SINGLE COMPONENT HYDROPHOBIC COATING
    4.
    发明申请

    公开(公告)号:WO2020205038A1

    公开(公告)日:2020-10-08

    申请号:PCT/US2020/015302

    申请日:2020-01-28

    Abstract: A coating composition includes a polymer prepared from a mixture of reactants including (a) a fluorinated polysiloxane and (b) an alkoxy silane functional resin. The alkoxy silane functional resin includes a polyurethane resin or an acrylic resin. A substrate at least partially coated with the coating composition is also disclosed. A method of condensing a polar fluid by contacting a substrate at least partially coated with the coating composition with a polar fluid, such that the polar fluid condenses on at least a portion of the coated substrate is also disclosed.

    A SILICA-BASED SLURRY
    5.
    发明申请
    A SILICA-BASED SLURRY 审中-公开
    硅酸盐浆

    公开(公告)号:WO2002102910A1

    公开(公告)日:2002-12-27

    申请号:PCT/US2002/018574

    申请日:2002-06-13

    CPC classification number: C09G1/02 C09K3/1436 C09K3/1463 H01L21/3212

    Abstract: This invention relates to a slurry composition and a method of its preparation. In particular, the slurry composition of the present invention includes a silica wherein the silica comprises a surface modification. The silica-based slurry of the present invention is suitable for polishing articles and especially useful for chemical-mechanical planarization ("CMP") of semiconductor and other microelectronic substrates.

    Abstract translation: 本发明涉及一种浆料组合物及其制备方法。 特别地,本发明的浆料组合物包括二氧化硅,其中二氧化硅包括表面改性。 本发明的二氧化硅基浆料适用于抛光制品,特别适用于半导体和其他微电子基板的化学机械平面化(“CMP”)。

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