公开(公告)号：WO2021239382A1

公开(公告)日：2021-12-02

申请号：PCT/EP2021/061258

申请日：2021-04-29

Applicant: ASML NETHERLANDS B.V.

Inventor： SWERDLOW, Ethan, Marcus ,  BESSEMS, David ,  TEDROW, Jon, David ,  RAI, Sandeep ,  CAVALIER, Grant, Steven ,  DRIESSEN, Theodorus, Wilhelmus ,  SAMS, Benjamin, Andrew ,  TREES, Dietmar, Uwe, Herbert ,  ATENCIO, Edgardo, Zamora ,  JOHNSON, Brandon, Michael

IPC: H05G2/00

Abstract: Systems, apparatuses, and methods are provided for measuring the level of a radiation fuel in an extreme ultraviolet (EUV) radiation system. In one example, a method for measuring the fuel level includes directing an inspection beam through a fuel tank view port at a top surface of the radiation fuel at a predetermined incident angle. The method can further include receiving 5a portion of the inspection beam reflected by the top surface of the radiation fuel at a sensor located adjacent to the view port. Also, the method can include measuring a distance to the top surface of the radiation fuel, and calculating a fill level of the radiation fuel in the fuel tank based on the measured distance.

公开(公告)号：WO2023088595A1

公开(公告)日：2023-05-25

申请号：PCT/EP2022/076457

申请日：2022-09-22

Applicant: ASML NETHERLANDS B.V.

Inventor： VAN DRENT, William, Peter ,  DUVALL, Wyatt ,  SWERDLOW, Ethan, Marcus ,  ZIMMERMAN, Oliver

IPC: H05G2/00

Abstract: The present invention relates to an apparatus for supplying a liquid target material to a radiation source, comprising a reservoir system including a reservoir (410) configured to be connected to an ejection system (450) via an outlet (410a) of the reservoir and a pressurizing system to pressurize solid target material in the reservoir, wherein the apparatus further comprises a heating system (440) arranged between the reservoir and the ejection system to liquify the solid target material after being pressurized in the reservoir, and wherein the pressurizing system is configured to provide a pressure to the solid target material in the reservoir in order to extrude the solid target material through the outlet such that the liquid target material entering the ejection system is at a pressure of at least (200) bar.