公开(公告)号：WO2014124041A2

公开(公告)日：2014-08-14

申请号：PCT/US2014014926

申请日：2014-02-05

Applicant: GUERRERA STEPHEN ANGELO ,  AKINWANDE AKINTUNDE I

Inventor： GUERRERA STEPHEN ANGELO ,  AKINWANDE AKINTUNDE I

CPC classification number: H01J37/073 ,  H01J37/065 ,  H01J37/3007 ,  H01J37/3174 ,  H01J37/3177 ,  H01J2237/0473 ,  H01J2237/063 ,  H01J2237/3175 ,  H01J2237/31781 ,  H01L21/00

Abstract: An electron beam apparatus is disclosed that includes a plurality of current source elements disposed in at least one field emitter array. Each current source element can be a gated vertical transistor, an ungated vertical transistor, or a current controlled channel that is proximate to an optically-modulated current source. The electron beam apparatus includes a plurality of field emitter tips, each field emitter tip of the plurality of field emitter tips being coupled to a current source element of the plurality of current source elements. The electron beam apparatus is configured to allow selective activation of one or more of the current source elements.

Abstract translation: 公开了一种电子束装置，其包括设置在至少一个场发射器阵列中的多个电流源元件。 每个电流源元件可以是门控垂直晶体管，非门控垂直晶体管或接近光调制电流源的电流控制通道。 电子束装置包括多个场发射器尖端，多个场发射器尖端中的每个场发射极尖端耦合到多个电流源元件的电流源元件。 电子束装置被配置为允许选择性地激活一个或多个电流源元件。

公开(公告)号：WO2009009475A2

公开(公告)日：2009-01-15

申请号：PCT/US2008069307

申请日：2008-07-07

Applicant: MASSACHUSETTS INST TECHNOLOGY ,  CHEUNG KERRY ,  VELASQUEZ-GARCIA LUIS F ,  AKINWANDE AKINTUNDE I

Inventor： CHEUNG KERRY ,  VELASQUEZ-GARCIA LUIS F ,  AKINWANDE AKINTUNDE I

IPC: H01J49/42

CPC classification number: H01J49/0018 ,  H01J49/4215

Abstract: A quadrupole mass filter (QMF) is provided. The QMF includes a plurality of rectangular shaped electrodes aligned in a symmetric manner to generate a quadrupole field. An aperture region is positioned in a center region parallel to and adjacent to each of the rectangular shaped electrodes. An incoming ion stream enters the aperture region so as to be controlled by the quadrupole field.

Abstract translation: 提供四极质量过滤器（QMF）。 QMF包括以对称方式对准的多个矩形电极以产生四极场。 开口区域位于与每个矩形电极平行并相邻的中心区域中。 进入的离子流进入孔径区域，以便由四极场控制。

公开(公告)号：WO2006033822A3

公开(公告)日：2006-06-15

申请号：PCT/US2005031666

申请日：2005-09-07

Applicant: MASSACHUSETTS INST TECHNOLOGY ,  KIM II-DOO ,  TULLER HARRY L ,  CHOI YONGWOO ,  AKINWANDE AKINTUNDE I

Inventor： KIM II-DOO ,  TULLER HARRY L ,  CHOI YONGWOO ,  AKINWANDE AKINTUNDE I

IPC: H01L51/40

CPC classification number: H01L21/2007 ,  H01L41/313 ,  H01L51/0013

Abstract: A transfer layer includes a transparent substrate. A buffer layer is formed on the transparent substrate that comprises PbO, GaN, PbTiO 3 , La 0.5 Sr 0.5 CoO 3 (LSCO), or La x Pb 1-x CoO 3 (LPCO) so that separation between the buffer layer and the transparent substrate occurs at substantially

Abstract translation: 转印层包括透明基板。 在透明基板上形成缓冲层，该缓冲层由PbO，GaN，PbTiO 3，La 0.5，Sr 0.5，CoO 3， （LSCO）或La _{x 1 CoO 3 （LPCO），使得缓冲层和透明衬底 基本上发生}

公开(公告)号：WO2009009471A2

公开(公告)日：2009-01-15

申请号：PCT/US2008069303

申请日：2008-07-07

Applicant: MASSACHUSETTS INST TECHNOLOGY ,  CHEUNG KERRY ,  VELASQUEZ-GARCIA LUIS F ,  AKINWANDE AKINTUNDE I

Inventor： CHEUNG KERRY ,  VELASQUEZ-GARCIA LUIS F ,  AKINWANDE AKINTUNDE I

IPC: H01J49/42

CPC classification number: H01J49/4215 ,  H01J49/0018 ,  H01J49/4275

Abstract: A quadrupole mass filter (QMF) is provided. The QMF includes a plurality of rectangular shaped electrodes aligned in a symmetric manner to generate a quadrupole field. An aperture region is positioned in a center region parallel to and adjacent to each of the rectangular shaped electrodes. An incoming ion stream enters the aperture region so as to be controlled by the quadrupole field. A plurality of voltage sources provide a r.f. and d.c. signal to the electrodes for generating the quadrupole field. An auxiliary voltage source applies an auxiliary drive signal to the r.f. and d.c. signal to create new stability boundaries within the standard Mathieu stability regions with high-resolution around operating conditions where there are approximately no higher-order resonances.

Abstract translation: 提供四极质量过滤器（QMF）。 QMF包括以对称方式排列的多个矩形电极以产生四极场。 开口区域位于与每个矩形电极平行且相邻的中心区域中。 输入的离子流进入孔径区域以受四极场控制。 多个电压源提供r.f. 和d.c. 发信号给电极以产生四极场。 辅助电压源向r.f.施加辅助驱动信号。 和d.c. 信号在标准Mathieu稳定区内创建新的稳定边界，高分辨率周围大约没有高阶共振的工作条件。