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公开(公告)号：WO2021249872A1
公开(公告)日：2021-12-16
申请号：PCT/EP2021/064949
申请日：2021-06-03
Applicant: ASML NETHERLANDS B.V.
Inventor： OTTEN, Christiaan , CRANS, Peter-Paul , SMITS, Marc , DEL TIN, Laura , TEUNISSEN, Christan , HUANG, Yang-Shan , STEENBRINK, Stijn, Wilem, Herman, Karel , HU, Xuerang , XI, Qingpo , LUO, Xinan , LIU, Xuedong
IPC: H01J37/02 , H01J37/18 , H01J2237/184 , H01J2237/2006 , H01J2237/20214 , H01J2237/2817 , H01J37/023 , H01J37/14 , H01J37/1477 , H01J37/15 , H01J37/20 , H01J37/244 , H01J37/28
Abstract: 2019P00380WO 68 ABSTRACT Disclosed herein is a module for supporting a device configured to manipulate charged particle paths in a charged particle apparatus, the module comprising: a support arrangement configured to support the device, wherein the device is configured to manipulate a charged particle path within the charged particle apparatus; and a support positioning system configured to move the 5 support arrangement within the module; wherein the module is arranged to be field replaceable in the charged particle apparatus. [FIG. 7]
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公开(公告)号：WO2022194482A1
公开(公告)日：2022-09-22
申请号：PCT/EP2022/053966
申请日：2022-02-17
Applicant: ASML NETHERLANDS B.V.
Inventor： OTTEN, Christiaan , TEUNISSEN, Christan , SCHEEPERS, Paul, Hendricus , MEIJER, Joseph, Reinier
Abstract: Disclosed herein is a flood column for projecting a charged particle flooding beam along a beam path towards a sample to flood the sample with charged particles prior to assessment of the flooded sample using an assessment column, the flood column comprising: an anchor body arranged along the beam path; a lens arrangement arranged in a down-beam part of the flood column; and a lens support arranged between the anchor body and the lens arrangement; wherein the lens support is configured to position the lens arrangement and the anchor body relative to each other; the lens support comprises an electrical insulator; and the lens support is in the direct line of sight of at least a portion of the beam path in the down-beam part.
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公开(公告)号：WO2021190976A1
公开(公告)日：2021-09-30
申请号：PCT/EP2021/056519
申请日：2021-03-15
Applicant: ASML NETHERLANDS B.V.
Inventor： STORM, Arjen, Benjamin , VAN GURP, Johan, Frederik, Cornelis , DE LANGEN, Johannes, Cornelis, Jacobus , AYAL, Aaron, Yang-Fay , BRUININK, Michiel, Matthieu , VAN DEN BERG, Christiaan, Ruben , OTTEN, Christiaan , DINU GURTLER, Laura , SMITS, Marc
IPC: H01J37/09 , G01N23/2251 , H01J37/317 , B41J2/14 , H01J9/02 , H01J29/80 , H01J2237/0453 , H01J2237/1205 , H01J2237/31774 , H01J37/3177
Abstract: Disclosed herein is a substrate stack comprising a plurality of substrates, wherein: each substrate in the substrate stack comprises at least one alignment opening set; the at least one alignment opening set in each substrate is aligned for a light beam to pass through corresponding alignment openings in each substrate; and each substrate comprises at least one alignment opening that has a smaller diameter than the corresponding alignment openings in the other substrates.
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公开(公告)号：WO2021180496A1
公开(公告)日：2021-09-16
申请号：PCT/EP2021/054983
申请日：2021-03-01
Applicant: ASML NETHERLANDS B.V.
Inventor： VAN SOEST, Jurgen , VAN DER KROON, Boudewijn, Weijert, Herman, Jan , TEUNISSEN, Christan , OTTEN, Christiaan
Abstract: Disclosed herein is an aperture body (500) for passing a portion of a charged particle beam propagating along a beam path comprising an axis, the aperture body comprising: an up-beam facing surface (510); a chamber portion (511) comprising an up-beam end, a down-beam end and an up-beam plate (509), wherein the up-beam plate extends radially inwards from the up-beam end and the up-beam plate is configured to define an entrance opening (501) around the beam path; wherein: the up-beam facing surface extends radially inwards from the down-beam end; the up-beam facing surface comprises an aperture portion (504) that is configured to define an opening around the beam path; and the opening defined by the aperture portion is smaller than the entrance opening.
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