公开(公告)号：WO2016134892A3

公开(公告)日：2016-10-20

申请号：PCT/EP2016051174

申请日：2016-01-21

Applicant: ASML NETHERLANDS BV

Inventor： DE VRIES GOSSE CHARLES ,  DONKER RILPHO LUDOVICUS ,  NIENHUYS HAN-KWANG ,  VAN OOSTEN ANTON BERNHARD ,  KRUIZINGA BORGERT

IPC: G03F7/20 ,  G02B5/18

CPC classification number: G03F7/70158 ,  G02B5/1861 ,  G02B27/4222 ,  G02B27/4255 ,  G03F7/702 ,  G03F7/70558 ,  G03F7/70991

Abstract: An apparatus for receiving an input radiation beam at a beam receiving location and outputting from the beam receiving location one or more output radiation beams. The apparatus comprises: an optical element; and a movement mechanism. The optical element comprises a plurality of portions for receiving the input radiation beam. The movement mechanism is operable to move the plurality of portions so as selectively position each of the plurality of portions at the beam receiving location. When one of the plurality of portions is disposed in the beam receiving location it is configured to receive the input radiation beam and to scatter the input radiation beam so as to form the one or more output radiation beams. A direction of each of the one or more output radiation beams formed by each of the plurality of portions is substantially the same as a direction of a corresponding output radiation beam formed by each of the other portions. One or more properties of each of the plurality of portions differs from that of the other portions such that a power of at least one of the one or more output radiation beams formed by each of the plurality of portions is different to that of the corresponding output radiation beam formed by at least one of the other portions.

Abstract translation: 一种用于在波束接收位置接收输入辐射束并从波束接收位置输出一个或多个输出辐射束的装置。 该装置包括：光学元件; 和运动机制。 光学元件包括用于接收输入辐射束的多个部分。 移动机构可操作以移动多个部分，以便选择性地将多个部分中的每一个位置放置在束接收位置处。 当多个部分中的一个部分设置在光束接收位置时，其被配置为接收输入辐射束并散射输入辐射束，以便形成一个或多个输出辐射束。 由多个部分中的每一个形成的一个或多个输出辐射束中的每一个的方向基本上与由每个其它部分形成的对应的输出辐射束的方向相同。 多个部分中的每个部分的一个或多个属性与其他部分的不同之处在于，由多个部分中的每一个部分形成的一个或多个输出辐射束中的至少一个的功率与相应输出的功率不同 辐射束由至少一个其它部分形成。

公开(公告)号：WO2016139055A3

公开(公告)日：2016-10-27

申请号：PCT/EP2016053216

申请日：2016-02-16

Applicant: ASML NETHERLANDS BV

Inventor： NIENHUYS HAN-KWANG ,  BOGAART ERIK WILLEM ,  DONKER RILPHO LUDOVICUS ,  KRUIZINGA BORGERT ,  LOOPSTRA ERIK ROELOF ,  BOTMA HAKO ,  DE VRIES GOSSE CHARLES ,  FRIJNS OLAV WALDEMAR VLADIMIR ,  BASELMANS JOHANNES JACOBUS MATHEUS

IPC: G03F7/20 ,  G02B5/02

CPC classification number: G03F7/70191 ,  G02B5/0221 ,  G02B5/0268 ,  G02B5/0284 ,  G03F7/70025 ,  G03F7/7005 ,  G03F7/70075 ,  G03F7/70991 ,  H01S3/2308 ,  H05G2/008

Abstract: A radiation system comprising a beam splitting apparatus configured to receive a main radiation beam and split the main radiation beam into a plurality of branch radiation beams and a radiation alteration device arranged to receive an input radiation beam and output a modified radiation beam, wherein the radiation alteration device is configured to provide an output modified radiation beam which has an increased etendue, when compared to the received input radiation beam, wherein the radiation alteration device is arranged such that the input radiation beam which is received by the radiation alteration device is a main radiation beam and the radiation alteration device is configured to provide a modified main radiation beam to the beam splitting apparatus, or wherein the radiation alteration device is arranged such that the input radiation beam which is received by the radiation alteration device is a branch radiation beam output from the beam splitting apparatus.

Abstract translation: 一种辐射系统，包括分束装置，其被配置为接收主辐射束并将主辐射束分裂成多个分支辐射束，以及布置成接收输入辐射束并输出修改的辐射束的辐射改变装置，其中辐射 改变装置被配置为提供与所接收的输入辐射束相比具有增加的光密度的输出修改的辐射束，其中所述辐射改变装置被布置成使得由所述辐射改变装置接收的输入辐射束是主 辐射束和辐射改变装置被配置为向分束装置提供修改的主辐射束，或者其中辐射改变装置被布置成使得由辐射改变装置接收的输入辐射束是分支辐射束输出 从分束装置。

公开(公告)号：WO2015135912A3

公开(公告)日：2015-11-12

申请号：PCT/EP2015054913

申请日：2015-03-10

Applicant: ASML NETHERLANDS BV

Inventor： LOOPSTRA ERIK ROELOF ,  BANINE VADIM YEVGENYEVICH ,  BARTRAIJ PETRUS RUTGERUS ,  DONKER RILPHO LUDOVICUS ,  AKKERMANS JOHANNES ANTONIUS GERARDUS

IPC: G03F7/20 ,  H01S3/09 ,  H05H7/00 ,  H05H7/04

CPC classification number: G03F7/70008 ,  G03F7/70025 ,  G03F7/7005 ,  G03F7/70208 ,  G03F7/70808 ,  H01S3/0903 ,  H05H7/04

Abstract: The present invention is concerned with a free electron laser. The free electron laser comprises an electron source operable to emit a beam of electrons, a particle accelerator operable to accelerate the beam of electrons to relativistic energies, an undulator operable to guide the relativistic electron beam along a periodic path so as to stimulate emission of coherent radiation and a steering unit operable to alter the trajectory of the electron beam so as to direct the electron beam from a first path along which the electron beam propagates substantially in a first direction to a second path along which the electron beam propagates substantially in a second direction, wherein the first path and the second path are vertically separated from one another.

Abstract translation: 本发明涉及一种自由电子激光器。 自由电子激光器包括可操作以发射电子束的电子源，可操作以将电子束加速到相对论能量的粒子加速器，可操作以沿着周期性路径引导相对论电子束的波动器，以便刺激相干能量的发射 辐射和转向单元，其可操作以改变电子束的轨迹，以便引导来自第一路径的电子束，电子束沿着第一路径在第一方向上传播到第二路径，电子束沿着第二路径基本上在第二路径中传播 方向，其中第一路径和第二路径彼此垂直分离。