公开(公告)号：WO2022223220A1

公开(公告)日：2022-10-27

申请号：PCT/EP2022/057476

申请日：2022-03-22

Applicant: ASML NETHERLANDS B.V.

Inventor： VAN DE MEERENDONK, Remco ,  DIRECKS, Daniel, Jozef, Maria ,  NAKIBOGLU, Günes ,  WATERSON, Nicholas, Peter ,  KLUGKIST, Joost, André ,  PEKELDER, Sven ,  VAN DER NET, Antonius, Johannus ,  JACOBS, Johannes, Henricus, Wilhelmus ,  OUDES, Jaap ,  JANSSEN, Gerardus, Arnoldus, Hendricus, Franciscus ,  VAN LIPZIG, Jeroen, Peterus, Johannes ,  VAN SANTVOORT, Johannes, Franciscus, Martinus

IPC: G03F7/20 ,  H01L21/67

Abstract: The invention provides a temperature conditioning system using conditioning liquid to condition a temperature of an object, comprising a conditioning conduit, a return conduit, a supply chamber, and a discharge chamber wherein the temperature conditioning system is arranged to provide a static pressure difference between the supply chamber outlet and the discharge chamber inlet to create a flow through the conditioning conduit. A lithography apparatus and a method of temperature conditioning an object is also described.

公开(公告)号：WO2022238069A1

公开(公告)日：2022-11-17

申请号：PCT/EP2022/059641

申请日：2022-04-11

Applicant: ASML NETHERLANDS B.V.

Inventor： VAN DE MEERENDONK, Remco ,  KUSTERS, Roan, Ireneo ,  WILBRINK, Mark, Wilhelmus, Ida, Maria ,  BRUST, Steve, Gregory ,  JANSSEN, Gerardus, Arnoldus, Hendricus, Franciscus ,  WATERSON, Nicholas, Peter ,  NAKIBOGLU, Günes

IPC: G03F7/20 ,  G03F7/70858 ,  G03F7/709

Abstract: The present invention relates to a flow restrictive element comprising an inlet part having a large cross-section entry and a small cross-section exit, an outlet part having a small cross-section entry and a large cross-section exit, and a spiral shaped tube having an inlet and an outlet, wherein the inlet is connected to the small cross-section exit of the inlet part and the outlet is connected to the small cross-section entry of the outlet part.

公开(公告)号：WO2021013441A1

公开(公告)日：2021-01-28

申请号：PCT/EP2020/066871

申请日：2020-06-18

Applicant: ASML NETHERLANDS B.V.

Inventor： NAKIBOGLU, Günes ,  WATERSON, Nicholas, Peter ,  VAN DE MEERENDONK, Remco ,  BRUST, Steve, Gregory ,  JAKOBS, Dirk, Martinus, Gerardus, Petrus, Wilhelmus ,  KOTTAPALLI, Shravan

IPC: G03F7/20

Abstract: Disclosed herein is a passive flow induced vibration (FIV) reduction system for use in a temperature conditioning system that controls the temperature of at least one component within a lithographic apparatus. This FIV reduction system comprises: a conduit that provides a flow path for a liquid through the system; a liquid filled cavity in fluid connection with the conduit, wherein the fluid connection is provided via one or more openings in the wall of the conduit; a membrane configured such that it separates the liquid in the liquid filled cavity from a gas at a substantially ambient pressure and the membrane is configured such that the compliance of the membrane reduces at least the low frequency FIVs in the liquid flowing through the conduit; and an end-stop located on the gas side of the membrane, wherein the end-stop is configured to limit the extent of deflection of the membrane.

公开(公告)号：WO2020114763A1

公开(公告)日：2020-06-11

申请号：PCT/EP2019/081738

申请日：2019-11-19

Applicant: ASML NETHERLANDS B.V.

Inventor： VAN ELTEN, Bas, Bastiaan, Cornelis, Gijsbertus ,  HABETS, Philippe, Jacqueline, Johannes, Hubertus, Anthonius ,  VAN DE MEERENDONK, Remco

IPC: G03F7/20 ,  F15D1/02

Abstract: The present invention relates to a flow restriction (200), a flow restriction assembly (400) and methods for manufacturing the flow restriction and the flow restriction assembly. The flow restriction for use in a pipe (300) so as to restrict the flow of a fluid comprises a body extending along an axis (290) and comprising i) a centre portion (240) having a constant cross section, ii) an upstream portion (220), wherein the cross-sectional area of the upstream portion monotonically increases in a downstream direction along the axis; and iii) a downstream portion (260), wherein the cross-sectional area of the downstream portion monotonically decreases in the downstream direction. The flow restriction further comprises a plurality of centre portion projections (280) for engaging the inner surface of a pipe, each of which projects from the surface of the centre portion in a direction perpendicular to the surface of the centre portion by a distance of less than 500 microns.