Abstract:
This disclosure provides systems, methods and apparatus for providing multiple dielectric coatings for a shutter assembly. The multiple dielectric coatings include an outer dielectric coating and one or more inner dielectric coatings. The outer dielectric coating has an electrical trap density that is lower than electrical trap densities of the one or more inner dielectric coatings. The lower electrical trap density reduces the amount of charge buildup over various surfaces of the shutter assembly. This reduction in charge buildup also reduces electrostatic forces that may cause incorrect operation of the shutter assembly.
Abstract:
Systems, methods and methods of manufacture for, among other things, a MEMS display that has a substrate with a first and a second array of apertures. The first and second arrays are, typically, formed on the substrate so that the arrays are adjacent and define a field boundary line that may extend between the two arrays and along a width of the substrate. In at least one array, the apertures that are proximate the field boundary line are placed at locations on the substrate to reduce differences in luminance between one portion of the display and another portion of the display.