公开(公告)号：WO2020009582A1

公开(公告)日：2020-01-09

申请号：PCT/NL2019/050421

申请日：2019-07-05

Applicant: NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO

Inventor： HEREST, Roelof Willem ,  BIJNAGTE, Anton Adriaan ,  DEKKER, Albert ,  BIEMOND, Jan Jacobus Benjamin

IPC: G01Q70/02 ,  G01Q70/10

Abstract: The present document relates to a probe chip for use in a scanning probe microscopy device for holding a probe mounted thereon. The probe chip includes a carrier element having a probe bearing side which is configured for bearing the probe to be extending therefrom as an integral or mounted part thereof. The carrier element further comprises a mounting side configured for mounting the probe chip onto a scan head of the scanning probe microscopy device, wherein the mounting side extends in a longitudinal and lateral direction of the carrier element to be substantially flat. The carrier element towards the probe bearing side thereof is truncated in the lateral direction on either side of a longitudinal axis through a center of the carrier element, such as to enable a rotation of the probe chip over a rotation angle around the longitudinal axis in use when the longitudinal axis is inclined at an inclination angle relative to a substrate surface to be scanned and when the probe is in a measurement position relative to the substrate surface.

公开(公告)号：WO2017030441A1

公开(公告)日：2017-02-23

申请号：PCT/NL2016/050582

申请日：2016-08-18

Applicant: NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO

Inventor： SADEGHIAN MARNANI, Hamed

IPC: G01Q70/02 ,  G01Q70/06

CPC classification number: G01Q70/02 ,  G01Q70/06

Abstract: The present document describes a device for measuring and/or modifying surface features and/or sub-surface features on or below a surface of a sample. The system comprises a sample carrier, one or more heads, and a support structure. The support structure comprises a reference surface for providing a positioning reference. The heads are separate from the sample carrier and the support structure, and the device further comprises a pick and place manipulator arranged for positioning the heads at respective working positions. The manipulator comprises a gripper and an actuator for moving the gripper, wherein the actuator is arranged for providing a motion in a direction transverse to the reference surface. The gripper is arranged for engaging and releasing the respective heads from the transverse motion. The document also describes a method of measuring and/or modifying surface features on a surface of a sample.

Abstract translation: 本文件描述了用于测量和/或修改样品表面上或表面上的表面特征和/或亚表面特征的装置。 该系统包括样品载体，一个或多个头部和支撑结构。 支撑结构包括用于提供定位参考的参考表面。 头与样品载体和支撑结构分离，并且该装置还包括布置用于将头部定位在相应工作位置的拾取和放置操纵器。 所述操纵器包括用于移动所述夹持器的夹持器和致动器，其中所述致动器设置成在横向于所述参考表面的方向上提供运动。 夹持器布置成用于从横向运动中接合和释放相应的头部。 该文献还描述了测量和/或修改样品表面上的表面特征的方法。

公开(公告)号：WO2016003281A1

公开(公告)日：2016-01-07

申请号：PCT/NL2015/050487

申请日：2015-07-03

Applicant: NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO

Inventor： SADEGHIAN MARNANI, Hamed ,  WINTERS, Jasper ,  CROWCOMBE, William Edward ,  VAN DEN DOOL, Teunis Cornelis ,  KRAMER, Geerten Frans Ijsbrand

IPC: G01Q10/06 ,  G01Q70/02

CPC classification number: G01Q10/04 ,  B82Y35/00 ,  G01Q10/06 ,  G01Q70/02 ,  G01Q70/06

Abstract: The invention is directed at a method of performing scanning probe microscopy on a substrate surface using a scanning probe microscopy system, the system including at least one probe head, the probe head comprising a probe tip arranged on a cantilever and a tip position detector for determining a position of the probe tip along a z- direction transverse to an image plane, the method comprising: positioning the at least one probe head relative to the substrate surface; moving the probe tip and the substrate surface relative to each other in one or more directions parallel to the image plane for scanning of the substrate surface with the probe tip; and determining the position of the probe tip with the tip position detector during said scanning for mapping nanostructures on the substrate surface; wherein said step of positioning is performed by placing the at least one probe head on a static carrier surface.

