MODERATE TEMPERATURE CVD ALPHA ALUMINA COATING

    公开(公告)号:WO2023088866A1

    公开(公告)日:2023-05-25

    申请号:PCT/EP2022/081899

    申请日:2022-11-15

    IPC分类号: C23C16/02 C23C16/40 C23C28/04

    摘要: The invention relates to a process for manufacturing a coated cutting tool for chip-forming metal machining consisting of a substrate of cemented carbide, cermet or cubic boron nitride based ceramic material and a single-layered or multi-layered wear resistant hard coating, the layers of the hard coating comprise at least one alpha (a) phase AI2O3 coating layer being deposited by chemical vapour deposition (CVD) at an average thickness in the range from 1 μm to 20 μ pm, wherein the deposition of the alpha phase AI2O3 coating layer is carried out at a temperature in the temperature range from 600 to 900°C, using a process gas composition, as introduced into the CVD reactor, comprising or consisting of AlCl3, H2O, H2 and optionally MCI and/or a sulfur source, selected from H2S, SF6, SO2 and SO3, wherein in the process gas composition, as introduced into the CVD reactor, the volume ratio of H2O / AlCh is in the range from 0.5 to 2.5, and the volume ratio of H2O/ AlCl3 is in the range from 200 to 3000.

    TOOL WITH TiAIN COATING
    2.
    发明申请
    TOOL WITH TiAIN COATING 审中-公开
    工具与钛涂层

    公开(公告)号:WO2017016826A1

    公开(公告)日:2017-02-02

    申请号:PCT/EP2016/065908

    申请日:2016-07-06

    申请人: WALTER AG

    IPC分类号: C23C16/34 C23C16/36 C23C16/56

    CPC分类号: C23C16/34 C23C16/36 C23C16/56

    摘要: Tool having a base body of cemented carbide, cermet, ceramics, steel or high-speed steel and a single-layer or multi-layer wear protection coating deposited thereon in the CVD process and having a thickness within the range of from 2 μm to 25 μm, wherein the wear protection coating comprises at least a Ti 1-x Al x C y N z layer with 0.40 ≤ x ≤ 0.95, 0 ≤ y ≤ 0.10 and 0.85 ≤ z ≤ 1.15 having a thickness in the range of from 1 μm to 16 μm and having >85 vol-% face-centered cubic (fcc) crystal structure, wherein the Ti 1-x Al x C y N z layer comprises precipitations of Ti 1-o AI o C p N q at the grain boundaries of the Ti 1-x Al x C y N z crystallites having a higher Al content than inside the crystallites, wherein 0.95≤o≤1.00, 0≤p≤0.10, 0.85≤q≤1.15 and (0-x)≥0.05.

    摘要翻译: 在CVD工艺中沉积有硬质合金,金属陶瓷,陶瓷,钢或高速钢的基体的工具和沉积在其上的单层或多层耐磨保护涂层,其厚度在2μm至25μm的范围内 μm,其中所述耐磨保护涂层至少包括厚度在1μm至16μm范围内的具有0.40≤x≤0.95,0≤y≤0.10且0.85≤z≤1.15的具有> 85的Ti1-xAlxCyNz层 体积百分比的面心立方(fcc)晶体结构,其中Ti1-xAlxCyNz层包含在具有比内部更高的Al含量的Ti1-xAlxCyNz微晶的晶界处的Ti1-oAlClpNq的沉淀,其中0.95≤o≤ 1.00,0≤p≤0.10,0.90≤q≤1.15和(0-x)≥0.05。

    CUTTING TOOL WITH TEXTURED ALUMINA LAYER
    3.
    发明申请
    CUTTING TOOL WITH TEXTURED ALUMINA LAYER 审中-公开
    切割工具与纹理氧化铝层

