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    NANOSTRUCTURE ARRAY BASED SENSORS FOR ELECTROCHEMICAL SENSING, CAPACITIVE SENSING AND FIELD-EMISSION SENSING
    3.
    发明申请
    NANOSTRUCTURE ARRAY BASED SENSORS FOR ELECTROCHEMICAL SENSING, CAPACITIVE SENSING AND FIELD-EMISSION SENSING 审中-公开
    基于纳米结构阵列的电化学传感器，电容式传感器和场发射传感器

    公开(公告)号：WO2017173042A2

    公开(公告)日：2017-10-05

    申请号：PCT/US2017/024949

    申请日：2017-03-30

    Applicant: KHALID, Waqas

    Inventor： KHALID, Waqas

    IPC: C12Q1/00

    Abstract: The present invention relates to utilizing individually addressable nanostructure arrays as nano electrodes for multianalyte electrochemical sensing via utilizing various electrochemical spectroscopy, capacitive and field emission techniques. In certain aspects, the invention provides devices and arrangements comprising at least two individually addressable nano structures in an array on a substrate, and uses thereof. In other certain aspects, the invention features systems comprising the device and a chip holder, and further comprising hardware and software.

    Abstract translation: 本发明涉及通过利用各种电化学光谱学，电容和场发射技术将单独可寻址的纳米结构阵列用作纳米电极用于多分析物电化学检测。 在某些方面，本发明提供了包括在衬底上的阵列中的至少两个单独可寻址纳米结构的器件和布置，以及其用途。 在其他某些方面，本发明的特征在于包括该设备和芯片保持器的系统，并且还包括硬件和软件。

    DEVICE COMPRISING NANOSTRUCTURES AND METHOD OF MANUFACTURING THEREOF
    4.
    发明申请
    DEVICE COMPRISING NANOSTRUCTURES AND METHOD OF MANUFACTURING THEREOF 审中-公开
    包含纳米结构的装置及其制造方法

    公开(公告)号：WO2013001076A1

    公开(公告)日：2013-01-03

    申请号：PCT/EP2012/062744

    申请日：2012-06-29

    Applicant: KHALID, Waqas

    Inventor： KHALID, Waqas

    IPC: H01J9/02 ,  H01J1/304

    CPC classification number: H01L23/53276 ,  H01J1/3044 ,  H01J9/025 ,  H01L21/76886 ,  H01L23/525 ,  H01L2924/0002 ,  Y02B10/12 ,  H01L2924/00

    Abstract: A method for manufacturing of a device (300, 410-412) comprising a substrate (201) comprising a plurality of sets of nanostructures (207) arranged on the substrate, wherein each of the sets of nanostructures is individually electrically addressable, the method comprising the steps of: providing (101) the substrate (200) having a first (202) face, the substrate having an insulating layer (210) comprising an insulating material arranged on the first face (202) of the substrate forming an interface (203) between the insulating layer and the substrate; providing (102) a plurality of stacks (204) on the substrate, the stacks being spaced apart from each other, wherein each stack comprises a first conductive layer (205) comprising a first conductive material and a second conductive layer (206) comprising a second conductive material different from the first material, the second conductive layer being arranged on the first conductive layer for catalyzing nanostructure growth; heating (103) the substrate having the plurality of stacks arranged thereon in a reducing atmosphere to enable formation of nanostructures on the second conductive material; heating (103) the substrate having the plurality of stacks (204) arranged thereon in an atmosphere such that nanostructures (207) are formed on the second layer (206); wherein the insulating material and the first conductive material are selected such that during the heating steps, the first conductive material interacts with the insulating material to form an electrically conductive portion (208) within the insulating layer (201) below each of the stacks (204), wherein the electrically conductive portion comprises a mixture of the first conductive material and the insulating material and/or reaction adducts thereof.

    Abstract translation: 一种用于制造装置（300,410-412）的方法，包括：衬底（201），其包括布置在所述衬底上的多组纳米结构（207），其中所述纳米结构组中的每一组都可单独地电寻址，所述方法包括 提供（101）具有第一（202）面的衬底（200）的步骤，所述衬底具有绝缘层（210），所述绝缘层包括布置在所述衬底的所述第一面（202）上的绝缘材料，形成界面（203 ）在绝缘层和衬底之间; 在所述衬底上提供（102）多个堆叠（204），所述堆叠彼此间隔开，其中每个堆叠包括第一导电层（205），所述第一导电层包括第一导电材料和第二导电层（206） 第二导电材料不同于第一材料，第二导电层布置在第一导电层上用于催化纳米结构生长; 在还原气氛中加热（103）具有布置在其上的多个堆叠的衬底，以使得能够在第二导电材料上形成纳米结构; 在空气中加热（103）具有布置在其上的多个堆叠（204）的衬底，使得纳米结构（207）形成在第二层（206）上; 其中所述绝缘材料和所述第一导电材料被选择为使得在所述加热步骤期间，所述第一导电材料与所述绝缘材料相互作用以在所述绝缘层（201）内的每个所述堆叠（204）下方形成导电部分（208） ），其中所述导电部分包括所述第一导电材料和所述绝缘材料的混合物和/或其反应加合物。

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