公开(公告)号：WO2017036717A3

公开(公告)日：2017-08-17

申请号：PCT/EP2016068513

申请日：2016-08-03

Applicant: ASML NETHERLANDS BV

Inventor： DE VRIES GOSSE CHARLES ,  NIENHUYS HAN-KWANG

IPC: G02B5/18 ,  G02B6/293 ,  G02B27/10 ,  G03F7/20 ,  H01S3/09

CPC classification number: G03F7/70991 ,  G02B5/1838 ,  G02B5/1857 ,  G02B5/1861 ,  G02B6/29314 ,  G02B27/1086 ,  G02B27/1093 ,  G03F7/70025 ,  G03F7/70033 ,  G03F7/70158 ,  G03F7/70208 ,  G03F7/70316 ,  G03F7/7055 ,  G03F7/70566 ,  H01S3/0903

Abstract: A beam-splitting apparatus (40) arranged to receive an input radiation beam (B) and split the input radiation beam (B) into a plurality of output radiation beams (Ba - Bj). The beam-splitting apparatus (40) comprising a plurality of reflective diffraction gratings (41-45) arranged to receive a radiation beam and configured to form a diffraction pattern comprising a plurality of diffraction orders, at least some of the reflective diffraction gratings (42-45) being arranged to receive a 0th diffraction order formed at another of the reflective diffraction gratings (41-44). The reflective diffraction gratings are arranged such that the optical path of each output radiation beam (Ba - Bj) includes no more than one instance of a diffraction order which is not a 0th diffraction order.

Abstract translation: 一个分束装置（40），用于接收输入辐射束（B）并将输入辐射束（B）分成多个输出辐射束（Ba-Bj）。 所述分束设备（40）包括布置成接收辐射束并被配置为形成包括多个衍射级的衍射图案的多个反射式衍射光栅（41-45），至少一些所述反射式衍射光栅（42 -45）被布置成接收在另一个反射式衍射光栅（41-44）处形成的第0衍射级。 反射式衍射光栅被布置为使得每个输出辐射束（Ba-Bj）的光路包括不多于一个衍射级数的非零级衍射级。

公开(公告)号：WO2016083120A3

公开(公告)日：2016-07-28

申请号：PCT/EP2015076179

申请日：2015-11-10

Applicant: ASML NETHERLANDS BV

Inventor： DEKKERS JEROEN ,  NIENHUYS HAN-KWANG ,  RENKENS MICHAEL JOZEF MATHIJS ,  AKKERMANS JOHANNES ANTONIUS GERARDUS ,  DE VRIES GOSSE CHARLES ,  LOOPSTRA ERIK ROELOF

IPC: G03F7/20 ,  G02B5/18 ,  G02B6/293

CPC classification number: G03F7/70158 ,  G02B5/1828 ,  G02B6/29314 ,  G03F7/70266

Abstract: An adjustable diffraction grating comprises: an optical element and a distortion mechanism. The optical element has an optical surface for receiving an input radiation beam. The optical element is provided with a plurality of closed channels below the optical surface, above each closed channel the optical surface being formed from a membrane of material. The distortion mechanism comprises one or more actuators that are operable to distort the membranes over the closed channels so as to control the shape of the optical surface and to form a periodic structure on the optical surface which acts as a diffraction grating such that the input radiation beam is diffracted from the optical element to form a plurality of angularly separated sub-beams.

Abstract translation: 可调衍射光栅包括：光学元件和失真机构。 光学元件具有用于接收输入辐射束的光学表面。 光学元件在光学表面下方设置有多个封闭通道，在每个封闭通道上方，光学表面由材料膜形成。 所述变形机构包括一个或多个致动器，所述致动器可操作以使所述膜在所述封闭通道上变形，从而控制所述光学表面的形状并且在所述光学表面上形成充当衍射光栅的周期性结构，使得所述输入辐射 光束从光学元件衍射以形成多个角度分离的子光束。

公开(公告)号：WO2016134892A3

公开(公告)日：2016-10-20

申请号：PCT/EP2016051174

申请日：2016-01-21

Applicant: ASML NETHERLANDS BV

Inventor： DE VRIES GOSSE CHARLES ,  DONKER RILPHO LUDOVICUS ,  NIENHUYS HAN-KWANG ,  VAN OOSTEN ANTON BERNHARD ,  KRUIZINGA BORGERT

