公开(公告)号：WO2014097255A2

公开(公告)日：2014-06-26

申请号：PCT/IB2013/061208

申请日：2013-12-20

Applicant: METALLUX SA

Inventor： MONICHINO, Massimo

CPC classification number: G01L9/0051 ,  G01K13/02 ,  G01L9/0052 ,  G01L19/148

Abstract: A pressure sensor has a sensor body (2) made at least in part of electrically insulating material, having a first face (2a) and a second face (2b) opposite to one another, and a cavity (3), the cavity (3) being closed at at least one axial end thereof by a diaphragm portion. The pressure sensor (1) comprises a circuit arrangement (5) supported by the sensor body (2) and includes: - a first electrical-circuit pattern, comprising respective tracks made of electrically conductive material deposited on the first face, on its side external to the cavity, there being connected to the first electrical-circuit pattern a plurality of first circuit components, amongst which detection means for detecting bending or deformation of the membrane portion; - a second electrical-circuit pattern (7), comprising respective tracks made of electrically conductive material (10, 11 ) deposited on a region of the second face (2b), there being connected to the second electrical-circuit pattern (7) at least one second circuit component (8; 8') having an active part (8a), that is to be exposed to the fluid, and at least one first connection terminal (8b) and one second connection terminal (8b); and - connection means, which electrically connect the first electrical -circuit pattern to the second electrical-circuit pattern (7) and extend in an axial direction of the sensor body (2). The tracks (10, 11) of the second electrical-circuit pattern (7) comprise at least one first track (10) defining a plurality of first pads (10a) and one second track (11) defining a plurality of second pads (11a), for connection of the first terminal (8b) and of the second terminal (8b) of the second circuit component (8; 8'), respectively. The first and second track (10, 11 ) are prearranged so that the first terminal (8b) and the second terminal (8b) of the second circuit component (8; 8') can be connected to any one of the first pads (10a) and to any one of the second pads (11a), respectively, and/or to the first pad (10a) and to the second pad (11a), respectively, of any one of a plurality of pairs of first and second pads (10a, 11a).

Abstract translation: 压力传感器具有至少部分由电绝缘材料制成的传感器体（2），具有彼此相对的第一面（2a）和第二面（2b），以及空腔（3），空腔 ）在其至少一个轴向端处被隔膜部分封闭。 压力传感器（1）包括由传感器主体（2）支撑的电路装置（5），包括： - 第一电路图案，包括由导电材料制成的各个轨道，该导电材料沉积在第一面上，外侧 连接到第一电路图案的多个第一电路部件，其中检测装置用于检测膜部分的弯曲或变形; - 第二电路图案（7），其包括由沉积在所述第二面（2b）的区域上的导电材料（10,11）制成的各个轨道，所述第二电路图案连接到所述第二电路图案（7） 具有要暴露于流体的有源部分（8a）和至少一个第一连接端子（8b）和一个第二连接端子（8b）的至少一个第二电路部件（8; 8'）; 以及 - 连接装置，其将所述第一电路图案电连接到所述第二电路图案（7）并沿所述传感器主体（2）的轴向方向延伸。 第二电路图案（7）的轨道（10,11）包括限定多个第一焊盘（10a）和限定多个第二焊盘（11a）的一个第二轨道（11）的至少一个第一轨道（10） ），用于分别连接第二电路部件（8; 8'）的第一端子（8b）和第二端子（8b）。 第一和第二轨道（10,11）被预先布置，使得第二电路部件（8; 8'）的第一端子（8b）和第二端子（8b）可以连接到第一焊盘（10a ）和分别与多对第一和第二垫中的任何一个的第二垫（11a）中的任一个分别连接到第一垫（10a）和/或第一垫（10a）和第二垫（11a） 10a，11a）。