Abstract translation: 本发明涉及使用扫描探针显微镜系统在衬底表面上执行扫描探针显微术的方法，所述系统包括至少一个探针头，探头包括布置在悬臂上的探针尖和用于确定的尖端位置检测器 所述探针尖端沿着横向于图像平面的z方向的位置，所述方法包括：相对于所述衬底表面定位所述至少一个探针头; 在一个或多个平行于图像平面的方向上相对于彼此移动探针尖端和基底表面，用于用探针尖端扫描基底表面; 以及在所述扫描期间确定所述探针尖端与所述尖端位置检测器的位置，以在所述衬底表面上绘制纳米结构; 其中所述定位步骤通过将所述至少一个探针头放置在静态载体表面上而进行。

公开(公告)号：WO2013120153A1

公开(公告)日：2013-08-22

申请号：PCT/BG2013/000004

申请日：2013-02-12

Applicant: AMG TECHNOLOGY LTD.

Inventor： STAVROV, Vladimir

IPC: G01Q70/02 ,  G01Q60/38 ,  B82Y35/00

CPC classification number: G01Q70/02 ,  G01Q60/38

Abstract: The device is intended for scanning probe microscopy (SPM), including scanning atomic force microscopy (AFM). It consists of an passive holder body 6 having dimensions, which are usual for SPM sensors, and provided with a trench 10 , disposed towards its narrow side. The device further comprises a actual sensor 7 of reduced dimensions, consisting of a microcantilever 3' and a probe element, said sensor 7 being inserted and rigidly cantilevered in the trench 10 of the passive holder body 6 . In an embodiment, the device comprises a second, cantilevered structure 11 at the free end of the actual sensor body. In other embodiments a ratio of the microcantilever length to the length of the side of the actual sensor body, wherefrom the microcantilever extends, is in the range from 1:10 to 5:1.

Abstract translation: 该装置用于扫描探针显微镜（SPM），包括扫描原子力显微镜（AFM）。 它包括具有尺寸的被动保持器本体6，其通常用于SPM传感器，并且设置有朝向其窄侧设置的沟槽10。 该装置还包括由微型悬臂梁3'和探针元件组成的尺寸减小的实际传感器7，所述传感器7被插入并刚性地悬臂地悬置在被动保持器主体6的沟槽10中。在一个实施例中，该装置包括 第二，在实际传感器主体的自由端处的悬臂结构11。 在其他实施例中，微悬臂梁延伸的微悬臂梁长度与实际传感器主体侧面的长度之比在1:10至5:1的范围内。

公开(公告)号：WO98034092A2

公开(公告)日：1998-08-06

申请号：PCT/US1998/001528

申请日：1998-01-21

IPC: G01Q10/00 ,  G01Q30/02 ,  G01Q30/16 ,  G01Q40/00 ,  G01Q40/02 ,  G01Q60/06 ,  G01Q60/10 ,  G01Q60/18 ,  G01Q60/24 ,  G01Q70/02 ,  G01Q70/08 ,  G01Q70/16 ,  G01Q80/00 ,  G03F1/00 ,  G03F7/20 ,  G11B5/23 ,  G11B5/31 ,  G01N

CPC classification number: G01Q70/16 ,  G01Q30/02 ,  G01Q30/16 ,  G01Q40/00 ,  G01Q40/02 ,  G01Q60/06 ,  G01Q70/02 ,  G01Q70/06 ,  G01Q80/00 ,  G03F1/84 ,  G03F7/2049 ,  G03F7/704 ,  G03F7/70616 ,  G11B5/232 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/3166

Abstract: A system and method for measuring, analysis, removal, addition or imaging of material using nanostructures in conjunction with mechanical, electromagnetic (optical) and electrical means. Techniques for fabricating such nanostructures and techniques for combining these elements in a system which can modify bulk or large area objects such as silicon wafers, and masks for lithography.

