公开(公告)号：WO2014016794A1

公开(公告)日：2014-01-30

申请号：PCT/IB2013/056101

申请日：2013-07-25

Applicant: PRIMESENSE LTD.

Inventor： SROMIN, Alexander ,  CHAYAT, Naftali ,  ERLICH, Raviv ,  GERSON, Yuval ,  SHPUNT, Alexander ,  WEBER, Raviv

IPC: G02B26/08 ,  G02B26/10 ,  H02K33/16

CPC classification number: G01S17/89 ,  G01S7/4817 ,  G02B26/085 ,  G02B26/101 ,  H02K33/16

Abstract: Optical apparatus (64) includes a stator assembly (47), which includes a core (78, 90, 91) containing an air gap and one or more coils (80, 92, 94, 116, 120) including conductive wire wound on the core so as to cause the core to form a magnetic circuit through the air gap in response to an electrical current flowing in the conductive wire. A scanning mirror assembly (45, 83, 85, 130) includes a support structure (68), a base (72), which is mounted to rotate about a first axis relative to the support structure, and a mirror (46), which is mounted to rotate about a second axis relative to the base. At least one rotor (76, 132) includes one or more permanent magnets, which are fixed to the scanning mirror assembly and which are positioned in the air gap so as to move in response to the magnetic circuit. A driver (82) is coupled to generate the electrical current in the one or more coils.

Abstract translation: 光学设备（64）包括定子组件（47），该定子组件包括一个包含气隙的芯体（78,90,91）和一个或多个线圈（80,92,94,116,120） 以使芯体响应于在导线中流动的电流而通过气隙形成磁路。 扫描反射镜组件（45,83,85,130）包括支撑结构（68），安装成围绕第一轴线相对于支撑结构旋转的基座（72）以及反射镜（46） 被安装成相对于底座围绕第二轴线旋转。 至少一个转子（76,132）包括一个或多个永久磁铁，它们固定在扫描反射镜组件上并且位于气隙中，以响应于磁路而移动。 驱动器（82）被耦合以产生一个或多个线圈中的电流。

公开(公告)号：WO2014064606A1

公开(公告)日：2014-05-01

申请号：PCT/IB2013/059531

申请日：2013-10-22

Applicant: PRIMESENSE LTD.

Inventor： ERLICH, Raviv ,  GERSON, Yuval ,  SHPUNT, Alexander

IPC: G02B26/08 ,  B81C1/00 ,  B81C3/00 ,  H01L21/02 ,  H01L21/58 ,  H01L21/68

CPC classification number: G02B26/0833 ,  B81B2201/042 ,  B81B2203/0109 ,  B81C1/00484 ,  B81C1/00904 ,  G02B26/085 ,  G02B26/101 ,  H01L2924/0002 ,  H01L2924/0001

Abstract: A method for fabrication of a device (206) from a wafer (170) of semiconductor material includes locally thinning the wafer in an area of the device to a predefined thickness by removing the semiconductor material from at least a first side of the wafer using a wet etching process, and etching through the thinned wafer in the area of the device so as to release a moving part (202) of the device. Other methods and systems for fabrication are also described.

Abstract translation: 用于从半导体材料的晶片（170）制造器件（206）的方法包括通过使用以下步骤从晶片的至少第一侧移除半导体材料，将器件的区域中的晶片局部变薄到预定厚度 湿蚀刻工艺，以及通过设备区域中的薄化晶片进行蚀刻，以释放器件的移动部件（202）。 还描述了用于制造的其它方法和系统。

公开(公告)号：WO2013140307A1

公开(公告)日：2013-09-26

申请号：PCT/IB2013/051985

申请日：2013-03-13

Applicant: PRIMESENSE LTD.

Inventor： CHAYAT, Naftali ,  GERSON, Yuval

IPC: G06T17/00 ,  G02B26/10

CPC classification number: G01B11/24 ,  G01S7/4817 ,  G01S17/10 ,  G01S17/42 ,  G01S17/89 ,  G02B26/085 ,  G02B26/101 ,  G02B26/105 ,  H01L21/50

Abstract: An optical scanning device (64) includes a substrate (68), which is etched to define an array (100) of two or more parallel micromirrors (102) and a support (72) surrounding the micromirrors. Respective spindles (106) connect the micromirrors to the support, thereby defining respective parallel axes of rotation of the micromirrors relative to the support. One or more flexible coupling members (108) are connected to the micromirrors so as to synchronize an oscillation of the micromirrors about the respective axes.

Abstract translation: 光学扫描装置（64）包括衬底（68），其被蚀刻以限定两个或更多个平行微镜（102）的阵列（100）和围绕微镜的支撑件（72）。 相应的主轴（106）将微镜连接到支撑件，从而限定微镜相对于支撑件的相应的平行旋转轴线。 一个或多个柔性联接构件（108）连接到微镜，以使微镜围绕各个轴的振荡同步。