IPC: G03F7/20 ,  G02B5/18

CPC classification number: G03F7/70158 ,  G02B5/1861 ,  G02B27/4222 ,  G02B27/4255 ,  G03F7/702 ,  G03F7/70558 ,  G03F7/70991

Abstract: An apparatus for receiving an input radiation beam at a beam receiving location and outputting from the beam receiving location one or more output radiation beams. The apparatus comprises: an optical element; and a movement mechanism. The optical element comprises a plurality of portions for receiving the input radiation beam. The movement mechanism is operable to move the plurality of portions so as selectively position each of the plurality of portions at the beam receiving location. When one of the plurality of portions is disposed in the beam receiving location it is configured to receive the input radiation beam and to scatter the input radiation beam so as to form the one or more output radiation beams. A direction of each of the one or more output radiation beams formed by each of the plurality of portions is substantially the same as a direction of a corresponding output radiation beam formed by each of the other portions. One or more properties of each of the plurality of portions differs from that of the other portions such that a power of at least one of the one or more output radiation beams formed by each of the plurality of portions is different to that of the corresponding output radiation beam formed by at least one of the other portions.

Abstract translation: 一种用于在波束接收位置接收输入辐射束并从波束接收位置输出一个或多个输出辐射束的装置。 该装置包括：光学元件; 和运动机制。 光学元件包括用于接收输入辐射束的多个部分。 移动机构可操作以移动多个部分，以便选择性地将多个部分中的每一个位置放置在束接收位置处。 当多个部分中的一个部分设置在光束接收位置时，其被配置为接收输入辐射束并散射输入辐射束，以便形成一个或多个输出辐射束。 由多个部分中的每一个形成的一个或多个输出辐射束中的每一个的方向基本上与由每个其它部分形成的对应的输出辐射束的方向相同。 多个部分中的每个部分的一个或多个属性与其他部分的不同之处在于，由多个部分中的每一个部分形成的一个或多个输出辐射束中的至少一个的功率与相应输出的功率不同 辐射束由至少一个其它部分形成。

公开(公告)号：WO2016139055A3

公开(公告)日：2016-10-27

申请号：PCT/EP2016053216

申请日：2016-02-16

Applicant: ASML NETHERLANDS BV

Inventor： NIENHUYS HAN-KWANG ,  BOGAART ERIK WILLEM ,  DONKER RILPHO LUDOVICUS ,  KRUIZINGA BORGERT ,  LOOPSTRA ERIK ROELOF ,  BOTMA HAKO ,  DE VRIES GOSSE CHARLES ,  FRIJNS OLAV WALDEMAR VLADIMIR ,  BASELMANS JOHANNES JACOBUS MATHEUS

IPC: G03F7/20 ,  G02B5/02

CPC classification number: G03F7/70191 ,  G02B5/0221 ,  G02B5/0268 ,  G02B5/0284 ,  G03F7/70025 ,  G03F7/7005 ,  G03F7/70075 ,  G03F7/70991 ,  H01S3/2308 ,  H05G2/008

Abstract: A radiation system comprising a beam splitting apparatus configured to receive a main radiation beam and split the main radiation beam into a plurality of branch radiation beams and a radiation alteration device arranged to receive an input radiation beam and output a modified radiation beam, wherein the radiation alteration device is configured to provide an output modified radiation beam which has an increased etendue, when compared to the received input radiation beam, wherein the radiation alteration device is arranged such that the input radiation beam which is received by the radiation alteration device is a main radiation beam and the radiation alteration device is configured to provide a modified main radiation beam to the beam splitting apparatus, or wherein the radiation alteration device is arranged such that the input radiation beam which is received by the radiation alteration device is a branch radiation beam output from the beam splitting apparatus.

Abstract translation: 一种辐射系统，包括分束装置，其被配置为接收主辐射束并将主辐射束分裂成多个分支辐射束，以及布置成接收输入辐射束并输出修改的辐射束的辐射改变装置，其中辐射 改变装置被配置为提供与所接收的输入辐射束相比具有增加的光密度的输出修改的辐射束，其中所述辐射改变装置被布置成使得由所述辐射改变装置接收的输入辐射束是主 辐射束和辐射改变装置被配置为向分束装置提供修改的主辐射束，或者其中辐射改变装置被布置成使得由辐射改变装置接收的输入辐射束是分支辐射束输出 从分束装置。