Abstract translation: 本发明涉及用于借助与机械的电磁（光学）和电气装置相关联的纳米结构来测量，分析，去除，添加或表示材料的系统和方法。 本发明还涉及用于制造这些纳米结构的技术以及用于将这些元件结合在能够修改大体积或大表面物体的系统中的技术，例如硅片和光刻掩模的切片。

公开(公告)号：WO2018101819A1

公开(公告)日：2018-06-07

申请号：PCT/NL2017/050788

申请日：2017-11-28

Applicant: NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO

Inventor： SADEGHIAN MARNANI, Hamed ,  BIJNAGTE, Anton Adriaan ,  DEKKER, Albert

IPC: G01Q70/02

Abstract: A scanning probe microscopy system (1) comprises a probe (2), a scanning head (11) having a first probe holder (21), a probe exchange manipulator (12) having a second probe holder (22), a force generating system (31, 32), and a force control system (41, 42) for controlling the force generating system to provide a resultant force (72) acting on the probe. Said resultant force comprises gas pressure force components and/or electrostatic force components. During probe-demounting or probe -mounting the probe is moving (52) from the first probe holder (21) towards the second probe holder (22), or vice versa, respectively, while neither the first probe holder nor the second probe holder is contacting the probe. Said movement of the probe is driven by said resultant force. The invention allows for automatically mounting and demounting of probes with high speed and with high accuracy.

公开(公告)号：WO2017010882A1

公开(公告)日：2017-01-19

申请号：PCT/NL2016/050521

申请日：2016-07-14

Applicant: NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO

Inventor： KUIPER, Stefan ,  CROWCOMBE, William Edward

IPC: G01Q70/02

CPC classification number: G01Q70/02

Abstract: The invention is directed at a scanning probe microscopy system for mapping nanostructures on a surface of a sample being arranged for sensing a high aspect ratio nanostructure, the system comprising a metrology frame, a sample support structure for supporting a sample, a sensor head including a probe, wherein the probe comprises a probe tip, and wherein the scanning probe microscopy system further comprises an actuator for scanning the probe tip relative to the substrate surface for mapping of the nanostructures, wherein, for sensing the high aspect ratio nanostructure, the probe tip is arranged under a fixed offset angle with respect to the sensor head such as to be angled relative to the sample surface, and wherein the system further comprises a sensor head carrier for receiving the sensor head, both being provided with a mutually cooperating mounting structure for forming a kinematic mount.

Abstract translation: 本发明涉及一种扫描探针显微镜系统，用于映射样品表面上的纳米结构，用于感测高纵横比纳米结构，所述系统包括计量框架，用于支撑样品的样品支撑结构， 探针，其中所述探针包括探针尖端，并且其中所述扫描探针显微镜系统还包括用于相对于所述衬底表面扫描所述探针尖端以用于映射所述纳米结构的致动器，其中，为了感测所述高纵横比纳米结构，所述探针尖端 相对于传感器头部以固定的偏置角度布置成相对于样品表面成角度，并且其中该系统还包括用于接收传感器头部的传感器头托架，两个传感器头托架设置有相互配合的安装结构，用于 形成运动座。

公开(公告)号：WO2015019090A1

公开(公告)日：2015-02-12

申请号：PCT/GB2014/052413

申请日：2014-08-06

Applicant: INFINITESIMA LIMITED

Inventor： HUMPHRIS, Andrew

IPC: G01Q30/20 ,  G01Q70/02

CPC classification number: G01Q30/20 ,  B82Y35/00 ,  G01Q70/02

Abstract: A scanning probe microscope system. A sample stage is provided along with a microscope arranged to collect data with a probe carried by the microscope from a sample carried by the sample stage. A probe/sample exchange mechanism is arranged to exchange the probe carried by the microscope with a new probe, and is also arranged to exchange the sample carried by the sample stage with a new sample. The probe/sample exchange mechanism comprises a transport structure which can move relative to the microscope and the sample stage; a probe carrier carried by the transport structure and adapted to carry the probe or the new probe when the probe is exchanged with the new probe; a sample carrier carried by the transport structure, wherein the sample carrier is adapted differently from the probe carrier to carry the sample or the new sample when the sample is exchanged with the new sample; and a drive system arranged to move the transport structure relative to the microscope and the sample stage when the probe is exchanged with the new probe and the sample is exchanged with the new sample.

