2022-09-15

申请号：PCT/EP2022/053207

申请日：2022-02-10

Applicant: ASML NETHERLANDS B.V.

Inventor： TREES, Dietmar, Uwe, Herbert ,  DRIESSEN, Theodorus, Wilhelmus ,  SAMS, Benjamin, Andrew ,  ATENCIO, Edgardo, Zamora ,  DVORAK, Ondrej

IPC: F16K13/10 ,  F16K99/00 ,  F16L55/103 ,  H05G2/00

Abstract: A component for a target material transfer system for a laser-produced plasma radiation source and a method of manufacturing such a component are disclosed. The component, which may, for example, be a target material transfer line, a freeze valve, or a flow restrictor, or some combination of this functionality, is made up of a glass capillary body sealed with glass-to-metal seals at both of its ends to a respective metal fitting. The method of manufacturing involves heating the ends of the glass capillary and then forming them to conform with, and forming a glass-to-metal seal with, the interior contours of the respective channels in each of the metal fittings.

公开(公告)号：WO2021239382A1

公开(公告)日：2021-12-02

申请号：PCT/EP2021/061258

申请日：2021-04-29

Applicant: ASML NETHERLANDS B.V.

Inventor： SWERDLOW, Ethan, Marcus ,  BESSEMS, David ,  TEDROW, Jon, David ,  RAI, Sandeep ,  CAVALIER, Grant, Steven ,  DRIESSEN, Theodorus, Wilhelmus ,  SAMS, Benjamin, Andrew ,  TREES, Dietmar, Uwe, Herbert ,  ATENCIO, Edgardo, Zamora ,  JOHNSON, Brandon, Michael

IPC: H05G2/00

Abstract: Systems, apparatuses, and methods are provided for measuring the level of a radiation fuel in an extreme ultraviolet (EUV) radiation system. In one example, a method for measuring the fuel level includes directing an inspection beam through a fuel tank view port at a top surface of the radiation fuel at a predetermined incident angle. The method can further include receiving 5a portion of the inspection beam reflected by the top surface of the radiation fuel at a sensor located adjacent to the view port. Also, the method can include measuring a distance to the top surface of the radiation fuel, and calculating a fill level of the radiation fuel in the fuel tank based on the measured distance.