公开(公告)号：WO2021239382A1

公开(公告)日：2021-12-02

申请号：PCT/EP2021/061258

申请日：2021-04-29

Applicant: ASML NETHERLANDS B.V.

Inventor： SWERDLOW, Ethan, Marcus ,  BESSEMS, David ,  TEDROW, Jon, David ,  RAI, Sandeep ,  CAVALIER, Grant, Steven ,  DRIESSEN, Theodorus, Wilhelmus ,  SAMS, Benjamin, Andrew ,  TREES, Dietmar, Uwe, Herbert ,  ATENCIO, Edgardo, Zamora ,  JOHNSON, Brandon, Michael

IPC: H05G2/00

Abstract: Systems, apparatuses, and methods are provided for measuring the level of a radiation fuel in an extreme ultraviolet (EUV) radiation system. In one example, a method for measuring the fuel level includes directing an inspection beam through a fuel tank view port at a top surface of the radiation fuel at a predetermined incident angle. The method can further include receiving 5a portion of the inspection beam reflected by the top surface of the radiation fuel at a sensor located adjacent to the view port. Also, the method can include measuring a distance to the top surface of the radiation fuel, and calculating a fill level of the radiation fuel in the fuel tank based on the measured distance.

公开(公告)号：WO2020187617A1

公开(公告)日：2020-09-24

申请号：PCT/EP2020/056144

申请日：2020-03-09

Applicant: ASML NETHERLANDS B.V.

Inventor： GOVINDARAJU, Abhiram, Lakshmi Ganesh ,  BESSEMS, David ,  RAI, Sandeep ,  WILLEMS, Petrus, Adrianus ,  KINCAL, Serkan ,  LUKENS, Joshua, Mark ,  TEDROW, Jon, David

IPC: H05G2/00

Abstract: Provided is an apparatus that includes a first reservoir system including a first fluid reservoir configured to be in fluid communication with a nozzle supply system during operation of the nozzle supply system, a second reservoir system including a second fluid reservoir configured to be, at least part of the time during operation of the nozzle supply system, in fluid communication with the first reservoir system, a priming system configured to produce a fluid target material from a solid matter, and a fluid control system fluidly connected to the priming system, the first reservoir system, the second reservoir system, and the nozzle supply system. The fluid control system is configured to, during operation of the nozzle supply system: isolate at least one fluid reservoir and the nozzle supply system from the priming system, and maintain a fluid flow path between at least one fluid reservoir and the nozzle supply system.