公开(公告)号：WO2016025772A1

公开(公告)日：2016-02-18

申请号：PCT/US2015/045152

申请日：2015-08-13

Applicant: ZYGO CORPORATION

Inventor： COLONNA DE LEGA, Xavier ,  FAY, Martin F. ,  DE GROOT, Peter, J.

IPC: G01M11/02 ,  G02B3/00

CPC classification number: G01M11/0271 ,  G01B11/2441 ,  G01M11/025

Abstract: A method for determining information about a transparent optical element including a lens portion and a plane parallel portion, the lens portion having at least one curved surface and the plane parallel portion having opposing first and second surfaces, includes: directing measurement light to the transparent optical element; detecting measurement light reflected from at least one location on the first surface of the plane parallel portion; detecting measurement light reflected from the second surface of the plane parallel portion at a location corresponding to the at least one location on the first surface; determining, based on the detected light, information about the plane parallel portion; and evaluating the transparent optical element based on the information about the plane parallel portion.

Abstract translation: 一种用于确定关于包括透镜部分和平面平行部分的透明光学元件的信息的方法，所述透镜部分具有至少一个曲面，并且所述平面平行部分具有相对的第一和第二表面，包括：将测量光引导到所述透明光学 元件; 检测从平面平行部分的第一表面上的至少一个位置反射的测量光; 在对应于所述第一表面上的所述至少一个位置的位置处检测从所述平面平行部分的所述第二表面反射的测量光; 基于检测到的光来确定关于平面平行部分的信息; 以及基于关于所述平面平行部分的信息来评估所述透明光学元件。

公开(公告)号：WO2016025505A1

公开(公告)日：2016-02-18

申请号：PCT/US2015/044695

申请日：2015-08-11

Applicant: ZYGO CORPORATION

Inventor： DE GROOT, Peter ,  BEVERAGE, Jake ,  COLONNA DE LEGA, Xavier ,  FAY, Martin F.

IPC: G01B9/02 ,  G01B9/04 ,  G01B11/24 ,  G01B11/30

CPC classification number: G01B9/02072 ,  G01B9/0209 ,  G02B21/002

Abstract: Calibrating a scanning interferometry imaging system includes: configuring the scanning interferometry imaging system for operation with an interference objective using light having a narrowband wavelength spectrum; using the scanning interferometry imaging system to direct measurement light and reference light along different paths and to overlap the measurement and reference light on a detector, the measurement and reference light having the narrowband wavelength spectrum; scanning an optical path length difference between the measurement light and the reference light at the detector while acquiring intensity data using the detector, the detector acquiring the intensity data at a frame rate and the scanning being performed at a scan speed; determining information about the scan speed based on the acquired intensity data, geometric information about the scanning interferometry imaging system, and the narrowband wavelength spectrum; and calibrating the scanning interferometry imaging system based on the information about the scan speed.

Abstract translation: 校准扫描干涉测量成像系统包括：使用具有窄带波长频谱的光，配置扫描干涉测量成像系统以用干涉物镜进行操作; 使用扫描干涉测量成像系统沿着不同路径引导测量光和参考光，并且将检测器上的测量和参考光重叠，具有窄带波长谱的测量和参考光; 在使用所述检测器获取强度数据的同时，在检测器处扫描测量光和参考光之间的光程长度差，所述检测器以帧速率获取强度数据，并以扫描速度进行扫描; 基于获取的强度数据，关于扫描干涉测量成像系统的几何信息和窄带波长谱确定关于扫描速度的信息; 并基于关于扫描速度的信息来校准扫描干涉测量成像系统。

公开(公告)号：WO2014126778A2

公开(公告)日：2014-08-21

申请号：PCT/US2014/015078

申请日：2014-02-06

Applicant: ZYGO CORPORATION

Inventor： COLONNA DE LEGA, Xavier

CPC classification number: G01B11/2441 ,  G01B9/02007 ,  G01B9/0203 ,  G01B9/02087 ,  G01B9/0209 ,  G01J3/0229 ,  G01J3/501

Abstract: Systems and methods for generating 3D representations of shape and color texture of a test surface are described. In one aspect, surface topography interferometers are equipped with a multi-element detector and an illumination system to produce a true-color image of the measured object surface. Color information can be presented as a true-color two-dimensional image or combined with topography information to form a three-dimensional representation of the shape and color texture of the object, effectively creating for a human observer the impression of looking at the actual part.