Abstract translation: 扫描探针显微镜系统。 提供样品台以及显微镜，其布置成用由样品载带的样品用显微镜携带的探针收集数据。 布置探针/样品交换机构以用新的探针交换由显微镜携带的探针，并且还布置成用样品交换样品载带的样品。 探针/样品交换机构包括可相对于显微镜和样品台移动的传送结构; 当探针与新探针交换时，由传送结构携带的探针载体适于携带探针或新探针; 由所述传送结构承载的样品载体，其中当所述样品与所述新样品交换时，所述样品载体与所述探针载体不同地适应于携带样品或新样品; 以及驱动系统，其布置成当所述探针与所述新探针交换时使所述输送结构相对于所述显微镜和所述样品台移动，并且所述样品与所述新样品交换。

公开(公告)号：WO2010027054A1

公开(公告)日：2010-03-11

申请号：PCT/JP2009/065513

申请日：2009-09-04

Applicant: 国立大学法人北陸先端科学技術大学院大学 ,  富取 正彦 ,  平出 雅人

Inventor： 富取　正彦 ,  平出　雅人

IPC: G01Q70/02

CPC classification number: G01Q70/02 ,  G01Q30/10

Abstract: 　加熱用の配線パターンが設けられていない一般的なカンチレバーでも大気中、高・低真空中にて効率良く加熱することが可能であり、更には、試料の局所加熱や局所高温高圧処理が可能なカンチレバー加熱機構、それを用いたカンチレバーホルダ、及び、カンチレバー加熱方法を提供する。 　探針を備えるカンチレバーＬを着脱自在に保持可能なホールド部１と、ホールド部１に保持されたカンチレバーＬを介して導通状態となる少なくとも第１の電極２ａと第２の電極２ｂとを備える。ホールド部１は、固定台１１と固定部１２を備え、固定部１２は電極としての機能を果たす。

Abstract translation: 公开了一种悬臂加热机构，以及使用该悬臂式加热机构的悬臂式支架和悬臂加热方法，其即使在不设置加热布线图案的普通悬臂中也能够在空气中或高或低真空中进行高效加热，以及 进一步使得能够进行局部加热和局部高压/高温处理的样品。 提供一种保持器（1），其能够可拆卸地保持设置有探针的悬臂（L），以及至少第一电极（2a）和第二电极（2b），其通过悬臂（处于导电状态） L）由保持器（1）保持。 支架（1）配备有固定基座（11）和固定部件（12），固定部件（12）具有电极功能。

公开(公告)号：WO2007078979A2

公开(公告)日：2007-07-12

申请号：PCT/US2006048743

申请日：2006-12-20

Applicant: KARMA TECHNOLOGY INC ,  RAY DAVID J

Inventor： RAY DAVID J

IPC: G01Q20/02 ,  G01Q60/16 ,  G01Q70/02

CPC classification number: G01Q20/02 ,  G01Q10/045 ,  G01Q60/16 ,  G01Q70/02

Abstract: A scanning probe microscope comprises a probe module. In some embodiments the module is easily removed from the lateral and vertical scanning mechanisms. The module further comprises one or more vertical motion actuator that may be controlled by a multi-path feedback control loop. By coupling the second vertical motion actuator directly to the probe the speed of the scan may be increased over the speed of prior art microscopes. The feedback loop is part of the probe microscope and feedback paths may be independently designed to create independent control of multiple paths.

Abstract translation: 扫描探针显微镜包括探针模块。 在一些实施例中，模块容易地从横向和垂直扫描机构移除。 模块还包括一个或多个垂直运动致动器，其可以由多径反馈控制回路控制。 通过将第二垂直运动致动器直接耦合到探针，扫描速度可以超过现有技术显微镜的速度。 反馈回路是探针显微镜的一部分，反馈路径可以独立设计，以创建多个路径的独立控制。