    公开(公告)号:WO2018001784A1

    公开(公告)日:2018-01-04

    申请号:PCT/EP2017/064997

    申请日:2017-06-20

    申请人: WALTER AG

    IPC分类号: C23C16/02 C23C16/40

    摘要: A coated cutting tool consisting of a substrate of cemented carbide, cermet, ceramics, steel or cubic boron nitride and a multi-layered wear resistant coating deposited by chemical vapour deposition (CVD) and having a total thickness from 4 to 25 μιτι, wherein the multi-layered wear resistant coating comprises a TiAICN layer (a) represented by the general formula Ti 1-x Al x C y N z with 0.2 2 0 3 layer (b) of kappa aluminium oxide deposited by CVD immediately on top of the TiAICN layer (a), and wherein the Ti 1-x Al x C y N z layer (a) has an overall fiber texture with the {111} plane preferentially growing parallel to the substrate surface, the fiber texture being characterized in that a {111} pole figure of the Ti 1-x Al x C y N z layer (a), measured by X-ray diffraction or electron backscatter diffraction over an angle range of 0°≤a≤80°, has an intensity maximum within 2 O 3 layer (b) has an overall fiber texture with the {002} plane preferentially growing parallel to the substrate surface, the fiber texture being characterized in that a {002} pole figure of the K-AI 2 O 3 layer (b), measured by X-ray diffraction or electron backscatter diffraction over an angle range of 0°≤a≤80°, has an intensity maximum within

    摘要翻译: 由硬质合金,金属陶瓷,陶瓷,钢或立方氮化硼的基材和通过化学气相沉积(CVD)沉积并具有总厚度的多层耐磨涂层组成的涂覆的切削工具 其中所述多层耐磨涂层包含由通式Ti 1-x Al x x C y所表示的TiAICN层(a) y Nz z,其中0.2

    TIALCN-SCHICHTEN MIT LAMELLENSTRUKTUR
    5.
    发明申请
    TIALCN-SCHICHTEN MIT LAMELLENSTRUKTUR 审中-公开
    具有散热片结构TiAlCN中LAYERS

    公开(公告)号:WO2015135802A1

    公开(公告)日:2015-09-17

    申请号:PCT/EP2015/054450

    申请日:2015-03-03

    申请人: WALTER AG

    IPC分类号: C23C16/34 C23C16/36

    摘要: Werkzeug mit einem Grundkörper aus Hartmetall, Cermet, Keramik, Stahl oder Schnellarbeitsstahl und einer darauf im CVD-Verfahren aufgebrachten ein- oder mehrlagigen Verschleißschutzbeschichtung mit einer Dicke im Bereich von 3 μιη bis 25 μιη, wobei die Verschleißschutzbeschichtung wenigstens eine Ti 1-x Al x C y N z -Lage mit Stöchiometriekoeffizienten 0,70 ≤ x 1-x Al x C y N z -Lage eine lamellare Struktur besitzt mit Lamellen mit einer Dicke von nicht mehr als 150 nm, vorzugsweise nicht mehr als 100 nm, besonders bevorzugt nicht mehr als 50 nm, wobei - die Lamellen aus periodisch alternierenden Bereichen der Ti 1-x Al x C y N z -Lage mit abwechselnd unterschiedlichen stöchiometrischen Anteilen an Ti und AI gebildet sind, welche die gleiche Kristallstruktur (kristallographische Phase) aufweisen, und - die Ti 1-x Al x C y N z -Lage wenigstens 90 Vol.-% kubisch flächenzentrierte (fcc) Kristallstruktur aufweist.

    摘要翻译: 具有硬质金属,金属陶瓷,陶瓷,钢或高速钢和通过CVD工艺在其上的基体,其特征在于TI1-xAlxCyNz层施加具有厚度在3μιη的范围内的一个或多个层耐磨涂层25μιη耐磨涂层的至少一个,与工具 化学计量比0.70≤X <1,0≤ÿ<0.25和0.75≤Z <1,15和具有厚度在1.5微米至17微米,其特征在于,所述范围 - 该Ti1- xAlxCyNz层具有厚度不大于150纳米的具有层状结构的层状,优选不大于100nm,更优选不大于50纳米,其特征在于, - 以交替的TI1-xAlxCyNz位置周期性交替区域的薄片 不同化学计量比例被Ti和Al,具有相同的晶体结构(结晶相)的形成,并且 - 至少90体积%的立方f的TI1-xAlxCyNz位置 具有lächenzentrierte(FCC)晶体结构。