Abstract translation: 描述了用于生成测试表面的形状和颜色纹理的3D表示的系统和方法。 在一个方面，表面形貌干涉仪配备有多元素检测器和照明系统以产生所测量的物体表面的真实色彩图像。 颜色信息可以呈现为真彩色二维图像或与地形信息组合以形成对象的形状和颜色纹理的三维表示，有效地为人类观察者创造了观察实际部分的印象 。

公开(公告)号：WO2010062853A2

公开(公告)日：2010-06-03

申请号：PCT/US2009/065529

申请日：2009-11-23

Applicant: ZYGO CORPORATION ,  DAVIDSON, Mark ,  LIESENER, Jan ,  DE GROOT, Peter ,  COLONNA DE LEGA, Xavier ,  DECK, Leslie L.

Inventor： DAVIDSON, Mark ,  LIESENER, Jan ,  DE GROOT, Peter ,  COLONNA DE LEGA, Xavier ,  DECK, Leslie L.

IPC: G01N21/45 ,  G01B9/02

CPC classification number: G01B9/0209 ,  G01B9/02007 ,  G01B9/0201 ,  G01B9/02027 ,  G01B9/02039 ,  G01B9/02057 ,  G01B9/02068 ,  G01B9/02077 ,  G01B11/2441 ,  G01B2290/45 ,  G01B2290/70 ,  Y10T29/49002

Abstract: An apparatus includes a broadband scanning interferometry system including optics for combining test light from a test object with reference light to form an interference pattern on a detector. The apparatus includes a stage configured to scan an optical path difference (OPD) between the test and reference light from a common source to the detector and a detector system including the detector for recording the interference pattern for each of a series of OPD increments, the frequency of each OPD increment defining a frame rate. The optics are configured to produce at least two monitor interferometry signals indicative of changes in the OPD as it's scanned, the detector system being configured to record the monitor interferometry signals. The apparatus includes a processor configured to determine information about the OPD increments with sensitivity to perturbations to the OPD increments at frequencies greater than the frame rate.

Abstract translation: 一种装置包括宽带扫描干涉测量系统，其包括用于将来自测试对象的测试光与参考光组合以在检测器上形成干涉图案的光学器件。 该装置包括一个被配置成将来自公共源的测试参考光和参考光之间的光程差（OPD）扫描到检测器的级，以及包括用于记录一系列OPD增量中的每一个的干涉图案的检测器的检测器系统。 每个OPD增量的频率定义帧速率。 光学器件被配置为产生指示OPD在扫描时的变化的至少两个监测干涉测量信号，检测器系统被配置为记录监测干涉测量信号。 该装置包括处理器，其被配置为以大于帧速率的频率灵敏地确定对OPD增量的扰动来确定关于OPD增量的信息。

公开(公告)号：WO2003106920A1

公开(公告)日：2003-12-24

申请号：PCT/US2003/019202

申请日：2003-06-17

Applicant: ZYGO CORPORATION ,  COLONNA DE LEGA, Xavier ,  DE GROOT, Peter

Inventor： COLONNA DE LEGA, Xavier ,  DE GROOT, Peter

IPC: G01B9/02

CPC classification number: G01B9/02038 ,  G01B9/02065 ,  G01B9/0209 ,  G01B2290/70

Abstract: Interferometry methods and systems using coupled cavities and extended sources are disclosed. A main cavity (120) and a remote cavity (170) having similar optical properties are provided to compensate optical path differences (OPD) without degrading interference contrast in the image (109) of a camera (190). The remote cavity includes a stage (180) for adjusting the OPD. In one aspect the total OPD of the marginal rays is smaller than the wavelength when the total OPD of the chief rays is zero. In a further aspect the test and the reference light is coupled between the main cavity and the remote cavity with unit magnification. In another aspect two remote cavities are provided. In a further aspect a remote cavity is used to adjust a spherical portion of the optical measurement surface (150). In another aspect detachable optical assemblies are provided to form the main cavity.

Abstract translation: 公开了使用耦合腔和扩展源的干涉测量方法和系统。 提供具有相似光学特性的主腔（120）和远程腔（170）以补偿光路差（OPD），而不降低照相机（190）的图像（109）中的干涉对比度。 远程腔体包括用于调节OPD的平台（180）。 在一个方面，边缘射线的总OPD小于主射线的总OPD为零时的波长。 在另一方面，测试和参考光以单位放大率联接在主腔和远程腔之间。 在另一方面，提供两个远程腔。 在另一方面，使用远程腔来调节光学测量表面（150）的球形部分。 在另一方面，提供可拆卸的光学组件以形成主腔。

公开(公告)号：WO2016025769A1

公开(公告)日：2016-02-18

申请号：PCT/US2015/045149

申请日：2015-08-13

Applicant: ZYGO CORPORATION

Inventor： FAY, Martin F. ,  COLONNA DE LEGA, Xavier ,  DE GROOT, Peter J.