公开(公告)号：WO2011141886A2

公开(公告)日：2011-11-17

申请号：PCT/IB2011/052090

申请日：2011-05-12

Applicant: METALLUX SA ,  SALMASO, Luca ,  MONICHINO, Massimo ,  NEBBIA, Fabio

Inventor： SALMASO, Luca ,  MONICHINO, Massimo ,  NEBBIA, Fabio

IPC: G01L9/00

CPC classification number: G01L9/0042 ,  G01L19/0069 ,  G01L19/0084 ,  G01L19/147 ,  G01L19/148 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/00014

Abstract: A pressure sensor ( 1 ) comprises a pressure-sensitive element, formed by a die made of semiconductor material (6), particularly silicon, a substrate (2) and an electric circuit (7) to which the die (6) is electrically connected. A face of the die (6) is directly bonded to a flat face (5) of the substrate (2) through at least one layer of glassy material (10). Preferably the electric circuit comprises a plurality of electrically conductive tracks (7), at least part of which is formed on the flat surface (5) of the substrate (2).

Abstract translation: 压力传感器（1）包括由半导体材料（6）制成的模具，特别是硅，基板（2）和电路（7）形成的压敏元件，模具（6）电连接到该压电元件 。 模具（6）的表面通过至少一层玻璃材料（10）直接结合到基底（2）的平面（5）上。 优选地，电路包括多个导电轨道（7），其至少一部分形成在基底（2）的平坦表面（5）上。

公开(公告)号：WO2021074846A1

公开(公告)日：2021-04-22

申请号：PCT/IB2020/059707

申请日：2020-10-15

Applicant: METALLUX SA

Inventor： MONICHINO, Massimo

IPC: G01L9/00 ,  G01L19/06

Abstract: A sensor (1) for detecting the pressure of a fluid has a sensor body (2) that comprises at least one first body part (3) and one second body part (4), each having a first face and a second face opposite to one another. The first body part (3) and the second body part (4) are joined together in such a way that the first face of the first body part (3) faces the first face of the second body part (4), at a distance therefrom. At least one of the first body part (3) and the second body part (4) includes a membrane portion (7), subject to elastic flexure or deformation towards the other one of the first part body (3) and the second body part (4) as a result of the pressure of the fluid, the membrane portion (7) defining the first face of the first body part (3) or of the second body part (4). The pressure sensor (1) has a circuit arrangement (8, 10) supported by the sensor body (2), which comprises at least one first electrical circuit (10) that extends at least in part in an area corresponding to the membrane portion (7) and is configured for detecting an elastic flexure or deformation thereof through at least one respective detection component (R1, R2, R4). The first electrical circuit (10) is associated to the first face of one of the first body part (3) and the second body part (4), and the first face of the other one of the first body part (3) and the second body part (4) forms or has associated thereto at least one circuit element (20), prearranged for interacting with the first electrical circuit (10) when an elastic flexure or deformation of the membrane portion (7) is of a degree at least equal to a substantially predetermined limit, to generate thereby information or a warning representative of at least one from among an excessive pressure of the fluid, an incorrect pressure measurement, and an anomalous state of the device.

公开(公告)号：WO2016166712A1

公开(公告)日：2016-10-20

申请号：PCT/IB2016/052153

申请日：2016-04-15

Applicant: METALLUX SA

Inventor： MONICHINO, Massimo ,  GRANDIS, Stefania

IPC: G01L9/00 ,  G01L19/00 ,  G01L19/14

CPC classification number: G01L19/0076 ,  G01L9/0051 ,  G01L9/0052 ,  G01L19/142 ,  G01L19/148

