公开(公告)号：WO2023283048A1

公开(公告)日：2023-01-12

申请号：PCT/US2022/034483

申请日：2022-06-22

Applicant: BRUKER NANO, INC.

Inventor： FONOBEROV, Vladimir ,  OSBORNE, Jason ,  HAND, Sean

IPC: G01Q60/24 ,  G01Q40/00 ,  G01Q10/06

Abstract: A system and method of operating an atomic force microscope (AFM) that includes providing relative scanning motion between a probe of the AFM and a sample in a slow scan direction of a data scan to generate a reference image (plane) of a region of interest. Then, relative scanning motion between the probe and the sample is provided in a fast scan direction of a final data scan to generate a data image. By mapping the data image against the reference image in real-time during the supplying step, the preferred embodiments generate a final drift corrected data image without post-image acquisition processing.

公开(公告)号：WO2015127449A1

公开(公告)日：2015-08-27

申请号：PCT/US2015/017319

申请日：2015-02-24

Applicant: BRUKER NANO, INC.

Inventor： OSBORNE, Jason ,  MILLIGAN, Eric ,  LOPEZ, Andrew ,  WU, Robert ,  HAND, Sean ,  FONOBEROV, Vladimir

IPC: G01Q10/06 ,  G01Q60/16 ,  G01Q70/02

CPC classification number: G01Q10/02 ,  G01Q10/065 ,  G01Q30/06

Abstract: A scanning probe microscope (SPM) system and associated method. The SPM system having a probe adapted to interact with nanoscale features of a sample and scan within a target region to produce a three-dimensional image of that target region, the system maintaining location information for a plurality of features of interest of the sample according to a sample- specific coordinate system, wherein the SPM system is configured to adjust positioning of the probe relative to the sample according to a SPM coordinate system, the SPM system further configured to manage a dynamic relationship between the sample-specific coordinate system and the SPM coordinate system by determining a set of alignment errors between the sample-specific coordinate system and the SPM coordinate system and apply corrections to the SPM coordinate system to offset the determined alignment errors.

Abstract translation: 扫描探针显微镜（SPM）系统及其相关方法。 所述SPM系统具有适于与样本的纳米尺度特征相互作用以及在目标区域内扫描以产生所述目标区域的三维图像的探针，所述系统根据所述样本维持所述样本感兴趣的多个特征的位置信息 特定于样本的坐标系，其中所述SPM系统被配置为根据SPM坐标系来调整所述探针相对于所述样本的定位，所述SPM系统还被配置为管理所述样本特定坐标系和所述SPM之间的动态关系 通过确定样本特定坐标系和SPM坐标系之间的一组对准误差来对坐标系进行校正，并对SPM坐标系进行校正以偏移所确定的对准误差。

公开(公告)号：WO2022251016A1

公开(公告)日：2022-12-01

申请号：PCT/US2022/029801

申请日：2022-05-18

Applicant: BRUKER NANO, INC.

Inventor： OSBORNE, Jason ,  HAND, Sean ,  FONOBEROV, Vladimir ,  YOUNG, James

IPC: G01Q60/24 ,  G01Q40/00 ,  G01Q10/04 ,  G01Q10/06

Abstract: An atomic force microscope (AFM) and method of operating the same includes a separate Z height sensor to measure, simultaneously with AFM system control, probe sample distance, pixel-by-pixel during AFM data acquisition. By mapping the AFM data to low resolution data of the Z height data, a high resolution final data image corrected for creep is generated in real time.

公开(公告)号：WO2022216677A1

公开(公告)日：2022-10-13

申请号：PCT/US2022/023440

申请日：2022-04-05

Applicant: BRUKER NANO, INC.

Inventor： FONOBEROV, Vladimir ,  YOUNG, James ,  OSBORNE, Jason ,  HAND, Sean

IPC: G06T5/00 ,  G06T7/11 ,  G06T7/20 ,  G06T5/20

Abstract: A method of operating an atomic force microscope (AFM), using a denoising algorithm, real-time, during AFM data acquisition. Total Variation and Non-Local Means denoising are preferred. Real time images with minimized sensor noise needing no post-image acquisition processing to account for noise as described herein results.