IPC: G01M11/00 ,  G01M11/02

CPC classification number: G01M11/0271 ,  G01B11/2441 ,  G01M11/025

Abstract: A method for determining information about an object including a curved portion and a planar portion, the curved portion having a first curved surface having an apex and defining an axis of the object, includes: directing measurement light to the object; detecting measurement light reflected from the first curved surface of the curved portion; detecting measurement light reflected from at least one other surface of the object; and determining, based on the detected light, information about the apex of the first curved surface of the curved portion.

Abstract translation: 一种用于确定关于包括弯曲部分和平面部分的物体的信息的方法，所述弯曲部分具有具有顶点并且限定所述物体的轴线的第一弯曲表面，包括：将测量光引导到所述物体; 检测从弯曲部分的第一曲面反射的测量光; 检测从所述物体的至少另一个表面反射的测量光; 以及基于检测到的光来确定关于弯曲部分的第一曲面的顶点的信息。

公开(公告)号：WO2010062860A2

公开(公告)日：2010-06-03

申请号：PCT/US2009/065572

申请日：2009-11-23

Applicant: ZYGO CORPORATION ,  DECK, Leslie L. ,  DE GROOT, Peter ,  DAVIDSON, Mark ,  LIESENER, Jan ,  COLONNA DE LEGA, Xavier

Inventor： DECK, Leslie L. ,  DE GROOT, Peter ,  DAVIDSON, Mark ,  LIESENER, Jan ,  COLONNA DE LEGA, Xavier

IPC: G01B9/04 ,  G01B9/02 ,  G02B21/06 ,  G02B21/00

CPC classification number: G01B9/0209 ,  G01B9/02007 ,  G01B9/0201 ,  G01B9/02027 ,  G01B9/02039 ,  G01B9/02057 ,  G01B9/02068 ,  G01B9/02077 ,  G01B11/2441 ,  G01B2290/45 ,  G01B2290/70 ,  Y10T29/49002

Abstract: Apparatus include a microscope including an objective and a stage for positioning a test object relative to the objective, the stage being moveable with respect to the objective, and a sensor system including a sensor light source, an interferometric sensor configured to receive light from the sensor light source, to introduce an optical path difference (OPD) between first and second portions of the light, the OPD being related to a distance between the objective lens and the stage, and to combine the light portions to provide output light, a detector for detecting the output light from the interferometric sensor, a fiber waveguide for directing light between the sensor light source, the interferometric sensor and the detector, a tunable optical cavity between the sensor light source and the interferometric sensor, and an electronic controller configured to determine information related to the OPD based on the detected output light.

Abstract translation: 装置包括显微镜，该显微镜包括物镜和用于相对于物镜定位测试物体的平台，平台相对于物镜可移动，以及传感器系统，其包括传感器光源，干涉仪 传感器，被配置为接收来自传感器光源的光，在光的第一部分和第二部分之间引入光程差（OPD），OPD与物镜和镜台之间的距离有关，并且将光部分 以提供输出光，用于检测来自干涉式传感器的输出光的检测器，用于在传感器光源，干涉式传感器和检测器之间引导光的光纤波导，在传感器光源和干涉式传感器之间的可调光腔， 以及电子控制器，被配置为基于检测到的输出光来确定与OPD相关的信息。

公开(公告)号：WO2003033994A1

公开(公告)日：2003-04-24

申请号：PCT/US2002/029254

申请日：2002-09-13

Applicant: ZYGO CORPORATION ,  DE GROOT, Peter, J. ,  COLONNA DE LEGA, Xavier

Inventor： DE GROOT, Peter, J. ,  COLONNA DE LEGA, Xavier

IPC: G01B9/02

CPC classification number: G01N21/9515 ,  G01B9/02039 ,  G01B9/02057 ,  G01B9/02072 ,  G01B9/0209 ,  G01B11/2441 ,  G01B11/306 ,  G01B2290/25

Abstract: Conical surfaces (and other complex surface shapes) can be interferometrically characterized using a locally spherical measurement wavefront (e.g, spherical and aspherical wavefronts). In particular, complex surface shapes are measured relative to a measurement point datum. This is achieved by varying the radius of curvature of a virtual surface (152) corresponding to a theoretical test surface that would reflect a measurement wavefront to produce a constant optical path length difference (e.g., zero OPD) between the measurement and reference waveforms.

Abstract translation: 锥形表面（和其他复杂表面形状）可以使用局部球形测量波前（例如球面和非球面波前）进行干涉测量。 特别地，相对于测量点数据测量复杂的表面形状。 这是通过改变对应于将反映测量波前的理论测试表面的虚拟表面（152）的曲率半径来实现的，以在测量和参考波形之间产生恒定的光程长度差（例如，零OPD）。