Abstract: A sensor has a sensor body (2) with a first face (2b) and a second face (2a) opposite to one another, and a circuit arrangement (5) supported by the sensor body (2) that includes: - a first electrical circuit pattern (6) on the first face (2b); - a second electrical circuit pattern (7) on the second face (2a); - connection means (14-14a, 15-15a), which electrically connect the first circuit pattern (6) to the second circuit pattern (7) and comprise at least one through hole (14-14a, 15-15a) that extends axially between the two faces (2a, 2b) of the sensor body (2), where extending over an inner surface of the at least one through hole (14-14a, 15-15a) is a layer of electrically conductive material (14a, 15a); - a plurality of terminals (10), for connection of the circuit arrangement (5) to an external system, the terminals (10) being electrically connected to at least one of the first circuit pattern (6) and the second circuit pattern (7). The at least one through hole (14-14a, 15-15a) is preferably closed at the second face (2a) of the sensor body (2) via a closing member (30) having a body (30a) that is at least in part pre-formed. The pre-formed body (30a) of the closing member (30) has a closing portion (31) having a perimetral or cross-sectional dimension, in particular a diameter, greater than a perimetral or cross-sectional 20 dimension, in particular a diameter, of the opening of the through hole (14-14a, 15-15a) at the second face (2a) of the sensor body (2). At least one portion (31, 32) of the pre-formed body (30a) of the closing member (30) is fixed in position in a fluid-tight way with respect to the corresponding hole (14-14a, 15-15a).

Abstract translation: 传感器具有传感器主体（2），其具有彼此相对的第一面（2b）和第二面（2a），以及由传感器主体（2）支撑的电路装置（5），包括： - 第一电 电路图案（6）在第一面（2b）上; - 第二面（2a）上的第二电路图案（7）; - 连接装置（14-14a，15-15a），其将第一电路图案（6）电连接到第二电路图案（7）并且包括至少一个轴向延伸的通孔（14-14a，15-15a） 在所述传感器体（2）的两个面（2a，2b）之间，在所述至少一个通孔（14-14a，15-15a）的内表面上延伸的是导电材料层（14a，15a） ）; - 多个端子（10），用于将电路装置（5）连接到外部系统，所述端子（10）电连接到第一电路图案（6）和第二电路图案（7）中的至少一个 ）。 优选地，至少一个通孔（14-14a，15-15a）经由封闭构件（30）在传感器主体（2）的第二面（2a）处封闭，所述闭合构件（30）具有至少在 部分预先形成。 封闭构件（30）的预成形体（30a）具有封闭部分（31），该闭合部分具有大于周长或横截面的20维度的周长或横截面尺寸，特别是直径，特别是 在传感器体（2）的第二面（2a）处的通孔（14-14a，15-15a）的开口的直径。 关闭构件（30）的预成型体（30a）的至少一部分（31,32）相对于相应的孔（14-14a，15-15a）以流体密封的方式固定就位， 。

公开(公告)号：WO2012007922A1

公开(公告)日：2012-01-19

申请号：PCT/IB2011/053154

申请日：2011-07-14

Applicant: METALLUX SA ,  MONICHINO, Massimo

Inventor： MONICHINO, Massimo

IPC: G01L9/00

CPC classification number: H01L29/66007 ,  G01L9/0052 ,  G01L19/147 ,  G01L19/148 ,  H01L29/84

Abstract: A sensor, in particular a pressure sensor, having: - a structure, which comprises a supporting body (10); - a circuit arrangement (4), comprising circuit components (3a, 3b, 3c, 3d), amongst which detection means (3c) for generating electrical signals representing a quantity to be detected; and - at least one circuit support (4a). which is connected to the supporting body (10) and has a surface, formed on which is a plurality of said circuit components (3a, 3b, 3c.3d), amongst which electrically conductive paths (3a. 3b). where the circuit support (4a) is laminated on the first face (10a) of the supporting body (10).

Abstract translation: 传感器，特别是压力传感器，具有： - 结构，其包括支撑体（10）; - 电路装置（4），包括电路部件（3a，3b，3c，3d），其中检测装置（3c）用于产生表示待检测的数量的电信号; 和 - 至少一个电路支撑件（4a）。 其连接到所述支撑体（10）并且具有形成有多个所述电路部件（3a，3b，3c.3d）的表面，其中，所述导电路径（3a，3b）中。 其中电路支撑件（4a）层压在支撑体（10）的第一面（10a）上。