    COATED CUTTING TOOL
    6.
    发明申请
    COATED CUTTING TOOL 审中-公开

    公开(公告)号:WO2018138255A1

    公开(公告)日:2018-08-02

    申请号:PCT/EP2018/051950

    申请日:2018-01-26

    申请人: WALTER AG

    IPC分类号: C23C28/04 C23C16/40 C23C30/00

    摘要: The present invention relates to a coated cutting tool comprising a substrate and a coating, wherein the coating comprises an inner layer of 4-14 µm thick Ti 1-x Al x N, an intermediate layer of 0.05-1 µm TiCN and at least one outer layer of 1-9 µm α-Al 2 O 3 , wherein said α-Al 2 O 3 layer exhibits an X-ray diffraction pattern, as measured using CuKα radiation and theta-2theta scan, and the texture coefficient TC(hkl) is defined according to Harris formula, wherein the (hkl) reflections used are (0 2 4), (1 1 6), (3 0 0) and (0 0 12), I(hkl) = measured intensity (peak intensity) of the (hkl) reflection, l0(hkl) = standard intensity according to ICDD's PDF-card No. 00-042-1468, n = number of reflections used in the calculation, and 3

    COATED CUTTING TOOL WITH H-ALN AND TI1-XALXCYNZ LAYERS
    7.
    发明申请
    COATED CUTTING TOOL WITH H-ALN AND TI1-XALXCYNZ LAYERS 审中-公开
    涂有H-ALN和TI1-XALXCYNZ层的切削刀具

    公开(公告)号:WO2017167980A1

    公开(公告)日:2017-10-05

    申请号:PCT/EP2017/057728

    申请日:2017-03-31

    申请人: WALTER AG

    摘要: A coated cutting tool consisting of a substrate of cemented carbide, cermet, ceramics, steel or cubic boron nitride and a multi-layered wear resistant coating, wherein the multi-layered wear resistant coating has a total thickness from 5 to 25 μιτι and comprises refractory coating layers deposited by chemical vapour deposition (CVD) or moderate temperature chemical vapour deposition (MT-CVD), and the multi-layered wear resistant coating comprises at least one pair of layers (a) and (b) with layer (b) being deposited immediately on top of layer (a), wherein layer (a) is a layer of aluminium nitride having hexagonal crystal structure (h-AIN) and a thickness from 10 nm to 750 nm, and layer (b) is a layer of titanium aluminium nitride or titanium aluminium carbonitride rep- resented by the general formula Ti 1-x Al x C y N z with 0.4 1-x Al x C y N z of layer (b) has a face-centered cubic (fcc) crystal structure.

    摘要翻译: 由硬质合金,金属陶瓷,陶瓷,钢或立方氮化硼的基材和多层耐磨涂层组成的涂层切削工具,其中多层耐磨涂层具有总厚度 从5至25μm并且包括通过化学气相沉积(CVD)或中等温度化学气相沉积(MT-CVD)沉积的耐火涂层,并且所述多层耐磨涂层包含至少一对层(a)和( b)层(b)立即沉积在层(a)的顶部上,其中层(a)是具有六方晶体结构(h-AlN)的氮化铝层并且厚度为10nm至750nm,层 (b)是一层氮化钛铝或碳氮化钛铝,其表示为通式Ti 1-x Al x-y C y, Nz与0.4

    COATED CUTTING TOOL INSERT WITH MT-CVD TiCN ON TiAl(C,N)
    8.
    发明申请
    COATED CUTTING TOOL INSERT WITH MT-CVD TiCN ON TiAl(C,N) 审中-公开
    在TiAl(C,N)上的MT-CVD TiCN涂层切割工具插件

