公开(公告)号：WO2021165114A1

公开(公告)日：2021-08-26

申请号：PCT/EP2021/053190

申请日：2021-02-10

Applicant: ASML NETHERLANDS B.V.

Inventor： STORM, Arjen, Benjamin ,  VAN GURP, Johan, Frederik, Cornelis ,  ERVASTI, Henri, Kristian ,  AYAL, Aaron, Yang-Fay ,  STEENBRINK, Stijn, Wilem, Herman, Karel ,  WIELAND, Marco, Jan-Jaco

IPC: H01J9/42 ,  H01J37/09

Abstract: Disclosed herein is an electron-optical assembly testing system for testing an electron-optical assembly, the system comprising: a source of charged particles (601) configured to emit a beam of charged particles; an electron-optical assembly holder (604) configured to hold an electron-optical assembly (401) to be tested such that, when the system is in use with an electron-optical assembly held by the electron-optical assembly holder, the electron-optical assembly is illuminated by the beam; and a sub-beam detector (607) for detecting sub-beams of charged particles that have been transmitted through the electron-optical assembly.

公开(公告)号：WO2021190976A1

公开(公告)日：2021-09-30

申请号：PCT/EP2021/056519

申请日：2021-03-15

Applicant: ASML NETHERLANDS B.V.

Inventor： STORM, Arjen, Benjamin ,  VAN GURP, Johan, Frederik, Cornelis ,  DE LANGEN, Johannes, Cornelis, Jacobus ,  AYAL, Aaron, Yang-Fay ,  BRUININK, Michiel, Matthieu ,  VAN DEN BERG, Christiaan, Ruben ,  OTTEN, Christiaan ,  DINU GURTLER, Laura ,  SMITS, Marc

IPC: H01J37/09 ,  G01N23/2251 ,  H01J37/317 ,  B41J2/14 ,  H01J9/02 ,  H01J29/80 ,  H01J2237/0453 ,  H01J2237/1205 ,  H01J2237/31774 ,  H01J37/3177

Abstract: Disclosed herein is a substrate stack comprising a plurality of substrates, wherein: each substrate in the substrate stack comprises at least one alignment opening set; the at least one alignment opening set in each substrate is aligned for a light beam to pass through corresponding alignment openings in each substrate; and each substrate comprises at least one alignment opening that has a smaller diameter than the corresponding alignment openings in the other substrates.