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    LIGHT SOURCE WITH NANOSTRUCTURED ANTIREFLECTION LAYER
    2.
    发明申请
    LIGHT SOURCE WITH NANOSTRUCTURED ANTIREFLECTION LAYER 审中-公开
    具有纳米结构抗反射层的光源

    公开(公告)号：WO2015143150A1

    公开(公告)日：2015-09-24

    申请号：PCT/US2015/021460

    申请日：2015-03-19

    申请人： KLA-TENCOR CORPORATION

    发明人： OH, Sebaek ,  CHIMMALGI, Anant ,  YADAV, Rahul ,  DERSTINE, Matthew ,  BEZEL, Ilya

    IPC分类号： H01J37/32

    CPC分类号： H01J65/00 ,  H01J61/025 ,  H01J61/32 ,  H01J65/04

    摘要： A laser-sustained plasma light source includes a plasma cell configured to contain a volume of gas. The plasma cell is configured to receive illumination from a pump laser in order to generate plasma within the volume of gas. The plasma emits broadband radiation. The plasma cell includes one or more transparent portions being at least partially transparent to at least a portion of illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The plasma cell also includes one or more nanostructured layers disposed on one or more surfaces of the one or more transparent portions of the plasma cell. The one or more nanostructure layers form a region of refractive index control across an interface between the one or more transparent portions of the plasma cell and an atmosphere.

    摘要翻译： 激光维持等离子体光源包括被配置为容纳一定体积的气体的等离子体单元。 等离子体单元被配置为从泵浦激光器接收照明，以在气体体积内产生等离子体。 等离子体发射宽带辐射。 等离子体单元包括对来自泵浦激光器的至少一部分照明和由等离子体发射的宽带辐射的至少一部分至少部分透明的一个或多个透明部分。 等离子体单元还包括设置在等离子体单元的一个或多个透明部分的一个或多个表面上的一个或多个纳米结构层。 一个或多个纳米结构层在等离子体电池的一个或多个透明部分和气氛之间的界面上形成折射率控制的区域。

    WAFER INSPECTION WITH FOCUS VOLUMETRIC METHOD
    3.
    发明申请
    WAFER INSPECTION WITH FOCUS VOLUMETRIC METHOD 审中-公开
    使用聚焦体积法进行波形检测

    公开(公告)号：WO2016118651A1

    公开(公告)日：2016-07-28

    申请号：PCT/US2016/014167

    申请日：2016-01-20

    申请人： KLA-TENCOR CORPORATION

    发明人： CHEN, Grace H. ,  WELLS, Keith ,  HUBER, Markus ,  OH, Sebaek

    IPC分类号： H01L21/66

    CPC分类号： G01N21/8851 ,  G01N21/9501 ,  G01N2021/8887

    摘要： Disclosed are methods and apparatus for detecting defects in a semiconductor sample. An inspection tool is used to collect intensity data sets at a plurality of focus settings from each of a plurality of xy positions of the sample. A polynomial equation having a plurality of coefficients is extracted for each of the xy position's collected intensity data sets as a function of focus setting. Each of the coefficients' set of values for the plurality of xy positions is represented with a corresponding coefficient image plane. A target set of coefficient image planes and a reference set of coefficient image planes are then analyzed to detect defects on the sample.

    摘要翻译： 公开了用于检测半导体样品中的缺陷的方法和装置。 检查工具用于从样本的多个xy位置中的每一个收集多个焦点设置的强度数据集合。 作为焦点设置的函数，针对xy位置的收集的强度数据集中的每个提取具有多个系数的多项式方程。 用相应的系数图像平面表示多个xy位置的每个系数的值集合。 然后分析系数图​​像平面的目标集合和系数图像平面的参考集合，以检测样本上的缺陷。

    SYSTEM AND METHOD FOR TRANSVERSE PUMPING OF LASER-SUSTAINED PLASMA
    4.
    发明申请
    SYSTEM AND METHOD FOR TRANSVERSE PUMPING OF LASER-SUSTAINED PLASMA 审中-公开
    用于激光等离子体的横向泵浦的系统和方法

    公开(公告)号：WO2015153802A1

    公开(公告)日：2015-10-08

    申请号：PCT/US2015/023939

    申请日：2015-04-01

    申请人： KLA-TENCOR CORPORATION

    发明人： BEZEL, Ilya ,  SHCHEMELININ, Anatoly ,  SOLARZ, Richard ,  OH, Sebaek ,  DERSTINE, Matthew

    IPC分类号： H01J63/08 ,  H01J61/28

    CPC分类号： H05G2/003 ,  H01J61/025 ,  H01J61/302 ,  H01J65/042 ,  H05G2/001 ,  H05G2/008

    摘要： A laser-sustained plasma light source for transverse plasma pumping includes a pump source configured to generate pumping illumination, one or more illumination optical elements and a gas containment structure configured to contain a volume of gas. The one or more illumination optical elements are configured to sustain a plasma within the volume of gas of the gas containment structure by directing pump illumination along a pump path to one or more focal spots within the volume of gas. The one or more collection optical elements are configured to collect broadband radiation emitted by the plasma along a collection path. Further, the illumination optical elements are configured to define the pump path such that pump illumination impinges the plasma along a direction transverse to a direction of propagation of the emitted broadband light of the collection path such that the pump illumination is substantially decoupled from the emitted broadband radiation.

    摘要翻译： 用于横向等离子体泵浦的激光维持等离子体光源包括被配置为产生泵浦照明的泵浦源，一个或多个照明光学元件和被配置为容纳一定体积的气体的气体容纳结构。 一个或多个照明光学元件被配置为通过沿着泵路径将泵浦照明引导到气体体积内的一个或多个焦点，来维持气体容纳结构的气体体积内的等离子体。 一个或多个收集光学元件被配置为收集由等离子体沿着收集路径发射的宽带辐射。 此外，照明光学元件被配置为限定泵路径，使得泵照明沿着横向于收集路径的发射宽带光的传播方向的方向照射等离子体，使得泵浦照明基本上与发射的宽带 辐射。