    公开(公告)号:WO2016045937A1

    公开(公告)日:2016-03-31

    申请号:PCT/EP2015/070185

    申请日:2015-09-03

    申请人: WALTER AG

    摘要: A coated cutting tool consisting of a substrate of cemented carbide, cermet, ceramics, steel or cubic boron nitride and a multi-layered wear resistant coating having a total coating thickness from 5 to 25 pm and comprising at least two refractory coating layers deposited by chemical vapour deposition (CVD) or moderate temperature chemical vapour deposition (MT-CVD), the at least two refractory coating layers including a first coating layer and a second coating layer being deposited on top of each other, wherein the first coating layer consists of titanium aluminium nitride or carbonitride Ti 1-u Al u C v N w , with 0.2≤ u x C y N, 1-y, with 0.85≤x≤ 1.1 and 0.4≤ y≤ 0.85, and is deposited on top of the first coating layer by MT-CVD at a reaction temperature in the range from 600°C to 900°C, wherein the second Ti x C y N 1-y coating layer has a columnar grain morphology and the overall fiber texture of the Ti x C y N 1-y coating layer is characterized by a texture coefficient TC (111) > 2, the TC (111) being defined as follows: wherein (h k l) = measured intensity of the (hkl) reflection I 0 (h k l) = standard intensity of the standard powder diffraction data according to JCPDF card no. 42-1489 N= number of reflections used in the calculation, whereby the (hkl) reflections used are: (111), (200), (220) and (311).

    摘要翻译: 一种由硬质合金,金属陶瓷,钢或立方氮化硼的基底和多层耐磨涂层组成的涂层切割工具,其总涂层厚度为5至25μm,并且包括至少两个通过化学物质沉积的耐火涂层 气相沉积(CVD)或中温化学气相沉积(MT-CVD),所述至少两个耐火涂层包括沉积在彼此之上的第一涂层和第二涂层,其中第一涂层由钛 氮化铝或碳氮化物Ti1-uAluCvNw,其中0.2≤u<1,0,0≤v≤0.25且0.7≤w≤1.15,并且通过CVD在800℃至900℃的反应温度下沉积, 第二涂层由碳氮化钛TixCyN,1-y,0.85≤x≤1.1和0.4≤y≤0.85组成,并通过MT-CVD在600℃的反应温度下沉积在第一涂层的顶部 ℃至900℃,其中t 他的第二个TixCyN1-y涂层具有柱状晶粒形态,TixCyN1-y涂层的整体纤维织构的特点是纹理系数TC(111)> 2,TC(111)定义如下:其中(hkl )=(hkl)反射的测量强度I0(hkl)=根据JCPDF卡号的标准粉末衍射数据的标准强度。 N =计算中使用的反射数,由此使用的(hkl)反射为:(111),(200),(220)和(311)。

    WERKZEUG MIT CVD-BESCHICHTUNG
    9.
    发明申请
    WERKZEUG MIT CVD-BESCHICHTUNG 审中-公开
    与CVD涂层刀具

    公开(公告)号:WO2014173755A1

    公开(公告)日:2014-10-30

    申请号:PCT/EP2014/057720

    申请日:2014-04-16

    申请人: WALTER AG

    IPC分类号: C23C16/34

    摘要: Werkzeug mit einem Grundkörper aus Hartmetall, Cermet, Keramik, Stahl oder Schnellarbeitsstahl und einer darauf im CVD-Verfahren aufgebrachten ein- oder mehrlagigen Verschleißschutzbeschichtung, wobei die Verschleißschutzbeschichtung wenigstens eine Ti 1-x Al x C y N z -Lage aufweist mit Stöchiometriekoeffizienten 0,70 x y 0,25 und 0,75 z 1-x Al x C y N z -Lage eine Dicke im Bereich von 1 μm bis 25 μm hat und eine kristallographische Vorzugsorientierung aufweist, die durch ein Verhältnis der Intensitäten der Röntgenbeugungspeaks der kristallografischen {111}-Ebene und der {200}-Ebene charakterisiert ist, bei dem l{111} / I{200} > 1 +h (In h) 2 , wobei h die Dicke der Ti 1-x Al x C y N z -Lage in "μm" ist.

    摘要翻译: 具有硬质金属,金属陶瓷,陶瓷,钢或高速钢和随后的CVD工艺的一个基体工具施加的单 - 或多层耐磨涂层,所述耐磨涂层包括具有化学计量0.70 << /至少一个TI1-xAlxCyNz位置 U> X <1,0 << / U>ý << / U> 0.25和0.75 << / U>ž<1.15,其中,所述TI1-xAlxCyNz i-层具有25微米的厚度在1微米的范围内,并且具有优选的晶体取向,其特征在于所述结晶{111}面的X射线衍射峰和所述{200}面的强度的比率,其中I {111} / I {200} +> 1个小时(以h)2,其中h是TI1-xAlxCyNz位置的 “微米” 的厚度。